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SEMI E117-1104 © SEMI 2002, 2004 2 6 Requirements 6.1 Figures and Tables — The dim ensional requirements for a reticle load port (and for the placement of an RSP on that load port ) are given in Table 1 with reference to…

SEMI E117-1104 © SEMI 2002, 2004 1

SEMI E117-1104

SPECIFICATION FOR RETICLE LOAD PORT

This specification was technically approved by the Global Physical Interfaces and Carriers Committee and is

the direct responsibility of the North American Physical Interfaces and Carriers Committee. Current edition

approved by the North American Regional Standards Committee on August 16, 2004. Initially available at

www.semi.org September 2004; to be published November 2004. Originally published November 2002;

previously published March 2003.

1 Purpose

1.1 This specification defines dimensional

requirements and options of reticle load ports on reticle

stockers, lithography exposure equipment, and reticle

inspection equipment. It is intended to promote a

uniform physical interface between equipment and the

factory, to facilitate the use of automated RSP transport

systems, and/or to meet ergonomic requirements for

manually loaded equipment.

2 Scope

2.1 This standard covers only load ports for reticle

SMIF pods (RSPs) as specified in SEMI E100, E111,

and E112. Similar requirements and options covering

load ports for wafers are covered in SEMI E15 (for 200

mm wafers and smaller) and in SEMI E15.1 (for 300

mm wafers).

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety health practices and determine the

applicability or regulatory limitations prior to use.

3 Referenced Standards

3.1 SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI E15.1 — Specification for 300 mm Tool Load

Port

SEMI E19.3 — Port Standard for Mechanical Interface

of Wafer Cassette Transfer, 150 mm (6 inch) Port

SEMI E19.4 — 200 mm Standard Mechanical Interface

(SMIF)

SEMI E72 — Specification and Guide for 300 mm

Equipment Footprint, Height, and Weight

SEMI E100 — Specification for a Reticle SMIF Pod

(RSP) Used to Transport and Store 6 inch or 230 mm

Reticles

SEMI E111 — Provisional Mechanical Specification

for a 150mm Reticle SMIF Pod (RSP150) Used to

Transport and Store a 6 Inch Reticle

SEMI E112 — Provisional Mechanical Specification

for a Multiple 150 mm Reticle SMIF Pod (MRSP150)

Used to Transport and Store 6 Inch Reticles

NOTICE: As listed or revised, all documents cited

shall be the latest publications of adopted standards.

4 Terminology

4.1 Definitions

4.1.1 150 mm Multiple Reticle SMIF Pod (MRSP150)

— a minienvironment compatible carrier (as defined in

SEMI E112) that is capable of holding six 6 inch

reticles in a horizontal orientation during transport and

storage and is compatible with a Standard Mechanical

Interface (SMIF) per SEMI E19.3.

4.1.2 150 mm Reticle SMIF Pod (RSP150) — a

minienvironment compatible carrier (as defined in

SEMI E111) that is capable of holding one 6 inch

reticle in a horizontal orientation during transport and

storage and is compatible with a Standard Mechanical

Interface (SMIF) per SEMI E19.3.

4.1.3 200 mm Reticle SMIF Pod (RSP200) — a

minienvironment compatible carrier (as defined in

SEMI E100) that is capable of holding one 6 inch

reticle or one 230 mm reticle in a horizontal orientation

during transport and storage and is compatible with a

Standard Mechanical Interface (SMIF) per SEMI

E19.4.

4.1.4 Reticle SMIF Pod (RSP) — a minienvironment

compatible carrier that is capable of holding either one

or six reticles in a horizontal orientation during

transport and storage and is compatible with a Standard

Mechanical Interface (SMIF) per SEMI E19.3 or SEMI

E19.4.

NOTE 1: All other terminology from SEMI E100, E111,

E112, and E15 also apply (except that in SEMI E15, the

substrate must be assumed to be a reticle and not a wafer).

5 Ordering Information

5.1 The user must specify which RSPs will be used:

RSP200, RSP150, MRSP150, or both RSP150 and

MRSP150.

SEMI E117-1104 © SEMI 2002, 2004 2

6 Requirements

6.1 Figures and Tables — The dimensional

requirements for a reticle load port (and for the

placement of an RSP on that load port) are given in

Table 1 with reference to the figures in this document.

Although the carrier transport systems shown in these

figures represent an overhead transport system using an

OHT delivery vehicle, they are intended to represent all

types of transport systems (AGV, PGV, conveyor,

overhead track, etc.).

6.2 Orientation — The reticles are to be oriented

horizontally (chrome down) with zero nominal tilt

when the RSP is placed on the load port. The tolerance

in the horizontal plane is determined by the registration

and alignment feature between the RSP and the load

port, as specified in SEMI E19.3 or SEMI E19.4. The

RSP shall be loaded and unloaded with its front (where

reticles are inserted and extracted after the SMIF pod is

opened) parallel to and away from the load face plane

(see Figure 2).

6.3 Side Clearances — Clearances C1 and C2 are

defined with respect to the maximum dimensions of the

footprint of the RSP (as specified in SEMI E19.3 or

SEMI E19.4), not to the rectangular carrier envelope

(defined in SEMI E15). Note that C1 is lateral clearance

to the left and right of the RSP, but C2 is a radial

clearance from the nearest point of the RSP.

