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SEMI E49.4-0298 © SEMI 1995, 1998 3 Table 1 Summary of Recommended Specific ations Description Value Units Internal Surface Che mistry (AUGER) Surface chromiu m oxide enh anced layer thickness at 1/2 peak height of measu…

SEMI E49.4-0298 © SEMI 1995, 1998 2

6.5 Incoming process liquids require filters and should

be located downstream of any regulator and as close as

possible to point of dispense.

6.6 Design should include a means of flow through

flushing and draining for removable components or

assemblies.

6.7 Pumping systems should include surge/pulse

suppression devices and provisions for vibration

isolation.

6.8 Supply and drain lines on a recirculation system

should be separated by an isolation valve. The system

should not use one line to perform both functions.

6.9 All filters should be able to be isolated from

process stream for maintenance.

6.10 Backflow/back pressure protection should be

included in the system.

6.11 For processes requiring pressu re control,

regulators should be included in the system.

6.12 The system should have a means of manifolding

supply and drain lines onboard, so that there is a single

point connection for each individual liquid.

7 Materials Guidelines

7.1 Material Mechanical Characte ristics - Stainless

Steel

7.1.1 All tubing greater than or equal to 1.27 cm (1/2

in.) diameter should conform to ASTM A 269.

7.1.2 Tubing less than 1.27 cm (1/2 in.) diameter

should conform to ASTM A 632.

7.1.3 All bar stock should conform t o ASTM A 479 or

ASME SA479.

7.1.4 All steel should conform to ASM UNS S31603

for chemical composition with the following

exceptions:

• Sulfur as reported by the SMTR ≤ 0.030%

• Carbon as reported by the SMTR ≤ 0.030%

7.2 Stainless steel should be 316L electropolished for

solvent system wetted flow streams or as specified by

the customer.

7.3 Materials for valve seats, diaphragms, gaskets, and

O-rings should be chemically compatible to the process

liquid.

7.4 Material Performance Guidelines

7.4.1 The performance guidelines below are SS

qualification values to be demonstrated by the original

component manufacturer. Semiconductor equipment

suppliers should provide proof that their components

conform to these requirements.

7.4.2 The performance tests should be considered

production qualification tests. It is the responsibility of

the component manufacturer to provide statistically

significant data which correlates their production tests

to these qualification tests (e.g., Statistical Process

Control, MIL-STD-105D).

7.4.3 The equipment supplier should be responsible

for maintaining and supplying, upon request,

documentation that proves their components meet the

user’s materials performance requirements.

SEMI E49.4-0298 © SEMI 1995, 19983

Table 1 Summary of Recommended Specifications

Description Value Units

Internal Surface Chemistry (AUGER)

Surface chromium oxide enhanced layer thickness at

1/2 peak height of measured oxygen signal level

For an example of a test method, see SEMASPEC 90120573B (ESCA)

≥ 15 Å

Internal Surface Chemistry (ESCA)

Total chromium to iron ratio including both reduced

and oxidized stated

For an example of a test method, see SEMASPEC 90120403B (ESCA)

≥ 1.25:1 value

Internal Surface Chemistry (EDX)

Surface foreign elements, those elements not in the

Smelter’s Test Report (SMTR)

Test procedures per ASTM F 1375 (EDX)

0value

Internal Surface Defects

Photos per test method

Counts per photo

Test procedures per ASTM F 1375 (SEM)

≤ 50

value

Internal Surface Roughness

Average surface roughness

Roughness average (R

)

Maximum surface R

(individual reading)

For example of a test method, see SEMASPEC 90120400B (Contact Profilometry)

≤ 0.25

(≤ 10)

≤ 0.38

(≤ 15)

µm

(µin.)

µm

(µin.)

Particulate Contribution

at ≥ 0.1 µm size

at ≥ 0.02 µm size

Test procedures per ASTM F 1394 (Particles)

≤ 0.71 (20)

≤ 2.6 (75)

ptc/L (ptc/ft

)

ptc/L (ptc/ft

)

Internal Absorbed Moisture

Time to recover to base line from a 2 ppm spike

for low surface area component (valve, regulator)

Time to recover to baseline from a 2 ppm spike

for high surface area component (filters, tubing)

Test procedures per ASTM F 1397

≤ 4

≤ 6

hour

Total Anionic Contamination

Total anionic contamination added to test water

Individual anionic contaminant

Test procedures per ASTM D 4327 (Total Anions)

≤ 1

≤ 0.2

ppm

Leak Rate

Inboard leak rates for He

Outboard leak rate for He

Cross-seat leak rates for He

Test procedures per SEMI F1 (Leak Rate)

≤ 1 × 10

-9

≤ 1 × 10

-5

≤ 1 × 10

-8

scc/s

Cycle Life

Manual values pressure automatic valves

High Pressure automatic valves

Low Pressure automatic valves

Test procedures per ASTM F 1375 (Cycle Life)

≥ 25 K

≥ 500 K

cycles

SEMI E49.4-0298 © SEMI 1995, 1998 4

8 Component Guidelines

8.1 For component leak rate and c ycle life

requirements, see Section 7, Materials Guidelines.

8.2 Valves should be ball (dry asse mbly, lubricant-

free) or bellows type. Metal diaphragm valves are

optional.

8.3 Regulators should be packless in design with all

metal bonnet seals.

8.4 Regulators and valve flow coefficient (C

) should

be selected based on liquid flow requirements and

liquid characteristics.

8.5 Mechanical fittings should be compression type or

metal face seal type with solid nickel gaskets.

8.6 Pressure gauges should be liquid-filled type with

compression or metal face seal fittings. Gauge isolators

are recommended.

8.7 Filters should be PTFE media rated at 0.1 µm pore

size.

8.8 Check valves should be disk poppet type.

9 Subsystem Assembly Gui delines

See SEMI E49.6 for recommended SS system assembly

procedures.

10 Related Documents

10.1 SEMATECH Documents

SEMASPEC 90120400B — Test Method for

Determination of Surface Roughness by Contact

Profilometry for Gas Distribution System Components

SEMASPEC 90120403B — Test Method for XPS

Analysis of Surface Composition and Chemistry of

Electropolished Stainless Steel Tubing for Gas

Distribution System Components

SEMASPEC 90120573B — Test Method for AES

Analysis of Surface and Oxide Composition of

Electropolished Stainless Steel Tubing for Gas

Distribution System Components

4 SEMATECH, Technology Transfer Department, 2706 Montopolis

Drive, Austin, TX 78741

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