semi合集-English.pdf - 第1378页

SEMI E30-1103 © SEMI 1992, 2003 52 4.6.6.3 Recipe Upload Host-Initiated Recipe Upload: COMMENTS HOST EQUIPMENT COMMENTS Recipe Upload Request S15,F31--> < --S15,F32 Recipe Upload Data Large Recipe Upload Request S1…

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SEMI E30-1103 © SEMI 1992, 2003
51
Recipe Edited or Deleted by Operator:
COMMENTS HOST EQUIPMENT COMMENTS
New recipe edited, or deleted
at equipment
RcpChangeName = RCPID
RcpChangeStatus = 2
(Modified) or 5 (Deleted)
[IF] CEID for Execution
Execution Recipe Change Event
enabled
[THEN]
<--S6,F11 Send Event Report
Event Report Acknowledge S6,F12-->
[END_IF]
Recipe Deletion by the Host:
COMMENTS HOST EQUIPMENT COMMENTS
Recipe Delete Request S15,F35-->
<--S15,F36 Recipe Delete Acknowledge. The
recipe is removed from non-
volatile storage.
4.6.6.2 Recipe Directory Request
Host requests a list of identifiers of currently stored recipes.
COMMENTS HOST EQUIPMENT COMMENTS
GetAttr Request S14,F1-->
<--S14,F2 GetAttr Data
SEMI E30-1103 © SEMI 1992, 2003
52
4.6.6.3 Recipe Upload
Host-Initiated Recipe Upload:
COMMENTS HOST EQUIPMENT COMMENTS
Recipe Upload Request S15,F31-->
<--S15,F32 Recipe Upload Data
Large Recipe Upload Request S15,F51-->
<--S15,F52 Large Recipe Upload Acknowledge
Acknowledge may be “accepted
and will be performed later
with completion signaled”.
When the equipment is ready to
send:
<--S13,F1 Send Data Set Send
Send Data Set Send S13,F2-->
Acknowledge
Open Data Set request S13,F3-->
<--S13,F4 Open Data Set Data
[START] repeat until
ACKC13 is error:
Read Data Set Request S13,F5-->
[END] <--S13,F6 Read Data Set Data
[IF]
CEID for upload event enabled
[THEN]
[IF]
ACKC13 is "ERROR: END OF DATA"
[Then]
<--S6,F11 Send Event Report “successful
Event Report Acknowledge S6,F12--> upload”
[ELSE]
<--S6,F11 Send Event Report “bad upload”
Event Report Acknowledge S6,F12--> [END_IF]
[END_IF]
Close Data Set Send S13,F7-->
<--S13,F8 Close Data Set Acknowledge
SEMI E30-1103 © SEMI 1992, 2003
53
Equipment-Initiated Recipe Upload:
COMMENTS HOST EQUIPMENT COMMENTS
RCPCMD = Upload
[IF] multi-block request
<--S15,F1 [THEN] Recipe Management Multi-
block inquire
Recipe Management Multi- S15,F2-->
block Grant
[END_IF]
<--S15,F21 Recipe Action Request
Recipe Action Acknowledge S15,F22-->
Host requests upload S15,F31-->
<--S15,F32 Recipe Upload Data
RCPCMD = Upload
[IF] multi-block request
<--S15,F1 [THEN]
Recipe Management
Recipe Management S15,F2--> Multi-block Inquire
Multi-block Grant [END_IF]
<--S15,F21 Recipe Action Request
Recipe Action Acknowledge S15,F22-->
S15,F51-->
Large Recipe Upload
Request
<--S15,F52 Large Recipe Upload
Acknowledge
<--S13,F1 Send Data Set Send
Send Data Set Send S13,F2-->
Acknowledge
Open Data Set Request S13,F3-->
<--S13,F4 Open Data Set Data
[START] repeat until
ACKC13 is error:
Read Data Set Request S13,F5-->
[END] <--S13,F6 Read Data Set Data
[IF]
CEID for upload event enabled
[THEN]
[IF]
ACKC13 is "ERROR: END OF DATA"
[Then]
<--S6,F11 Send Event Report “successful
upload”
Event Report Acknowledge S6,F12--> [ELSE]
<--S6,F11 Send Event Report “bad upload”
Event Report Acknowledge S6,F12--> [END_IF]
[END_IF]
Close Data Set Send S13,F7-->
<--S13,F8 Close Data Set Acknowledge