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SEMI E76-0299 SEMI 1998, 1999 10 e) large footprint and/or m ultiple module f or equipm ent, f) large num ber of connections required for the equipm ent (more than 10), and g) peripheral com ponents for the equip…
SEMI E76-0299
SEMI 1998, 1999
9
RELATED INFORMATION 1
Pre-facilitation Pedestal
Application Notes
NOTE: This related information was balloted, but is not
an official part of SEMI E76 and is not intended to
modify or supersede the official standard. It has been
derived from the work of the originating task force.
Determination of the suitability of the material is solely
the responsibility of the user.
NOTE: This is only a representative example, a pre-
facilitation pedestal can be of an open frame or enclosed
box design. Due to bay design and pass thru hole
locations a pedestal leg may sometimes become located
over an opening thus, a design that allows flexible leg
or foot locations should be incorporated.
Figure R1-1
Pre-facilitation Pedestal Example
R1-1. Pre-facilitation Pedestal
R1-1.1 A pedestal provides a permanent base or frame
to support the equipment and could be considered an
extension of the equipment mainframe In addition, the
pedestal could emulate a docking station concept
whereby all utilities points of connection could be
located and installed prior to equipment delivery. Once
the equipment is set on this pre-facilitation pedestal,
hookup is relatively quick and easy. When a pre-
facilitation pedestal is used, both the device
manufacturer and supplier should agree who is
responsible for coordinating space utilization within the
pedestal.
R1-1.2 When pre-facilitation pedestals are used, the
physical location of the EPOC’s and corresponding
UPOC’s can be determined by utilizing templates, jigs,
and/or EPOC interface panels in conjunction with the
pedestal. The facility utility lines can be prefabricated
and installed to the UPOC’s prior to setting the
equipment on the pre-facilitation pedestal. See Figure
R1-1 for a representative example of a Pre-facilitation
Pedestal.
R1-1.3 The pre-facilitation pedestal should be provided
by the equipment supplier and standardized for a
equipment type. In addition, the equipment supplier is
responsible for providing the engineering and design of
the pre-facilitation pedestal (with input from the device
manufacturer as required). Installation of hardware
within the pedestal should be done during
manufacturing or during pre-facilitation. The following
pedestal features (as required by the equipment supplier
and end user) are the responsibility of the pre-
facilitation pedestal supplier.
a) Vibration isolation, leveling, seismic
reinforcing, and load distribution point
loading.
b) Connection points from the pedestal to the
facility which can be from any plane but
should take into consideration potential
interference with adjacent tools.
c) Routing of the plumbing and harnesses within
the pedestal.
d) Containment of gases and liquids within the
pedestal, including possible HPM.
e) Support equipment interconnects within the
pedestal
R1-1.4 To use the pre-facilitation pedestal, the distance
from the highest point on the waffle slab to the bottom
of equipment (typically the top of the raised floor)
should be equal to or greater than 0.6 meters (2 feet).
R1-1.5 The pre-facilitation pedestal is recommended
for use when these conditions apply.
a) connections located on the bottom of the
equipment,
b) maintenance access to the bottom of the
equipment as required,
c) repair and spilled liquids access is required
underneath the equipment,
d) pedestal is required as an appropriate structural
base to set the equipment on,
SEMI E76-0299
SEMI 1998, 1999
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e) large footprint and/or multiple module for
equipment,
f) large number of connections required for the
equipment (more than 10), and
g) peripheral components for the equipment
(pumps, RF generators, chiggers, etc.) are
typically located beneath the equipment in a
subfab area.
R1-1.6 The pre-facilitation pedestal is not
recommended for use when these conditions apply.
a) small table mounted equipment,
b) no more than one connection on the bottom of
the equipment,
c) other connections located on back, top, or side,
d) no maintenance, repair, or spill clean up access
requirements beneath equipment,
e) few connections required (less than 10), and
f) few if any peripheral components required or
located below equipment in subfab area.
R1-1.7 These conditions are only recommendations and
dialog between the supplier and device manufacturer is
recommended to determine if a pre-facilitation pedestal
is necessary or beneficial for a specific application.
R1-1.8 The Figure R1-2 shows the facility utility lines
running up through the waffle slab directly underneath
the equipment. The UPOC - EPOC connections occurs
at the EPOC interface panel which is located on the top
plane of the pre-facilitation pedestal. This concept is
preferred by device manufacturers as the number of
connections are minimized, no additional space is
required on the sides or in back of the equipment for
routing, and the HPM lines can be pre-facilitation to the
UPOC without additional connections or special double
containment requirements.
Figure R1-2
Pre-facilitation Pedestal with Top Mounted Interface Panel
SEMI E76-0299
SEMI 1998, 1999
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Figure R1-3
Pre-facilitation Pedestal with Multiple Top Mounted Interface Panels
R1-1.9 The Figure R1-3 also shows the facility line
running through the waffle slab directly underneath the
equipment. In addition, this example depicts situations
where there is a physical requirement to manifold
connections underneath the equipment. The same
advantages as Example #1 apply with the exception of
minimizing the number of connections to the
equipment.
R1-1.10 The Figure R1-4 shows the facility utility lines
running up through the waffle slab to the side/back of
the pre-facilitation pedestal and connecting to the EPOC
interface panel mounted on the side/back of the pre-
facilitation pedestal. In this example a short section of
line is required to complete the connection from the
EPOC interface panel to the connection within the
equipment itself. This short section of line should be
prefabricated such that final hookup to the equipment
can be accomplished quickly once the equipment is set.
It is important to note that this option requires careful
consideration on how to accommodate HPM lines. It is
generally undesirable to have additional connections in
HPM lines or to design the pre-facilitation pedestal
itself to provide secondary containment. In this
example, the equipment supplier is responsible for the
volume in the pre-facilitation pedestal to route and
manifold the plumbing as required