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SEMI C58-0305 © SEMI 2005 1 SEMI C58-0305 SPECIFICATIONS AND GU IDELINES FOR HYDROGEN This specification was technically approved b y the Globa l Gases Com mittee and is the direct responsibility of the North American Ga…
SEMI C57-0305 © SEMI 2005 5
NOTE 6: The sampling system and hygrometer should be designed to operate under the sample pressure, or the sample pressure
must be reduced (by a regulator with a diaphragm of stainless steel or other suitable material) to accommodate the pressure
restrictions of the analytical hygrometer.
NOTE 7: Other hygrometers may also be used, e.g. CRDS, FTIR, TDLAS, and vibrating quarts.
9.5.1 Detection Limit — 0.1 ppm (vol/vol) at –90C (–130F).
9.5.2 Flow Requirements — Set the sample pressure and flow rate in accordance with the instrument
manufacturer’s instructions.
9.5.3 Calibration Standards — Construct a calibration curve which contains at least three points covering the range
of interest. Verify the standards employed independently by another analytical method.
9.5.4 Operating Procedure
9.5.4.1 Obtain a continuous flow sample of gas from the source using a clean and passivated stainless steel line
which has been purged dry after exposure to ambient moisture.
9.5.4.2 After prepurging with a dry gas, allow the sample gas to flow through the sampling system and the
piezoelectric moisture hygrometer until a stable reading is obtained.
9.5.4.3 Determine the moisture content of the argon sample by comparing the reading to calibration curve. The
result may not exceed the specification in Table 1.
10 Analytical Procedures for Grade 5.2 Argon (See Notes 1 and 2 in §9)
10.1 Carbon Monoxide and Carbon Dioxide — Use the procedure in ¶9.1 for the analysis of carbon monoxide and
carbon dioxide except that the calibration standard should be 0.2–1 ppm carbon monoxide, 0.2–1 ppm carbon
dioxide with balance Ar.
10.2 Hydrogen and Nitrogen — Use the procedure in ¶9.2 for the analysis of hydrogen and nitrogen except that the
calibration standard should be 5–25 ppm nitrogen in argon.
10.3 Oxygen — Use the procedure in ¶9.3 for the analysis of oxygen except that the calibration standard should be
0.5–2.5 ppm oxygen in argon.
10.4 Total Hydrocarbons — Use the procedure in ¶9.4 for the determination of total hydrocarbons.
10.5 Water — Use the procedure in ¶9.5 for the determination of water.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI C58-0305 © SEMI 2005 1
SEMI C58-0305
SPECIFICATIONS AND GUIDELINES FOR HYDROGEN
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on December 10, 2004. Initially available at www.semi.org February 2005; to be published
March 2005.
1 Purpose
1.1 The purpose of this document is to provide a series of specifications for different grades of Hydrogen (H
2
) that
are used in the semiconductor industry.
2 Scope
2.1 This document covers requirements for all grades of hydrogen used in the semiconductor industry.
2.2 If analytical methods are not complete, the requirements are presented as a guideline.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Description
3.1 Hydrogen is a colorless gas. Its vapors are highly flammable, colorless, tasteless, and nontoxic. It is the lightest
gas known.
4 Limitations
4.1 None.
5 Referenced Standards
5.1 SEMI Standards
SEMI C1 — Specifications for Reagents
SEMI C3 — Specifications for Gases
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
6 Terminology
6.1 Terminology appropriate to this standard is defined in SEMI C3.
7 Requirements
7.1 Purity and other requirements for the various grades of hydrogen are given in Table 1.
SEMI C58-0305 © SEMI 2005 2
Table 1 Impurity and Other Requirements for Various Grades of Hydrogen
Previous SEMI Reference # C3.19-0200
(Specification)
C3.30-0999
(Specification)
Grade 5.5 5.7
Purity 99.9995% 99.9997%
#1
Impurities Maximum Acceptable Level (ppm)
#2
Carbon Dioxide (CO
2
) 0.5 0.2
Carbon Monoxide (CO) 0.5 0.2
Nitrogen (N
2
) 2 2
Oxygen (O
2
) 0.5 0.2
Total Hydrocarbons expressed as Methane (THC) 0.5 0.2
Water (H
2
O) (v/v) 0.5 0.2
TOTAL SPECIFIED IMPURITIES 4.5 2.8
Particles
#3
#3
#1
A purifier is allowed to be used to meet this specification.
#2
An analysis of significant figures has not been considered. The number of significant figures is based on analytical accuracy and the precision
of the provided procedure.
#3
To be determined between supplier and user.
8 Physical Constants
8.1 The physical constants of hydrogen are given in Table 2 (for information only).
Table 2 Physical Constants of Hydrogen (for information only)
Metric Units US Units
Molecular weight 2.016 2.016
Boiling point at 1 atm
–252.7C –423.0F
Density of gas at 21.1C (70F)
and 1 atm
0.0834401 kg/m
3
0.005209 lb/ft
3
Specific gravity of gas at 21.1C
and 1 atm (air = 1)
0.06950 0.06950
Density of liquid at boiling point 68.6 kg/m
3
4.28 lb/ft
3
9 Analytical Procedures for Grade 5.5 Hydrogen
NOTE 1: Introduce the calibration standard as many times as necessary to achieve the desired precision.
NOTE 2: All gases used in the analysis of the sample should contain no more than 10% of the sample value of the component of
interest unless otherwise specified.
9.1 Carbon Monoxide and Carbon Dioxide — This procedure is for the determination of carbon monoxide and
carbon dioxide in hydrogen using a gas chromatograph with a flame ionization detector and methanizer.
9.1.1 Detection Limit — 100 ppb (mol/mol).
9.1.2 Instrument Parameters
9.1.2.1 Column: Porapak T or Q, 3 m (9.8 ft) by 3 mm (1/8 in) ID by 2.2 mm (0.085 in) OD stainless steel; or
Chromosorb 102, 2 m (6.6 ft) by 3 mm stainless steel; or equivalent
9.1.2.2 Carrier Flow: 30 mL/min helium.
9.1.2.3 Sample Volume: 0.5 to 2.0 mL.