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SEMI G52-90 © SEMI 1990, 2004 4 Retentio n Tim e (Min.) 0 5 10 Cation 10 0 5 R e te ntio n T i m e ( M in. ) A nion + 2 – Figure 1 Schematic of Ion Chromatograph NOTICE: SEMI makes no warranties or representations as to …

SEMI G52-90 © SEMI 1990, 2004 3

10.2.2 Place the bags in the water bath at T > 95°C for

30 ± 2 minutes.

10.2.3 Remove the bags from the bath and allow to

reach room temperature.

10.2.4 The lead frames, which are inside the sealed

bags, are moved to one side of the bags without

opening the bags. Then the solution is separated from

leadframes by sealing the mean portion of the bags

without opening.

11 Procedure — Container Extraction Method

NOTE 9: The size of the containers to be used depends on

the expected volume of water and the leadframes. The

container must be at least three-quarters filled with the water

and leadframes.

11.1 Preparation of Extraction Vessels

11.1.1 Fill the containers with DI water and attach the

caps. In order to reduce the amount of air in the vessel,

fill vessels to the amount of three-quarter.

NOTE 10: Two containers are required for each test and must

come from the same manufacturing batch.

11.1.2 Place the containers in the water bath at T >

95°C for 2 hours ± 5 minutes.

11.1.3 Remove the containers from the bath and rinse

out five (5) times with DI water.

11.2 Process

11.2.1 Place the samples in one of the containers

cleaned per Section 11.1.1.

NOTE 11: Leadframes may be cut or rolled in order to ease

loading to the container. Die pads may be tested separately, if

desired, by cutting from the leadframes.

11.2.1.1 Add the required volume of DI water and cap

the container. Place a similar amount of water into the

other cleaned container and attach the cap.

NOTE 12: Do not select the frames or remove them from

their shipping container until ready to test for the surface

contamination. Recommended volumes of water are 10–30 ml

for testing die pads only and 100 ml for the entire leadframe

— samples must be covered by water.

11.2.2 Place the containers in the water bath at T >

95°C for 30 ± 2 minutes.

11.2.3 Remove the containers from the bath and allow

to reach room temperature.

11.2.4 Remove the leadframes from the container and

cap it again.

12 Measurements

12.1 Prepare the chromatograph for operation by

regenerating the columns according to the

manufacturer’s recommendations.

12.2 Run the eluent through the chromatograph until a

stable baseline calibration is established.

12.3 Inject the recommended sample size of test

solution into the chromatograph and record the ion

chromatogram.

12.4 Repeat for all the samples and also run the

background sample.

NOTE 13: The time from extraction to insertion of sample is

to be within eight hours.

12.5 Sample concentrations are determined from the

calibration curves for each ion type.

12.6 The surface concentration of ionic contaminants

for each ion type (SCIC) is given by the following

equation:

SCIC (ng/cm

) =

(Sample conc. – Background conc.)



Extraction Volume (mL)

Leadframe Surface Area (cm

)



No. of Leadframes

NOTE 14: Allowable concentration levels are to be agreed

between the user and supplier.

Table 1 Sensitivity of Ion Chromatograph

Ion Sensitivity (ng/ml)

0.2

0.5

Cation

1.0



0.3

3

2.0

1.0

Anion

1.0

Table 2 Concentration of Standard Solution for

Calibration

Mixed Standard

Solution (ug/ml)

Standard Solution for

Calibration(ng/ml)

Ion I II III

Cation Na

10 5 10 20

Anion Cl



4 10 20 40

3

10 25 50 100



4 10 20 40



4 10 20 40

2

4 10 20 40

SEMI G52-90 © SEMI 1990, 2004 4

Retention Time (Min.)

Cation

Retention Time (Min.)

nion

–

Figure 1

Schematic of Ion Chromatograph

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI G53-92

SPECIFICATION FOR METAL LID/PREFORM ASSEMBLY

1 Preface

1.1 Scope — This specification provides guidelines for

the design and acceptance of metal lid/preform

assemblies (see Figure 1). This specification may be

used by suppliers at outgoing inspection and by the

customers at incoming inspection.

The design and acceptance criteria may be used for

metal lid/preform assemblies used on all types of

semiconductor packages.

1.2 Significance — Improper lid/preform design and

poorly specified lid/preforms contributes to low sealing

yields and unreliable devices.

1.3 Units — U.S. Customary (inch -pound) or SI

(metric) units may be used at the customer’s discretion.

This specification uses U.S. Customary units as the

prime unit.

2 Applicable Documents

2.1 Order of Precedence — To avoid conflicts, the

order of precedence when ordering metal lid-preform

assemblies shall be as follows:

Purchase Order

Customer’s Lid-Preform Drawing

This Specification

Reference Documents