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SEMI F79-0703 © SEMI 2003 9 SEMI Gas # Chemical Name Cate gory Symbol Formula Synonym 61 Cyclopropane 3 C3H6 C 3 H 6 208 Diazomethane 3 CH2N2 CH 2 N 2 Acomethylene 338 Diethyl Ether 3 C4H10O C 2 H 5 OC 2 H 5 73 Dimethyl …

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SEMI F79-0703 © SEMI 2003
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APPENDIX 1
GASES BY CATEGORY
NOTICE: The material in this appendix is an official part of SEMI F79 and was approved by full letter ballot
procedures on April 11, 2003.
SEMI Gas # Chemical Name Category Symbol Formula Synonym
6.1 Inert
4 Argon 1 Ar Ar
1 Helium 1 He He
5 Krypton 1 Kr Kr
2 Neon 1 Ne Ne
3 Radon 1 Rn Rn
6 Xenon 1 Xe Xe
6.2 Hydrogen 2
14 Deuterium 2 D2 H
2
2
D2
7 Hydrogen 2 H2 H
2
159 Tritium 2 T2 H
2
3
T2
6.3 Hydrocarbons 3
345 1,3,5,7-Octatetraene 3 C8H10
CH
2
=CHCH=CHC
H=CHCH=CH
2
343 1,7-Octadiyne 3 C8H10
HC≡C(CH
2
)
4
C≡C
H
344 2,6-Octadiyne 3 C8H10
CH
3
C≡CCH
2
CH
2
C
≡CCH
3
342 3-one-2,5-dimethyl hexadiene 3 C8H10
CH
2
=C(CH
3
)C≡C
C(CH
3
)CH
2
178 4-Methyl, 1-Pentene 3 C6H12
(CH
3
)
2
CHCH
2
CH=
CH
2
331 Acetaldehyde Methoxy 3 C3H6O2 CH
3
OCH
2
CHO
184 Acetone 3 C3H6O CH
3
COCH
3
332 Acetone, Hydroxy 3 C3H6O2 CH
3
COCH2OH Acetol
42 Acetylene 3 C2H2
HC≡CH
Ethyne
66 Allene 3 C3H4 CH
2
=C=CH
2
Propadiene
197 Benzene 3 C6H6 C
6
H
6
100 Butadiene 3 C4H6 CH
2
=C=CHCH
3
Methylallene
117 Butane 3 C4H10 CH
3
(CH
2
)
2
CH
3
271 Butanol-1 3 C4H10O
CH
3
CH
2
CH
2
CH
2
O
H
336 Butanol-2 3 C4H10O
CH
3
CH
2
CH(OH)C
H
3
104 Butene 3 C4H8 CH
3
CH
2
CH=CH
2
1-Butene
107 Cisbutene 3 C4H8 CH
3
CH=CHCH
3
Cis-2-Butene
207 Cyclobutane 3 C4H8 C
4
H
8
Tetramethylene
SEMI F79-0703 © SEMI 2003 9
SEMI Gas # Chemical Name Category Symbol Formula Synonym
61 Cyclopropane 3 C3H6 C
3
H
6
208 Diazomethane 3 CH2N2 CH
2
N
2
Acomethylene
338 Diethyl Ether 3 C4H10O C
2
H
5
OC
2
H
5
73 Dimethyl Ether 3 C2H6O CH
3
OCH
3
Methylether
122 Dimethylpropane 3 C5H12 (CH
3
)
4
C Neopentane
54 Ethane 3 C2H6 CH
3
CH
3
136 Ethanol 3 C2H6O CH
3
CH
2
OH
93 Ethyl Acetylene 3 C4H6
CH
3
CH
2
C≡CH
291 Ethyl Formate 3 C3H6O2 HCO
2
C
2
H
5
Ethyl ester formic acid
174 Ethylbenzene 3 C8H10 C
6
H
5
C
2
H
5
38 Ethylene 3 C2H4 CH
2
=CH
2
Ethene
45 Ethylene Oxide 3 C2H4O C
2
H
4
O Acetaldehyde
169 Ethyleneglycol 3 C2H6O2 HOCH
2
CH
2
OH Ethanediol, Glycol
322 Formaldehyde 3 CH2O CH
2
O H2CO; UN1198; BFV
335 Glycidol 3 C3H6O2 CH
2
CHCH
2
OH 1-Propanol, 2,3 epoxy
333 Glycol Methylene Ether 3 C3H6O2 C
3
H
6
O
2
1,3-Dioxolane
127 Hexane 3 C6H14 CH
3
(CH
2
)
4
CH
3
170 Hexanediol-1,6 3 C6H14O2 HO(CH
2
)
6
OH Hexyleneglycol
111 Isobutane 3 C4H10 (CH
3
)
2
CHCH
3
2-Methylpropane
106 Isobutene 3 C4H8 (CH
3
)
2
C=CH
2
Isobutylene, Methylpropene
341 Isobutyl Alcohol 3 C4H10O (CH
3
)
2
CHCH
2
OH
231 Isopentane 3 C5H12 CH
3
CH
2
CH(CH
3
)
2
2-Methylbutane
187 Isopropal Alcohol 3 C3H8O (CH
3
)
2
CHOH 2-Propanol
