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SEMI F19-0304 © SEMI 1995, 2004 5 6.8.3 Waviness is acceptabl e if the surface roughness requirements are met. 6.8.4 Orange peel is acceptable if the surface roughness requirements are met. 6.8.5 Dents, frostiness, blist…

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SEMI F19-0304 © SEMI 1995, 2004 4
6.6.2 Sulfur (S), Phosphorous (P), Nitrogen (N) and
Silicon (Si) shall be < 2 atomic percent on the initial
surface by ESCA or AES.
6.6.3 All other contaminants shall be < 1 atomic
percent by ESCA or AES.
Table 1 Table of Specifications and Test Methods by Product Grade
NOTE: Oxide thickness > 5 nm (50 Å) approximately, formed by electropolishing may have an outer layer enriched in Iron, and therefore exhibit
poor corrosion resistance.
6.7 Corrosion Resistance Requirements — Corrosion
resistance of the surface shall be evaluated by the CPT
test method of ASTM G 150 or SEMI F77.
6.8 Visual Acceptance Criteria — Visual inspection of
the wetted surfaces for defects shall be performed under
normal room lighting. Additional lighting may be used
when appropriate to illuminate blind or darkened areas
and to clarify questionable areas. Visual inspection
shall be done with up to 4X magnification; if a possible
problem is detected, an 8 to 10X magnifier may be used
for clarification of the area in question.
6.8.1 Process and machining lines are acceptable on
GP grade surfaces if the surface roughness
requirements are met. Process and machining lines are
not acceptable on HP and UHP surfaces. Surface
finishing processes for HP and UHP surfaces are
expected to “round off” the lines to the degree that they
are not apparent by the SEM test method SEMI F73 and
are not well defined visually.
6.8.2 Scratches and haze that meet the surface
roughness requirements are acceptable on GP surfaces.
These defects are not acceptable on HP and UHP
surfaces.
General Purpose Grade
GP
High Purity Grade
HP
Ultra-High Purity Grade
UHP
Characteristic Test Method Value Value Value
Surface Roughness SEMI F37 ≤ 0.50 µm (20 µin) Ra
Avg.
≤ 0.62 µm (25 µin) Ra
Max.
≤ 3.75 µm (150 µin) Ry
Max.
≤ 0.25 µm (10 µin) Ra
Avg.
≤ 0.38 µm (15 µin) Ra
Max.
≤ 3.75 µm (150 µin) Ry
Max.
≤ 0.13 µm (5 µin) Ra Avg.
≤ 0.25 µm (10 µin) Ra
Max.
≤ 2.50 µm (100 µin) Ry
Max.
Surface Defects SEMI F73
(Not Applicable)
≤ 30 Avg, ≤ 50 Max
Counts/Photo
≤ 10 Avg, ≤ 20 Max
Counts/Photo
Surface Contamination SEMI F73
(Not Applicable)
No elements detectable by
EDS other than primary
alloying elements Fe, Cr,
Ni, Mo, residual elements
Mn and Silicon (Si), the O
of the passive layer, and
adsorbed C.
No elements detectable by
EDS other than primary
alloying elements Fe, Cr,
Ni, Mo, residual elements
Mn and Silicon (Si), the O
of the passive layer, and
adsorbed C.
Cr/Fe and CrOX/FeOX
ratios ≥ 1.0; oxide
thickness t ≥ 1.5 nm ( t ≥
15 Å). See Note.
Cr/Fe ratio ≥ 1.5 and
CrOX/FeOX ≥ 2.0; oxide
thickness t ≥ 1.5 nm ( t ≥
15 Å). See Note.
Surface Chemistry SEMI F60
(or SEMI F72 by
agreement)
Product must be passivated
per ASTM A967
Adsorbed Carbon
contamination shall be <30
atomic percent, declining
to base levels within 1.5
nm (15 Å) of the initial
surface. Sulfur (S),
Phosphorous (P), Nitrogen
(N) and Silicon (Si) shall
be < 2 atomic percent on
the initial surface. All
other contaminants shall be
< 1 atomic percent.
Adsorbed Carbon
contamination shall be
<30 atomic percent,
declining to base levels
within 1.5 nm (15 Å) of
the initial surface. Sulfur
(S), Phosphorous (P),
Nitrogen (N) and Silicon
(Si) shall be < 2 atomic
percent on the initial
surface. All other
contaminants shall be < 1
atomic percent.
Corrosion Resistance ASTM G 150;
SEMI F77
As agreed upon between
user and supplier.
As agreed upon between
user and supplier.
As agreed upon between
user and supplier.
SEMI F19-0304 © SEMI 1995, 2004 5
6.8.3 Waviness is acceptable if the surface roughness
requirements are met.
6.8.4 Orange peel is acceptable if the surface
roughness requirements are met.
6.8.5 Dents, frostiness, blistering and interrupted
electropolishing are not acceptable.
6.8.6 Contamination (water spots, rust, process
residues, chemical staining, etc.) are not acceptable.
6.8.7 Pitting, stringers, and inclusions apparent to the
unaided eye are not acceptable in UHP grade surfaces.
Acceptance of these defects in HP and UHP grade
surfaces shall be determined by the SEM test method of
SEMI F73 and shall be in conformance with the
specifications of Table 1.
7 Test Methods
7.1 Test methods are listed in Table 1 and described in
Section 6, Requirements.
8 Sampling
8.1 Sampling shall be per agreement between
component supplier and purchaser.
9 Certification
9.1 The component supplier shall provide the follow-
ing reports and certifications with all shipments of
processed components:
9.1.1 Name/part number/description of component(s),
9.1.2 Quantity of components by size or description,
9.1.3 Product grade of each size or category of
components per the classifications in this specification,
and
9.1.4 Certification that the manufacturing processes
were performed per an appropriate quality control
program and that the processes are qualified.
10 Product Labeling
10.1 Product labeling shall be per agreement between
component supplier and purchaser.
11 Related Documents
11.1 SEMI Standard
SEMI F55 — Test Method for Determining the
Corrosion Resistance of Mass Flow Controllers
11.2 ASME
2
Standards
2 American Society of Mechanical Engineers: United Engineering
Center, Three Park Avenue, New York, NY 10016-5990, USA.
ASME B46.1 — Surface Texture (Surface Roughness,
Waviness and Lay)
11.3 ASTM
1
Standards
ASTM F 1372 — Test Method for Scanning Electron
Microscope (SEM) Analysis of Metallic Surface
Condition for Gas Distribution System Components
ASTM F 1374 — Test Method for Ionic/Organic
Extractables of Internal Surfaces – IC/GC/FTIR for Gas
Distribution System Components
ASTM F 1375 — Test Method for Energy Dispersive
X-Ray Spectrometer (EDX) Analysis of Metallic
Surface Condition for Gas Distribution System
Components
ASTM F 1394 — Test Method for Determination of
Particle Contribution from Gas Distribution System
Valves
ASTM F 1396 — Test Method for Determination of
Oxygen Contribution by Gas Distribution System
Components
ASTM F 1397 — Test Method for Determination of
Moisture Contribution by Gas Distribution System
Components
ASTM F 1398 — Test Method for Determination of
Total Hydrocarbon Contribution by Gas Distribution
System Components
ASTM G 150 — Standard Test Method for
Electrochemical Critical Pitting Temperature Testing of
Stainless Steels
Telephone: 800.843.2763; Fax: 973.882.1717; Website:
http://www.asme.org
SEMI F19-0304 © SEMI 1995, 2004 6
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
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herein. These standards are subject to change without
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