6.4 Overhead Clearances — All load ports intended

for automated overhead access must be open from

above to facilitate automatic RSP delivery. The open

volume required for automated overhead delivery is

defined by a projection of the load port area, including

the area required for C1 and C2 clearances, projected

upward to the top of the equipment. To allow space for

overhead delivery above H2, D1 also defines the open

volume. Note that this condition need only be met when

the equipment is being loaded or unloaded. For

example, the load port may be formed by a surface that

extends outward during loading to provide overhead

access.

6.5 Easement for Overhead Transport — As shown in

Figure 1 and Figure 2, to add clearance for overhead

RSP transport, no part of the equipment may be higher

than H2 above the floor along an easement between the

load ports of adjacent equipment down the bay. On a

reticle stocker, on inspection equipment, and on

lithography exposure equipment that has the load ports

on the far end from the litho track, this easement is

between the load face plane and a plane parallel to it

that is D1 beyond the facial reference plane. On

lithography exposure equipment that has the load ports

on a side adjacent to the litho track, this easement is

between two planes parallel to the bilateral reference

plane at the furthest reach of clearance C1 to the left

and right of the set of load ports. Such tools must also

have an additional easement above H6 between the load

face plane and a plane parallel to it that is D1 beyond

the facial reference plane. It is recommended that

transport equipment using these easements have extra

clearance to avoid contacting any equipment

boundaries.

6.6 Loading Obstructions — As shown in Figure 3, the

maximum allowable height of an obstruction on the

load port over which the RSP must be lifted (before

being set down on the SMIF interface) is H1.

Examples of such obstructions include alignment

devices and identification tag readers (as well as the

SMIF port itself). In the volume between the horizontal

reference plane and H1 above it, clearances C1 and C2

no longer apply.

6.7 Load Port Lead In — The load port must provide a

lead-in capability (in addition to that required on the

SMIF port) that corrects an RSP misalignment distance

of R in any horizontal direction.

6.8 Adjacent Load Ports — All reticle load ports for

automated access must be on the same side of the

equipment. All equipment must have at least one load

port with access for automated overhead delivery. At

least two of these load ports are recommended to

support equipment throughput. Auxiliary load ports

intended for manual delivery may be located on a

different side of the equipment. On each piece of

equipment, reticle load ports are numbered in

increasing order (beginning with 1) from left to right

(as seen by a person facing the load face plane)

beginning with reticle load ports in the lowest level and

then continuing (from left to right) with any reticle load

ports at higher levels. Dimension S specifies the

spacing between adjacent reticle load ports.

6.9 As shown in Figure 4, reticle load ports must

conform to one of the following configuration options.

If no option is specified, Option 1 is assumed.

6.9.1 In Option 1, the load port must nominally be at

H, and it must be open from above to facilitate

automatic carrier delivery from an overhead transport

system. The open volume required for vertical delivery

is defined by a projection of the tool load port area,

including the area required for C1 and C2 clearances,

projected upward to the top of the tool. Note that this

condition need only be met when the tool is being

loaded. For example, the load port may be formed by a

surface that extends outward during loading to provide

overhead access.

6.9.2 In Option 2 (which allows faster automatic

carrier delivery from an overhead transport system), the

top of the carrier must be H2 (2900 for exposure

equipment), and it must be open from above to facilitate

automatic carrier delivery from an overhead transport

system.

6.9.3 In Option 3 (with no allowance for automatic

carrier deliver from an overhead transport system), the

top of the carrier must be H2 (2900 for exposure

equipment), clearance above the reticle must be C3.

6.9.4 Additional load ports used for manual

loading/unloading can be located below the primary

load port in each of the three options.

6.9.5 Equipment suppliers and users should note that

SEMI S8 requirements might restrict such

implementations of manual load ports.

Table 1 Dimensional Requirements for Reticle Load Ports

Dimension Application Value, mm (in.) Notes

C1 minimum 75 (3.0) Clearance to left and right of RSP.

C2 minimum 50 (2.0) Radial clearance around RSP.

C3 minimum 150 (5.91)

D maximum 250 (9.8) Load face plane to facial reference plane.

D1 minimum 196 (7.72) Facial reference plane to OHT easement.

H range

minimum 890 (35.0)

maximum 2690 (106)

Port height: lithography exposure equipment.

925 ± 35 (36.4 ± 1.4) Reticle stockers and inspection equipment.

H1 maximum 60 (2.36) Loading obstruction height at load port.

2900 (114.2) OHT easement height: exposure equipment.

H2 maximum

2600 (102.4)

Reticle stockers and inspection equipment

(recommended for exposure equipment).

H6 maximum 3200 (126) Side OHT easement height (see Figure 2b).

minimum

10 (0.4) required

15 (0.6) recommended for ergonomic reasons

Load port lead-in capability (correction of RSP

misalignment in any horizontal direction).

S minimum 290 (11.4) [358 (14.1)] Spacing of adjacent load ports.

In Table 1 and in the figures of this document, numbers in [square brackets] are specific to the RSP200 (if different from the RSP150 and

MRSP150).