semi合集-English.pdf - 第4215页

SEMI F74-1103 © SEMI 2002, 2003 2 ISO 14644-4 — Cleanrooms an d associated controlled environm ents -- Part 4: Desi gn, construction and st art- up NOTICE: Unless ot herwise indi cated, all documents cited shall be the l…

100%1 / 7923
SEMI F74-1103 © SEMI 2002, 2003 1
SEMI F74-1103
TEST METHOD FOR THE PERFORMANCE AND EVALUATION OF
METAL SEAL DESIGNS FOR USE IN GAS DELIVERY SYSTEMS
This test method was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on September 16, 2003. Initially available at www.semi.org October 2003; to be published
November 2003. Originally published November 2002.
1 Purpose
1.1 This document is a test method for evaluating
metal seal designs use in gas delivery systems. It
covers both surface-mounted gas systems and
conventional metal face seal fitting systems.
2 Scope
2.1 The test methods apply to the connection seals used
in conventional tubing type gas systems and between
modules and components to the substrates used in
surface-mounted gas systems.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 This test method does not provide detailed
information sufficient for conducting the procedures. It
is the responsibility of the user to procure a copy of the
referenced test procedures from the issuing
organizations.
3.2 The test methods mentioned in this document are
destructive in some cases. Therefore, the sequence of
tests should be carefully planned with the
understanding that several specimens are required to
complete the battery of all applicable tests without
invalidating later tests. This requirement of several
specimens is in addition to the iteration normally
required under good statistical practices.
3.3 All components must meet quality requirements
(dimensional, sealing-surface finish, etc.), as
established and controlled by manufacturers prior to
testing.
3.4 Surface-mounted connection methods and system
design will affect exterior load testing (i.e., vibration,
shock, etc.).
3.5 Seals must be manufactured and packaged for
Class 100-type applications.
3.6 Care should be exercised in handling seals to
maintain manufacturer’s specifications.
4 Referenced Standards
4.1 SEMI Standards
SEMI E49 — Guide for Standard Performance,
Practices, and Sub-Assembly for High Purity Piping
Systems and Final Assembly for Semiconductor
Manufacturing Equipment
SEMI F1 — Specification for Leak Integrity of High-
Purity Gas Piping Systems and Components
4.2 ASME Standards
1
B31.3 — ASME Code for Process Piping
4.3 Military Standard
2
MIL-STD-810E — Environmental Test Methods and
Engineering Guidelines
4.4 Federal Standard
3
Federal Standard 209E — Airborne Particle Cleanliness
Classes in Cleanrooms and Clean Zones
4.5 ISO Standards
4
ISO 14644-1 — Cleanrooms and associated controlled
environments -- Part 1: Classification of air cleanliness
ISO 14644-2 — Cleanrooms and associated controlled
environments -- Part 2: Specifications for testing and
monitoring to prove continued compliance with ISO
14644-1
1 American Society of Mechanical Engineers, Three Park Avenue,
New York, NY 10016-5990, USA. Telephone: 800.843.2763
(U.S./Canada), 95.800.843.2763 (Mexico), 973.882.1167 (outside
North America), Website: www.asme.org
2 Available through the Naval Publications and Forms Center, 5801
Tabor Avenue, Philadelphia, PA 19120-5099, USA. Telephone:
215.697.3321
3 Federal Standard,, c/o U.S. Government Printing Office,
Washington DC 20402
4 International Organization for Standardization, ISO Central
Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,
Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30,
Website: www.iso.ch
SEMI F74-1103 © SEMI 2002, 2003 2
ISO 14644-4 — Cleanrooms and associated controlled
environments -- Part 4: Design, construction and start-
up
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 atm — atmosphere
5.1.2 cc — cubic centimeter
5.1.3 ft-lbs — foot-pounds (force)
5.1.4 kPa — kiloPascal
5.1.5 MFC — Mass Flow Controller
5.1.6 mPa — megaPascal
5.1.7 N — Newton
5.1.8 Nm — Newton meters
5.1.9 Pa — Pascal
5.1.10 psig — pounds per square inch (gauge pressure)
5.2 Definitions
5.2.1 cap block — a seal-specific component fixture
specially made to mate with a respective seal-system
substrate block for testing purposes.
5.2.2 Class 100 — a cleanroom designation defined by
Federal Standard 209E (ISO 14644-1,2,4 equivalent)
which designates that each cubic foot (SI equivalent
cubic meter) of air can have no more that 100 particles
at a size of 0.5µm or larger.
5.2.3 component — an individual piece or a complete
assembly of individual pieces capable of being joined
with other pieces or components.
5.2.4 connector block — a seal-specific substrate block
fixture made to mate with a respective seal-system cap
or flow-through block for testing purposes.
5.2.5 Conventional System — a gas system utilizing
tubing and standard face seal type weld fittings joined
together using orbital TIG welding.
5.2.6 design pressure — of a system or subsystem, the
pressure at the most severe condition of internal and
external pressure for which it is appropriate (as defined
by the designer) to use the system or subsystem.
5.2.7 dummy — a term meant to denote an imitation of
a real or original object. In this case, the original object
would be a modular surface mount valve.
5.2.8 finger-tight — where a particular joining
apparatus (seal-system) is compressed/torqued to the
point where one would need a tool of some sort to
apply further force.
5.2.9 fixture — a device specially designed and
manufactured for a particular seal-system and
performance test. Sample performance testing fixtures
can be seen in Related Information 1.
5.2.10 flow-through — a term used to signify that the
configuration of a given fixture or substrate must allow
for gas to pass through from an inlet interface point to
an outlet interface point. A flow-through device allows
one to make flow calculations and obtain particle
counts.
5.2.11 hydrostatic leak — a leak or leak test performed
by applying isostatic pressure via some sort of liquid
phase media (i.e. hydraulic fluid, water).
