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SEMI E30-1103 © SEMI 1992, 2003 38 PPExecName — The status variable containi ng the PPID(s) of the currently se lected process program(s). See SEMI E5 for a full definition of this variable data item. PP-SELECT — The rem…

SEMI E30-1103 © SEMI 1992, 2003

Host Equipment Constant Namelist Request:

COMMENTS HOST EQUIPMENT COMMENTS

Host constant namelist S2,F29-->

request <-- S2,F30 Equipment constant namelist

Operator Changes Equipment Constant

COMMENTS HOST EQUIPMENT COMMENTS

Operator changes equipment

constant at equipment

operator console.

<-- S6,F11 Equipment reports equipment

constant change.

Host acknowledges event S6,F12-->

4.6 Process Program Management — Process

programs and recipes must be managed through

interaction between the equipment and the host system.

4.6.1 Purpose — Process program management

provides a means to transfer process programs or

recieps, and to share the management of those process

programs or recipes, between the host and equipment.

4.6.2 Definitions

PPError  A text data value with information about

verification errors of a process program that failed

verification. If the equipment provides an event for

recipe verification and/or recipe verification failure,

then PPError shall be a DVVAL. Otherwise, PPError

shall be an SV.

PPFormat  A variable (SV) indicating the type or

types of process programs and recipes that are

supported.

1 = Unformatted process programs

2 = Formatted process programs

3 = Both unformatted and formatted process programs

4 = Execution recipes

5 = Large unformatted process programs

6 = Large formatted process programs

7 = Both large unformatted and large formatted process

programs

8 = Large execution recipes

and a combination of these formats. See SEMI E5 for a

compete list.

4.6.2.1 Definitions for Process Programs

Process Program — A process program is the pre-

planned and reusable portion of the set of instructions,

settings, and parameters under control of the equipment

that determine the processing environment seen by the

manufactured object and that may be subject to change

between runs or processing cycles.

Process Program Identifier — A text string (PPID)

used to identify a process program.

Formatted Process Program — A process program that

is presented as an ordered sequence of command codes

with their associated parameters as dictated by S7,F23,

and S7,F26. Where formatted process programs are

supported, equipment must also provide information

sufficient to allow a user at the host to create, display,

modify, and partially verify their contents (for example,

that information provided in S7,F22).

Unformatted Process Program — An unformatted

process program is transferred without structure as the

single data item PPBODY (refer to SEMI E5 for a

complete description of PPBODY).

Process Program Change Event — The collection

event associated with the occurrence of the creation,

modification, or deletion of a process program by the

operator.

PPChangeName — A data value (DVVAL) containing

the PPID of the process program affected by the event

Process Program Change Event. See SEMI E5 for a full

definition of this variable data item.

PPChangeStatus — The action taken on the process

program named by PPChangeName. This variable is

valid for the collection event Process Program Change

Event. See SEMI E5 for a full definition of this variable

data item.

SEMI E30-1103 © SEMI 1992, 2003

PPExecName — The status variable containing the

PPID(s) of the currently selected process program(s).

See SEMI E5 for a full definition of this variable data

item.

PP-SELECT — The remote command used to select

one or more process programs for execution. The

process programs are specified by PPID via the

command parameter list.

Process Program Verification — Verification is syntax

checking of a process program. Verification ensures

only that a process program is structured correctly. It

does not ensure that the program has the correct

parameters to run a particular process or product (see

Process Program Validation). Equipment supporting

unformatted process programs should provide a

variable DVVAL PPError that provides information to

the user concerning the error or errors when an attempt

to verify a process program fails.

NOTE 14: It may not be possible for the equipment to verify

unformatted process programs other than to check the size of

the program and internal program checksums. Equipment has

no standard means of indicating the type of error encountered

in an unformatted process program.

Process Program Validation — Validation is type-and-

range checking of parameters in a process program, and

is performed after verification.

4.6.2.2 Definitions for Recipes

Execution recipe — A type of recipe stored by the

equipment for purposes of editing, verification, and

execution.

For complete definitions of execution recipes and their

standard attributes, see SEMI E42, Section 6.

Execution Recipe Change Event — The collection event

associated with the occurrence of the modification or

deletion of an execution recipe stored by the equipment.

Note 15: A recipe is modified whenever its body is changed.

New Execution Recipe Event — The collection event

associated with the creation of a new execution recipe at

the equipment.

Object form recipe — A recipe with body in a

proprietary format that may be presented without

structure.

RcpChangeName — A data value (DVVAL) containing

the identifier of the recipe affected by the event

Execution Recipe Change Event or New Execution

Recipe Event. See the SEMI E5 Standard for a full

definition of this variable data item.

RcpChangeStatus — The action taken on the recipe

named by RcpChangeName. This variable is valid for the

collection event Execution Recipe Change Event or New

Execution Recipe Event. See the SEMI E5 Standard for

a full definition of this variable data item.

RcpExecName — The status variable containing the

specifiers of the currently selected recipe(s). See the

SEMI E5 Standard for a full definition of this variable

data item.

RCP-SELECT — The remote command used to select

one or more recipes for execution. See Section 4.4.3.

Recipe Attribute — Information about the recipe that is

transferred with the recipe as a name/value pair. The

value may be a single item or a list.

