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SEMI E127-0705 © SEMI 2003, 2005 20 # Previous State Trigger New State Comment 11 BLOCKED 1. All fault conditions are cleared AND 2. Conditions allow a substrate transfer into the STPO to occur. READY TO LOAD The substat…

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SEMI E127-0705 © SEMI 2003, 2005 19
12.2.3 Substrate Transfer States
12.2.3.1 ASSIGNED — A substrate transfer operation, or normal operations (e.g., measurement) or conditions (e.g.,
calibration required or being performed) prevent substrate transfers to or from the module.
12.2.3.2 BLOCKED — Abnormal operations (e.g., abort) or conditions (e.g., faults) prevent substrate transfer to or
from the module.
12.2.3.3 READY TO LOAD — A substrate is not present on the Substrate Location, and that location is available to
be loaded with a substrate in this state. This is the only state in which substrate loads may be initiated.
12.2.3.4 READY TO UNLOAD — A substrate is present on the Substrate Location, and the substrate is available to
be unloaded from that location in this state. This is the only state in which substrate unloads may be initiated.
12.2.3.5 SUBSTRATE TRANSFER PATH — The parent state of the Substrate Transfer Path State Model. This state
has four substates, READY TO LOAD, READY TO UNLOAD, ASSIGNED and BLOCKED.
12.2.4 Table 6 defines the transitions of the STPO State Model.
Table 6 Substrate Transfer Path State Model Transitions
# Previous State Trigger New State Comment
1 (no state) IMM initialization complete
AND
All conditions allow a substrate to be
loaded.
READY TO
LOAD
2 (no state) IMM initialization complete
AND
A substrate is present in the Substrate
Location that may be unloaded.
READY TO
UNLOAD
3 (no state) IMM initialization complete
AND
The substrate transfer location is either
configured to be out of service, or a
fault condition exists that does not
allow substrate transfers.
BLOCKED
4 READY TO
LOAD
A substrate transfer is completed
without error.
ASSIGNED The STPO remains ASSIGNED until the
Substrate is either no longer within the STPO
and/or measurements have been completed and
the substrate can be removed.
5 ASSIGNED Conditions make the STPO available
for a substrate unload operation.
READY TO
UNLOAD
The substrate is at an unload location and is
ready for removal.
6 READY TO
UNLOAD
Normal conditions make the STPO
unavailable for substrate unload.
ASSIGNED Conditions that prevent a substrate unload
operation include the termination of an unload
operaton, another substrate transfer operation, or
another measurement of the same substrate is
now required. Note that no direct transition is
provided betwen the READY TO LOAD and
READY TO UNLOAD states.
7 ASSIGNED Conditions make the IMM module
available for a substrate load operation.
READY TO
LOAD
For example, a substrate has moved to a location
outside of the STPO, or a substrate removal has
been successfully completed.
8 ASSIGNED A fault condition occurred that prevents
substrate transfers.
BLOCKED
9 BLOCKED All fault conditions are cleared. ASSIGNED
10 READY TO
LOAD
A fault condition occurred that prevents
substrate transfers.
BLOCKED
SEMI E127-0705 © SEMI 2003, 2005 20
# Previous State Trigger New State Comment
11 BLOCKED 1. All fault conditions are cleared
AND
2. Conditions allow a substrate transfer
into the STPO to occur.
READY TO
LOAD
The substate load location is unoccupied.
12 BLOCKED 1. All fault conditions are cleared
AND
2. Conditions allow a substrate removal
from the STPO to occur.
READY TO
UNLOAD
The substrate unload location is occupied.
13 READY TO
UNLOAD
A fault condition occurred that prevents
substrate transfers.
