semi合集-English.pdf - 第4577页

SEMI D32-0303 © SEMI 2003 5 D L M Mark Reference Point F Q 2 Q 2 Q 2 Q 2 D L M Mark Reference Point F Q 2 Q 2 Q 2 Q 2 D L M Mark Reference Point F Q 2 Q 2 Q 2 Q 2 D L M Mark Reference Point F Q 2 Q 2 Q 2 Q 2 Figure 3 Mar…

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SEMI D32-0303 © SEMI 2003 4
A
24301
7
9
56 8
B
A
Data Matrix Field
Short Edge
Long (Nearest) Edge
Quality Area
E
E
Orientation
Corner
Mark Reference Point
BCDE
FGH I J
T-S-
-S-
A
24301
7
9
56 8
B
A
Data Matrix Field
Short Edge
Long (Nearest) Edge
Quality Area
E
E
Orientation
Corner
Mark Reference Point
A
24301
7
9
56 8
B
A
Data Matrix Field
Short Edge
Long (Nearest) Edge
Quality Area
E
E
Orientation
Corner
Mark Reference Point
BCDE
FGH I J
T-S-
-S-
Figure 1
Data Matrix Field Location
H
K
A/N Character Window
I
Mark Reference Point
Data Matrix Field
G
J
R
2
C
2
Q
1
F
D
Q
1
H
K
A/N Character Window
I
Mark Reference Point
Data Matrix Field
G
J
R
2
C
2
Q
1
F
D
Q
1
Figure 2
Mark Field Dimensions
SEMI D32-0303 © SEMI 2003 5
D
L
M
Mark Reference
Point
F
Q
2
Q
2
Q
2
Q
2
D
L
M
Mark Reference
Point
F
Q
2
Q
2
Q
2
Q
2
D
L
M
Mark Reference
Point
F
Q
2
Q
2
Q
2
Q
2
D
L
M
Mark Reference
Point
F
Q
2
Q
2
Q
2
Q
2
Figure 3
Mark Area Dimensions
Figure 4
Data Matrix Field
SEMI D32-0303 © SEMI 2003 6
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