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SEMI E116-0705 © SEMI 2002, 2005 23 Table R1-6 Triggers of Tr ansitions for Specific Tasks of Carrier Transfer Mechanism in In ternal Buffer Unit # Previous State Trigger Ne w State Action(s) Comment 2 IDLE Transfer Star…

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SEMI E116-0705 © SEMI 2002, 2005 22
FB Type
TA TB TC
Equipment
(Process Area)
exit
entrance
IB Type
FIMS face
CHM
Figure R1-2
Carrier Handling Module
In Diagram R1-2, the following translation applies
FB Type = Fixed Buffer Type
IB Type = Internal Buffer Type
TA = Transport A
TB = Transport B
TC = Transport C
R1-6 Triggers of Transition for each Components of Carrier Handling Module
The following tables describe triggers to change the state of components for specific tasks.
Table R1-4 Triggers of Transitions for Specific Tasks of Carrier Handoff PIO
# Previous State Trigger New State Action(s) Comment
2 IDLE Receiving VALID
signal in SEMI E84.
BUSY Set off handoff
sequence
Loading or Unloading sequence.
Processing or moving wafers
between carrier and process
container before Unloading.
3 BUSY Receiving COMPT
signal in SEMI E84 or
Timeout in handoff
sequence.
IDLE Waiting
disconnected
Loading or Unloading sequence is
completed or terminated. Processing
or moving wafers between carrier
and process container after Loading.
Table R1-5 Triggers of Transitions for Specific Tasks of Carrier Transfer Mechanism on Loadport of Fixed
Buffer Type or FIMS Port of IB
# Previous State Trigger New State Action(s) Comment
2 IDLE Docking or Undocking
Started
BUSY None Carrier moving sequence before
docking. Processing or moving
wafers between carrier and process
container before undocking.
3 BUSY Docking or Undocking
Complete
IDLE None Processing or moving wafers
between carrier and process
container after docking.
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Table R1-6 Triggers of Transitions for Specific Tasks of Carrier Transfer Mechanism in Internal Buffer Unit
# Previous State Trigger New State Action(s) Comment
2 IDLE Transfer Started BUSY Moves carrier to
destination
3 BUSY Transfer Complete IDLE None Ready to unload or remove from
port.
Table R1-7 Triggers of Transitions for specific tasks of Carrier ID Reader
# Previous State Trigger New State Action(s) Comment
2 IDLE Reading Started BUSY None Carrier moving sequence before
reading.
3 BUSY Reading Complete IDLE Verification Processing or moving wafers
between carrier and process
container after opening.
Table R1-8 Triggers of Transitions for Specific Tasks of Carrier ID Writer
# Previous State Trigger New State Action(s) Comment
2 IDLE Writing Started BUSY None Processing wafers before writing.
3 BUSY Writing Complete IDLE Waiting next
writing or any
post writing
action
Carrier moving sequence after
writing.
Table R1-9 Triggers of Transitions for Specific Tasks of FOUP Opener
# Previous State Trigger New State Action(s) Comment
2 IDLE Opening or Closing
Started
BUSY None Carrier moving sequence before
opening.
3 BUSY Opening or Closing
Complete
IDLE None Processing or moving wafers
between carrier and process
container after opening.
Table R1-10 Triggers of Transitions for Specific Tasks of Slot Mapper
# Previous State Trigger New State Action(s) Comment
2 IDLE Scanning Started BUSY None Carrier moving sequence before
mapping.
3 BUSY Scanning Complete IDLE Waiting next
scan
Processing or moving wafers
between carrier and process
container after mapping.
Table R1-11 Triggers of Transitions Common for all Components of Carrier Handling Module
# Previous State Trigger New State Action(s) Comment
1 (no state) Initialization is
complete
IDLE None
7 BLOCKED Get Recovered IDLE None
8 IDLE Unable to do task BLOCKED None
9 BLOCKED Get another Fault BLOCKED None
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R1-7 Operation Scenarios for Carrier Handling Module
R1-7.1 A couple of following scenarios are typical for different type of Carrier Handling Module.
R1-7.2 Carrier Handling Module for Fixed Buffer Type
R1-7.2.1 Beside the number of Loadports, following table shows just one set of components out of them.
R1-7.2.2 Indicated subsystems: PIO = Carrier Handoff PIO Port, CID-R = Carrier ID Reader, X’fer Transfer
Mechanism = Carrier Transfer Mechanism (Docking Mechanism), CID-W = Carrier ID Writer, Opener = FOUP
Opener, Mapper = Carrier Slot Mapper.
Table R1-12 Scenario of Fixed Type Carrier Handling Module
Event # Description Time PIO CID-R. X’fer
Mech
CID-W Opener Mapper
0 Carrier Handling Module and all
components starting in “IDLE”
0:00 IDLE IDLE IDLE IDLE IDLE IDLE
1 Loading Started 0:30 BUSY
2 Loading Completed 1:00 IDLE
3 ID Reading Started 1:05
BUSY
4 ID Reading Complete 1:10
IDLE
5 ID Verification -
6 Docking Started 1:20
BUSY
7 Docking Complete 1:50
IDLE
8 Opening Start 1:55
BUSY
9 Opening Complete 2:25
IDLE
10 Mapping Started 2:30
BUSY
11 Mapping Complete 2:15
IDLE
12 Slotmap Verification -
13 Process Started 12:15
14 Process Completed 47:15
15 Writing Started 47:20
BUSY
16 Writing Complete 48:10
IDLE
17 Closing Start 48:10
BUSY
18 Closing Complete 48:40
IDLE
19 Undocking Started 48:45
BUSY
20 Undocking Complete 49:15
IDLE
21 Unloading Started 52:25 BUSY
22 Unloading Complete 52:55 IDLE
23 Carrier Handling Module and all
components returning in “IDLE”
52:55
R1-7.3 Carrier Handling Module for Internal Buffer Type
R1-7.3.1 It is assumed that Carrier Slot Mapper and Carrier ID Writer are mounted at an FIMS port next to Internal
Buffer located inside of the equipment. The following table shows the set of components of a single Loadport.
R1-7.3.2 Indicated subsystems: PIO = Carrier Handoff PIO Port, CID-R = Carrier ID Reader, X’fer A = Carrier
Transfer Mechanism from Handoff position to Carrier In/Out position, X’fer B = Carrier Transfer Mechanism of
Internal Buffer, X’fer C = Carrier Transfer Mechanism (Docking Mechanism) for internal FIMS port, CID-W =
Carrier ID Writer, Opener = FOUP Opener, Map = Carrier Slot Mapper