Recipe — A recipe contains both a set of instructions,

settings, and parameters that the equipment uses to

determine the processing environment (its body or

process program) and a set of attributes that provide

information about the recipe, such as the date and time

the body was last changed.

SEMI E42 defines two types of recipes: managed

recipes and execution recipes. For purposes of GEM,

the term recipe refers to an execution recipe only.

Recipe identifier — A recipe identifier is a formatted

text string (RCPID) used to identify the recipe.

Recipe specifier — A formatted text string (RCPSPEC)

used in messages to indicate a specific recipe. A recipe

specifier includes the recipe identifier. It may also

include additional information, such as the name of the

specific component of the equipment where the recipe

is to be executed (e.g. a process chamber) and the name

of a recipe repository on the host.

Recipe Verification — Verification is syntax checking of

a recipe’s body. Verification ensures that a recipe body is

structured correctly and has the correct syntax. It may

also provide a check of semantics. It does not ensure

that the body has the correct parameters to run a

particular process or product (see Recipe Validation).

NOTE 16: Unverified recipes shall be verified upon download.

Recipe Validation — Validation is type-and-range

checking of parameters in a recipe, and is performed

when the recipe is selected for execution. The recipe

may be correct in its syntax and semantics but should fail

validation if it can not be executed with the current

equipment configuration.

Source form recipe — A recipe with a body that is

presented as an ordered sequence of text. A source form

recipe may be created and edited off-line to the

equipment. Definition of syntax requirements shall be

documented, in order to allow proper off-line editing.

SEMI E30-1103 © SEMI 1992, 2003

Variable Parameters — Variable parameters are recipe

parameters that are defined in the body of the recipe and

whose run-time values may be set outside of the recipe

when the recipe is selected for execution and/or when

processing is started. Both the host and the operator may

specify new settings as a parameter name/value pair.

Variable Parameter Definition — A variable parameter

definition has three parts: the name of the variable

parameter, its default setting, and restrictions on the

run-time value selected. Variable parameter definitions

are stored in the recipe attribute “Parameters”.

4.6.3 Description

4.6.3.1 Process Program Description

Process programs allow the equipment’s process,

and/or the parameters used by that process, to be set

and modified by the engineer to achieve different

results. Different process programs maybe required for

different products, while often the same process

program will be used for all lots of a given product. The

engineer must be able to create such programs, to

modify current programs, and to delete programs from

equipment storage.

For the host to ensure that the proper process programs

are in place at the equipment, there must be a means of

transferring them from equipment to host and from host

to equipment. The host also may need to delete process

programs from the equipment’s storage to make room

for a process program to be downloaded. In addition,

the host must be kept informed whenever a local

change occurs in the contents or status of a process

program.

Both formatted and unformatted process programs may

be uploaded and downloaded. This capability provides

for both host- and equipment-initiated transfers. The

equipment-initiated transfer may be used at the request

of the process engineer or operator at the equipment.

If a process program exists with the same PPID as the

one given in the SECS-II message, the old process

program must be replaced. The PPID in the e process

program in non-volatile storage.

4.6.3.2 Recipe Description

Specifications in Section 4.6.3.1 apply to recipes as

well as process programs, with the following

differences:

• A recipe contains a body corresponding to a

process program. In addition, it contains attributes

defined for execution recipes in SEMI E42,

Section 6. Recipe attributes are transferred

whenever the recipe is downloaded or uploaded.

• The same SECS-II messages are used for all

execution recipes, regardless of the internal

structure of the recipe body.

• If an execution recipe already exists with the same

identifier as the one given in the SECS-II message,

the downloaded recipe shall be rejected (not

stored) unless the host has specified a “forced

overwrite” in the data item RCPOWCODE.

• A recipe currently being edited shall be protected

from inadvertent change or overwriting by a recipe

with the same identifier that is downloaded during

this time. If the downloaded recipe is accepted

(stored), the equipment shall require the operator

either to save the edited recipe to a new (unused)

identifier or to discard it.

• For the equipment to initiate either an upload or

download of a recipe, it shall request the host to

initiate an upload or download procedure. In

addition, it may be necessary to also specify the

name of the repository (recipe namespace) at the

host.

4.6.3.3 Large Process Programs and Recipes

4.6.3.3.1 Process programs and recipes for certain types

of equipment, such as metrology or inspection

equipment, contain images and are, therefore, very

large. Such process programs and recipes cannot fit into

a single multi-block SECS-II message that has a

maximum theoretical size of 7,995,148 text bytes.

Furthermore, process programs and recipes may also

require some preparation prior to transfer.

4.6.3.3.2 The commonly used Stream 7 and Stream 15

transfer functions require that the entire process

program be sent in a single message. Thus, it is not

possible to send a large process program or recipe with

such messages. However, there is an alternative set of

Stream 7 and Stream 15 functions that supports large

transfers. These messages invoke Stream 13 Data Set

Transfer Protocol messages to transfer large process

programs (or recipes) by using a sequence of read

messages. The completion of such a read transaction is

indicated by “ERROR: End of Data”. The Data Set

Transfer Protocol does not set any limit on the size of

the data set.

4.6.4 Requirements

• The equipment manufacturer shall provide a method

to create, modify, and delete process programs or

recipes. This method shall exist on either the

equipment or on a separate computing system.