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SEMI M48-1101 © SEMI 2001 8 Y site X site Figure 4 Cartesian Measureme nt Site Patterns

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SEMI M48-1101 © SEMI 2001 7
Notched Wafers = R
nom
– EE
Flatted Wafers = R
nom
– (EE
+ Flat Depth)
R/4
3R/4
R/2
Figure 3
Four Concentric Circles
SEMI M48-1101 © SEMI 2001 8
Y
site
X
site
Figure 4
Cartesian Measurement Site Patterns
SEMI M48-1101 © SEMI 2001 9
R
nominal
Figure 5
Single-Diameter High-Density Measurement Sites
Figure 6
Edge Scan Location