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SEMI E49.5-0298 © SEMI 1995, 1998 4 8 Component Guidelines 8.1 For com po nent leak rate and c y c le life requirements , see Section 7. 8.2 Valves should be spri ngless, p a c kl ess, metal diaphragm type with all m eta…

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SEMI E49.5-0298 © SEMI 1995, 19983
Table 1 Summary of Recommended Specifications
Description Value Units
Internal Surface Chemistry (AUGER)
Surface chromium oxide enhanced layer thickness at
1/2 peak height of measured oxygen signal level
For an example of a test method, see SEMASPEC 90120573B (AUGER)
≥ 15 Å
Internal Surface Chemistry (ESCA)
Total chromium to iron ratio including both reduced
and oxidized states
For an example of a test method, see SEMASPEC 90120403B (ESCA)
≥ 1.25:1 value
Internal Surface Chemistry (EDX)
Surface foreign elements, those elements not in the
Smelter’s Test Report (SMTR)
Test procedures per ASTM F 1375 (EDX)
0value
Internal Surface Defects
Photos per test method
Counts per photo
Test procedures per ASTM F 1372 (SEM)
5
≤ 50
value
value
Internal Surface Roughness
Average surface roughness
Roughness average (R
a
)
Maximum surface R
a
(individual reading)
For an example of a test method, see SEMASPEC 90120400B (Contact Profilometry)
≤ 0.25
(≤ 10)
≤ 0.38
(≤ 15)
µm
(µin.)
µm
(µin.)
Particulate Contribution
at ≥ 0.1 µm size
at ≥ 0.02 µm size
Test procedures per ASTM F 1394 (Particles)
≤ 0.71 (20)
≤ 2.6 (75)
ptc/L (ptc/ft
3
)
ptc/L (ptc/ft
3
)
Internal Absorbed Moisture
Time to recover to base line from a 2 ppm spike
for low surface area component (valve, regulator)
Time to recover to baseline from a 2 ppm spike
for high surface area component (filters, tubing)
Test procedures per ASTM F 1397
≤ 4
≤ 6
hour
hour
Total Anionic Contamination
Total anionic contamination added to test water
Individual anionic contaminant
Test procedures per ASTM D 4327 (Total Anions)
≤ 1
≤ 0.2
ppm
ppm
Leak Rate
Inboard leak rates for He
Outboard leak rates for He
Cross-seat leak rates for He
Test procedures per SEMI F1 (Leak Rate)
≤ 1 × 10
−9
≤ 1 × 10
−5
≤ 4 × 10
−8
scc/s
scc/s
scc/s
Cycle Life
Manual valves
High pressure automatic valves
Low pressure automatic valves
Test procedures per ASTM F 1373 (Cycle Life)
≥ 25 K
≥ 25 K
≥ 500 K
cycles
cycles
cycles
SEMI E49.5-0298 © SEMI 1995, 1998 4
8 Component Guidelines
8.1 For component leak rate and c ycle life
requirements, see Section 7.
8.2 Valves should be springless, packless, metal
diaphragm type with all metal bonnet seals.
8.3 Regulators should be threadless, packless type
with all metal bonnet seals.
8.4 Regulators and valve flow coefficient (C
v
) should
be selected based on liquid flow requirements and
liquid characteristics.
8.5 Mechanical fittings should be all metal face seal
type with solid nickel gaskets.
8.6 Pressure transducers should be used in place of
bourdon tube pressure gauges.
8.7 Filters should be PTFE media rated at 0.05 µm
pore size.
8.8 Check valves should be disk poppet type.
9 Subsystem Assembly Gui delines
See SEMI E49.6 for recommended SS system assembly
procedures.
10 Related Documents
10.1 SEMATECH Documents
3
SEMASPEC 90120400B — Test Method for
Determination of Surface Roughness by Contact
Profilometry for Gas Distribution System Components
SEMASPEC 90120403B — Test Method for XPS
Analysis of Surface Composition and Chemistry of
Electropolished Stainless Steel Tubing for Gas
Distribution System Components
SEMASPEC 90120573B — Test Method for AES
Analysis of Surface and Oxide Composition of
Electropolished Stainless Steel Tubing for Gas
Distribution System Components
3 SEMATECH, Technology Transfer Department, 2706 Montopolis
Drive, Austin, TX 78741
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E49.6-1103 © SEMI 1995, 2003 1
SEMI E49.6-1103
GUIDE FOR SUBSYSTEM ASSEMBLY AND TESTING PROCEDURES -
STAINLESS STEEL SYSTEMS
This guide was technically approved by the Global Gases Committee and is the direct responsibility of the
North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on September 3, 2003. Initially available at www.semi.org October 2003; to be published
November 2003. Originally published in 1995.
NOTICE: This document was completely rewritten in
2003.
1 Purpose
1.1 The objective of this document is to establish
standard guidelines for cleanroom activities specific to
the manufacturing, assembly, testing, and integration of
materials and components used in stainless steel
semiconductor manufacturing equipment.
2 Scope
2.1 This standard has been developed as a guide for the
assembly and testing of high purity and ultrahigh purity
gas and solvent subsystems.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI C3.42 — Standard for Argon (Ar), VLSI Grade,
Bulk (Provisional)
SEMI C59 — Specifications and Guidelines for
Nitrogen
SEMI F1 — Specification for Leak Integrity of High-
Purity Gas Piping Systems and Components
SEMI F27 — Test Method for Moisture Interaction and
Content of Gas Distribution Systems and Components
by Atmospheric Pressure Ionization Mass Spectrometry
(APIMS)
SEMI F58 — Test Method for Determination of
Moisture Dry-Down Characteristics of Surface-
Mounted and Conventional Gas Distribution Systems
by Atmospheric Pressure Ionization Mass Spectrometry
(APIMS)
SEMI F70 — Test Method for Determination of
Particle Contribution of Gas Delivery System
SEMI F78 — Practice for Gas Tungsten Arc (GTA)
Welding of Fluid Distribution Systems in
Semiconductor Manufacturing Applications
SEMI F81 — Specification for Visual Inspection and
Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid
Distribution Systems in Semiconductor Manufacturing
Systems
3.2 ASTM Documents
1
ASTM F 1397 — Standard Test Method for
Determination of Moisture Contribution by Gas
Distribution Systems Components
3.3 ISO Documents
2
NOTE 1: Refer to the latest version of the following
documents for general cleanroom protocol.
ISO 14644-1 — Cleanrooms and Aassociated
controlled environments Part 1: Classification of air
cleanliness.
ISO 14644-2 — Cleanrooms and associated controlled
environments Part 2: Specifications for testing and
monitoring to prove continued compliance with ISO
14644-1.
ISO 14644-4 — Cleanrooms and associated controlled
environments Part 4: Design, construction, and startup.
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
4.1 See Section 4 of SEMI E49.
1 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohocken, Pennsylvania 19428-2959, USA.
Telephone: 610.832.9585, Fax: 610.832.9555, Website:
www.astm.org
2 International Organization for Standardization, ISO Central
Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,
Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30,
Website: www.iso.ch