5.2.12 inboard leak rate — leakage rate expressed in
Pa.m³ /s (atm cc/sec) from outside to inside occurring
when an internal pressure is less than the external
pressure acting on the component or system. Inboard
leakage is typically determined by introducing a tracer
gas around the exterior of the piping system or
component under test.
5.2.13 leak — a path (or paths) in a sealed system that
will pass tracer gas when a pressure differential or
diffusion path exists. There are two leak mechanisms: a
mechanical passage and a material through which a gas
can diffuse or permeate. A leak may have both
mechanisms operating in parallel.
5.2.14 outboard leak rate — leakage rate expressed in
Pa.m³ /s (atm
⋅
cc/sec) occurring from inside to outside
when an internal pressure is greater than the external
pressure acting on the component or system. Outboard
leakage is typically determined by introducing a tracer
gas into the interior of the piping system or component
under test.
5.2.15 retainer — a holding mechanism to keep a seal
in place.
5.2.16 seal — a device (i.e. gasket, O-ring, etc.) that
joins two elements or systems so as to prevent leakage.
5.2.17 sealing system — a system that consists of two
mating surfaces (e.g. component/ substrate), seal(s),
fasteners (screws), and any necessary hardware (e.g.
seal retainer).
5.2.18 substrate — the block consisting of machined
passage(s) which define the flow path of a gas. Gas
control components are attached to certain areas on the
substrate block with gas seals at the interface.
5.2.19 Surface-mounted Gas Systems — term used to
denote the gas distribution technology where surface-
mounted gas components (e.g. filters, regulators,
SEMI F74-1103 © SEMI 2002, 2003 3
MFC’s, and valves) are mounted onto a flat substrate
which defines the flow path of the gas. The sealing
system will commonly be located at various locations
within the interface plane between component and
substrate.
5.2.20 test pressure — the pressure at which a sealing
system is hydrostatically tested. The test pressure is
commonly defined as 1.5 times the maximum design
pressure.
5.2.21 vibration table — a mechanized table that will
vibrate with a controlled frequency, direction(s), and
amplitude. It is commonly used for vibration testing.
6 Significance and Use
6.1 The following tests shall be performed on seals
which have been assembled into a test fixture similar to
the fixtures described in Related Information 1. These
fixtures are not intended to duplicate an entire gas
system, but are established to evaluate seals only.
6.2 All sealing surfaces and fastening systems shall be
manufactured in strict accordance with seal
manufacturer’s instructions and requirements. In
addition, seals shall be handled and installed per seal
manufacturer’s instructions.
7 Universal Test Methods
The tests listed in this section shall be performed as a
minimum for all sealing systems. This section defines
tests that pertain to both surface-mounted and
conventional gas sealing systems.
NOTE 1: Refer to the Related Information section for
conventional and surface-mount test fixtures.
7.1 Sample configuration shall be defined prior to
testing for each section and noted with test results.
7.2 Helium Leak Tests, Operating and Proof Pressure
7.2.1 Inboard Helium Leak Test
7.2.1.1 Testing shall be conducted per test methods and
procedures outlined in SEMI F1 test methods at room
temperature.
7.2.1.2 Sample quantity: 20
7.2.2 Outboard Helium Leak Test and Proof Test
7.2.2.1 Testing shall be conducted per procedures
outlined in SEMI F1 method 2 and the following
paragraphs.
7.2.2.2 Assemble the sample per manufacturer’s
instructions.
7.2.2.3 Connect the leak detector to the vacuum
chamber and evacuate the chamber.
NOTE 2: The chamber must be equipped with over pressure
protection in the event of failure.
7.2.2.4 Gradually increase pressure of the test
assembly to manufacturer’s maximum rated working
pressure and hold for two minutes. If leakage beyond
acceptance requirements occurs at anytime during
testing, note the pressure and leak rate and discontinue
testing of that sample.
7.2.2.5 Continue increasing pressure to 1.5× the
manufacturer’s maximum rated working pressure and
hold for five minutes. Reduce the pressure back to the
maximum rated working pressure and note the leak rate
at this pressure.
7.2.2.6 Sample quantity: 4
NOTE 3: Outboard leak testing should be completed on only
the referenced 4 samples. All subsequent leak testing required
in conjunction with other testing should be inboard only.
7.3 Hydraulic Burst Test
7.3.1 Assemble the test sample per manufacturer’s
instructions.
7.3.2 Attach the sample to a hydraulic pressure source
using qualified high pressure connections.
7.3.3 Samples shall be tested within an enclosure
suitably designed to protect personnel from failure.
7.3.4 Test medium
shall be water or hydraulic fluid.
7.3.5 Gradually increase pressure to maximum rated
working pressure and hold for one minute.
7.3.6 Gradually increase pressure until failure, or 4x
manufacturer’s rated working pressure is reached.
7.3.7 Sample quantity: 4
7.4 Temperature Cycle Test Method
7.4.1 Perform an initial inboard leak test on the sealing
system in accordance with Section 7.2.1.
7.4.2 Install the plumbing and test sample apparatus
with test sample(s) installed into a temperature
controlled chamber. Attach a thermocouple to the
exterior of the apparatus adjacent to the test sample.
7.4.3 Heat the chamber until the temperature indicated
by the thermocouple is 100 + 10/-0°C. Hold 10
minutes after the temperature stabilizes, then perform
an inboard leak test in accordance with
Section 7.2.1.
7.4.4 Cool the chamber until the temperature indicated
by the thermocouple is –10 + 0/-10°C and perform an
inboard leak in accordance with
Section 7.2.1 while at
temperature.
NOTE 4: If the seal is intended for outdoor service,
refrigerate the test apparatus to –54 + 0/-10°C.