28 Methane 3 CH4 CH
4
176 Methanol 3 CH4O CH
3
OH Methyl Alcohol
292 Methyl Acetate 3 C3H6O2 CH
3
CO
2
CH
3
Methyl ester acetic acid; UN
1231
68 Methyl Acetylene 3 C3H4
CH
3
C≡CH
Propyne
340 Methyl Isopropyl Ether 3 C4H10O (CH
3
)
2
CHOCH
3
305 Methyl methacrylate polymer 3 C5H8O2 C
5
H
8
O
2
Poly(methyl methacrylate)
339 Methyl Propyl Ether 3 C4H10O CH
3
OC
3
H
7
81 Methyl Vinyl Ether 3 C3H6O CH
3
OCH=CH
2
120 Methylbutene 3 C5H10 CH
3
CH
2
CCH
3
=CH
2
2-Methyl-1-Butene
177 Methylcyclohexane 3 C7H14 CH
3
C
6
H
11
Hexahydrotoluene
237 Octane 3 C8H18 CH
3
(CH
2
)
6
CH
3
179 o-Xylene 3 C8H10 1,2-(CH
3
)
2
C
6
H
4
1,2-Dimethylbenzene
240 Pentane 3 C5H12 CH
3
(CH
2
)
3
CH
3
180 Phenol 3 C6H6O C
6
H
5
OH
89 Propane 3 C3H8 CH
3
CH
2
CH
3
SEMI F79-0703 © SEMI 2003
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SEMI Gas # Chemical Name Category Symbol Formula Synonym
69 Propylene 3 C3H6 CH
3
CH=CH
2
Propene
319 Styrene 3 C8H8 C
8
H
8
Ethenylbenzene; Un 2055
337 Tertiary Butyl Alcohol 3 C4H10O (CH
3
)
3
COH
182 Tetrahydrofuran 3 C4H8O C
4
H
8
O
181 Toluene 3 C7H8 C
6
H
5
CH
3
Methylbenzene
98 Transbutene 3 C4H8 CH
3
CH=CHCH
3
264 Xylene p- 3 C8H10 1,4-(CH
3
)
2
C
6
H
4
1,4 Dimethyl Benzene
263 Xylene m- 3 C8H10 1,3-(CH
3
)
2
C
6
H
4
1,3 Dimethyl Benzene
6.4 Halogenated Hydrocarbons 4
186
2,2 Dichloro 1,1,1
Trifluoroethane
4 C2HCl2F3 CHCl
2
-CF
3
Freon 123, Suva 123
199 Bromochlorodifluoromethane 4 CBrClF2 BrClCF
2
105 Bromotrifluoroethylene 4 C2BrF3 CF
2
CFBr
80 Bromotrifluoromethane 4 CBrF3 BrCF
3
F-13B1, R-13B1
200 Carbon Tetrabromide 4 CBr4 CBr
4
101 Carbon Tetrachloride 4 CCl4 CCl
4
Tetrachloromethane
63 Carbon Tetrafluoride 4 CF4 CF
4
Tetrafluoromethane
46 Carbonyl Fluoride 4 CF2O CF
2
O
172 Chlorobenzene 4 C6H5Cl C
6
H
5
Cl Chlorobenzol, Phenylchloride
203 Chlorodifluoroethane 4 C2H3ClF2 CH
3
-CF
2
Cl R-142b
204
Chlorodifluoroethylene (FREON-
1122)
4 C2HClF2 CF
2
=CHCl R-1122, FREON-1122
57 Chlorodifluoromethane 4 CHClF2 CClHF
2
F-22, R-22
71 Chloroform 4 CHCl3 CHCl
3
Trichloromethane
119 Chloropentafluoroethane 4 C2ClF5 ClCF
2
CF
3
F-115, R-115
206
Chlorotrifluoroethylene (FREON-
1113)
4 C2ClF3 FCCl=CF
2
R-1113, FREON-1113
74 Chlorotrifluoromethane 4 CClF3 ClCF
3
F-13, R-13
209 Dibromodifluoromethane 4 CBr2F2 Br
2
CF
2
R-12B2, FREON-12B2
130 Dibromotetrafluorethane 4 C2Br2F4 BrF
2
CCF
2
Br F-114B2, R-114B2
84 Dichlorodifluoromethane 4 CCl2F2 CCl
2
F
2
F-12, R-12
210 Dichloroethylene 4 C2H2Cl2 CH
2
=CCl
2
Vinylidene Chloride
211 Dichloroethylene -cis 4 C2H2Cl2 CHCl=CHCl
191 Dichloroethylene -trans 4 C2H2Cl2 CHCl=CHCl
65 Dichlorofluoromethane 4 CHCl2F CHCl
2
F F-21, R-21
265 Dichloromethane 4 CH2Cl2 CH
2
Cl
2
125 Dichlorotetrafluoroethane 4 C2Cl2F4 F
3
CCCl
2
F F-114, R-114
103 Difluorochloroethane 4 C2H3ClF2 CF
2
ClCH
3
F-142B, R-142B
82 Difluoroethane 4 C2H4F2 CH
3
CHF
2
Ethylidene Fluoride, R-152A
64 Difluoroethylene 4 C2H2F2 CH
2
=CF
2
G-1132A,Vinylidenefluoride