BLOCKED
12.3 Object Attributes
12.3.1 The diagram for the STPO object is shown in Figure 5.
Substrate Transfer Path
EventList: list of text/integer pairs
SubstrateList: list of text
SubstIDRead: text
TransferState: enumeration
Delete
TransferPathCalibration
UpdateSubstrateObject
XfrCmdListRequest
XfrCommand
XfrVerify
XfrHalt
Figure 5
Substrate Transfer Path Object
12.3.2 Table 7 defines the attributes of the STPO object.
12.3.3 The attribute EventList identifies all of the errors that may be generated by the STPO. Each such event shall
have both a descriptive name and a numeric identifier, each of which shall be unique within the EventList list.
Table 7 Substrate Transfer Path Object Attribute Definitions
Attribute Name Definition Access Reqd Form
ObjType Defines object type. RO Y Text = “SubstrateTransferPath”.
ObjID Identifier of specific module. RO Y Conforms to requirement of ObjID
(SEMI E39).
EventList List of event name/event number pairs. RO Y List of text/integer pairs.
SubstrateList A list of zero or more ObjID for substrates
within the STPO.
RO Y List of 0+ text.
SubstIDRead Substrate identifier last read by the STPO
substrate ID reader.
RO N Required only if substrate ID reader
supported. May be a null string if
reader out of service.
TransferState Current operational status. RO Y Enumerated:
ASSIGNED
BLOCKED
READY TO LOAD
READY TO UNLOAD
SEMI E127-0705 © SEMI 2003, 2005 21
12.4 Object Services
12.4.1 This section specifies the services provided by the STPO. The client for these services is restricted to the
IMM’s Control Client due to the physical requirements of the transfer.
12.4.2 Services starting with the prefix “Xfr” are based on similar services specified in SEMI E32 for micro moves
that start with the prefix of “HO”. The transfer services specified in this document include an object specifier that
can be used to differentiate between multiple instances of a STPO.
12.4.3 Table 8 provides an alphabetical list of services required from the STPO. Message details are provided in
§18. All services provided by a STPO shall be available to the Control Client and only to the Control Client.
12.4.4 List of Substrate Transfer Path Services
Table 8 List of Substrate Transfer Path Services
Operation Description Type Reqd
Delete The Control Client requests the STPO to delete a
Substrate Object for a substrate that is not physically
present within the STPO or IMM. This service is defined
in SEMI E39.
R Y
TransferPathCalibration A request by the Control Client to provide any
discrepancy in the actual position of an incoming
substrate with the position required by the STPO for
loading. Required only if the STPO is able to detect the
(x,y,z) position of the center of an incoming substrate.
R Y
UpdateSubstrateObject The Control Client informs the STPO about a substrate
that is about to be, or has just been, loaded.
R Y
XfrCmdListRequest The Control Client requests the ordered list of micro
move commands required by the STPO to effect a hand-
off.
R Y
XfrCommand Message sent by the Control Client to the STPO to
request a certain action be performed. The response is
sent when the action has been completed or if the action
can not be performed at this time.
R Y
XfrHalt Message sent by the Control Client to stop all activities
related to substrate transfer. This message ends the
transfer procedure and requires external intervention to
clear.
R Y
XfrVerify Message sent by the Control Client to the IMM when all
necessary actions have been completed to effect a
transfer of a substrate and to ask for confirmation.
R Y
12.4.5 The service UpdateServiceObject must be supported by the Control Client. Receipt of this service request
notifies the Control Client that a specific substate is about to, or just has been, unloaded, and it allows those
substrate properties defined by IMMC to be passed to the Control Client with (possibly) updated values.
12.5 Creation of Substrate Objects
12.5.1 Substrate Object Creation — The UpdateSubstrateObject service, defined by SEMI E90, is sent by the
Control Client to the STPO to accomplish three primary objectives:
Identify the substrate through the ObjID attribute specification in the message,
Define other attributes of the substrate that it considers important, and
Prompt the STPO to create the Substrate Object.
12.5.1.1 An UpdateSubstrateObject request that is always assumed to be in connection with the loading of a
specific substrate.