semi合集-English.pdf - 第5989页

SEMI P42-0304 © SEMI 2004 22 < X > - 5 4 5 0 < / X > < Y > - 9 9 9 7 < / Y > < / Y - M a r k > <UnitType>um</UnitType> </WaferMarkP osition> <Comment>TR-negaty pe<…

SEMI P42-0304 © SEMI 2004 21

<X>10000</X>

<Y>8630</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>CT-POSITYPE</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>G10</AlignmentMarkID>

<Group>FIA</Group>

<WaferMarkType>NFPD-G-6N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>7550</X>

<Y>-10000</Y>

</X-Mark>

<Y-Mark>

<X>10000</X>

<Y>-7480</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>CT-POSITYPE</Comment>

</AlignmentMarkInformation>

<MarkUseRule>

<FileName>TEST-MARK</FileName>

</MarkUseRule>

</AlignmentMarkDesign>

<AlignmentUSEMark>

<AlignmentMarkInformation>

<AlignmentMarkID>TR-1</AlignmentMarkID>

<Group>Global</Group>

<WaferMarkType>NGD-G-N11</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>9997</X>

<Y>385</Y>

</X-Mark>

<Y-Mark>

<X>-5750</X>

<Y>-9997</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>TR-negatype</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>TR-2</AlignmentMarkID>

<Group>Global</Group>

<WaferMarkType>NGD-G-N40F</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>9997</X>

<Y>315</Y>

</X-Mark>

<Y-Mark>

SEMI P42-0304 © SEMI 2004 22

<X>-5450</X>

<Y>-9997</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>TR-negatype</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>TR-3</AlignmentMarkID>

<Group>LSA</Group>

<WaferMarkType>NLPD-G-3N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>-7050</X>

<Y>-10000</Y>

</X-Mark>

<Y-Mark>

<X>-10000</X>

<Y>-5980</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>TR-negatype</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>TR-4</AlignmentMarkID>

<Group>LSA</Group>

<WaferMarkType>NLPD-G-3N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>-6950</X>

<Y>10000</Y>

</X-Mark>

<Y-Mark>

<X>-10000</X>

<Y>7050</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>TR-negatype</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>TR-5</AlignmentMarkID>

<Group>LSA</Group>

<WaferMarkType>NLPD-G-3N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>6050</X>

<Y>10000</Y>

</X-Mark>

<Y-Mark>

<X>10000</X>

<Y>6950</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

SEMI P42-0304 © SEMI 2004 23

<Comment>TR-negatype</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>TR-6</AlignmentMarkID>

<Group>LSA</Group>

<WaferMarkType>NLPD-G-3N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>5950</X>

<Y>-10000</Y>

</X-Mark>

<Y-Mark>

<X>10000</X>

<Y>-5880</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>TR-negatype</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>TR-7</AlignmentMarkID>

<Group>FIA</Group>

<WaferMarkType>NFPD-G-6N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>-9170</X>

<Y>-10000</Y>

</X-Mark>

<Y-Mark>

<X>-10000</X>

<Y>-7300</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>TR-negatype</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>TR-8</AlignmentMarkID>

<Group>FIA</Group>

<WaferMarkType>NFPD-G-6N</WaferMarkType>

<WaferMarkPosition>

<X-Mark>

<X>-8990</X>

<Y>10000</Y>

</X-Mark>

<Y-Mark>

<X>-10000</X>

<Y>8810</Y>

</Y-Mark>

<UnitType>um</UnitType>

</WaferMarkPosition>

<Comment>TR-negatype</Comment>

</AlignmentMarkInformation>

<AlignmentMarkInformation>

<AlignmentMarkID>TR-9</AlignmentMarkID>

<Group>FIA</Group>