semi合集-English.pdf - 第1241页

SEMI E5-1104 © SEMI 1982, 2004 183 Stream,Function Name (Mnemonic) Direction S14,F4 SetAttr Data (SAD) M,H<->E Description This message is used to acknowledge that the attributes for the specified objects have b ee…

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SEMI E5-1104 © SEMI 1982, 2004 182
Stream,Function Name (Mnemonic) Direction
S14,F3 SetAttr Request (SAR) S,H<->E, reply
Description
This message is used to request that a given set of attributes be assigned specified values for all objects of the specified type and
exactly matching the specified attribute requirements. Certain attributes may not be changed through the interface. For a
description of filters, see S14,F1.
Structure
L,4
1. <OBJSPEC>
2. <OBJTYPE>
3. L,i i = number of object instances requested
1. <OBJID
1
>
.
.
i. <OBJID
i
>
4. L,n n = # attribute settings
1. L,2
1. <ATTRID
1
>
2. <ATTRDATA
1
>
.
.
n. L,2
1. <ATTRID
n
>
2. <ATTRDATA
n
>
Exception
If OBJSPEC is a zero-length item, no object specifier is provided.
SEMI E5-1104 © SEMI 1982, 2004 183
Stream,Function Name (Mnemonic) Direction
S14,F4 SetAttr Data (SAD) M,H<->E
Description
This message is used to acknowledge that the attributes for the specified objects have been set as requested or to indicate an error
for each attribute value that was not set as requested. The order of attributes is retained from the primary message.
Structure
L,2
1. L,i i = number of objects requested
1. L,2
1. <OBJID
1
>
2. L,n n = number of attributes set.
1. L,2
1. <ATTRID
1
>
2. <ATTRDATA
1
>
.
.
n. L,2
1. <ATTRID
n
>
2. <ATTRDATA
n
>
.
.
i. L,2
1. <OBJID
i
>
2. L,n
1. L,2
1. <ATTRID
1
>
2. <ATTRDATA
1
>
.
.
n. L,2
1. <ATTRID
n
>
2. <ATTRDATA
n
>
2. L,2
1. <OBJACK>
2. L,p p = number of errors reported
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
If n = 0 for any object, the object was not found. If p = 0, no errors were detected.
SEMI E5-1104 © SEMI 1982, 2004 184
Stream,Function Name (Mnemonic) Direction
S14,F5 GetType Request (GTR) S,H<->E,reply
Description
This message is used to request the types of objects owned by an object. This is an operation performed on an object type rather
than on object instances. Wild characters “?” and “*” may be used as a filter for object types. Equipment is not required to
support wild characters.
Structure
<OBJSPEC>
Exception
If OBJSPEC is a zero-length item, no object specifier is provided.
Stream,Function Name (Mnemonic) Direction
S14,F6 GetType Data (GTD)
Description
Structure
L,2
1. L,n n = number of object types
1. <OBJTYP
1
>
.
.
n. <OBJTYP
n
>
2. L,2
1. <OBJACK>
2. L,p p = number of errors reported
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
.
.
p. L,2
1. <ERRCODE
p
>
2. <ERRTEXT
p
>
Exception
If n = 0, there are no owned object types. If p = 0, no errors were detected.
Stream,Function Name (Mnemonic) Direction
S14,F7 GetAttrName Request (GANR) S,H<->E,reply
Description
This message is used to request the names of the attributes of specified types of owned objects. This is an operation performed
on an object type rather than on object instances. Wild characters “?” and “*” may be used as a filter for object types.
Equipment is not required to support wild characters.
Structure
L,2
1. <OBJSPEC>
2. L,n n = # of object types
1. <OBJTYP
1
>
.
.
n. <OBJTYP
n
>
Exception
If OBJSPEC is a zero-length item, no object specifier is provided.