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SEMI F10-0698 © SEMI 199 3, 1998 2 6.5 pr essure containing envel ope — T h e internal area of a specim e n which contains the f l uid m edia. 6.6 s tandard deviation — A meas u r e o f the variation among th e members o…

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SEMI F10-0698 © SEMI 1993, 19981
SEMI F10-0698
TEST METHOD TO DETERMINE THE INTERNAL PRESSURE
REQUIRED TO PRODUCE A FAILURE OF A TUBE FITTING
CONNECTION MADE OF FLUOROCARBON MATERIALS
1 Purpose
1.1 This method provides a uniform procedure to
determine the internal pressure required to produce
failure of fitting connections made of fluorocarbon
materials.
2 Scope
2.1 This method can be used to characterize tube
fitting connections on the basis of test data developed
under the conditions described herein, but the results
are not intended to imply a performance rating.
2.2 Tube defined in this method has a circular cross
section and is made of fluorocarbon materials.
2.3 Tube fittings defined in this method are made of
fluorocarbon materials for all parts in contact with the
internal fluid.
2.3.1 Parts such as a nut or gripper are not limited to
being made of a fluorocarbon material.
2.4 Only the seal between the tube and tube fitting
being evaluated is within the scope of this document.
All other threaded seals are beyond the scope of this
document.
2.5 When using this method for making comparisons
among various tube fittings and/or manufacturers, the
user must be specific in the selection of the tube and
tube fittings to be evaluated.
2.6 The International System of Units (SI) is used as
the standard unit of measure in this document. The U.S.
Customary units are in parentheses for reference
purposes only and may have been rounded to the
nearest whole value.
3 Referenced Document
3.1 ASTM Standard
1
ASTM D 1599 — Test Method for Short-Time
Hydraulic Failure Pressure of Plastic Pipe, Tubing, and
Fittings
4 Summary of Method
4.1 This test method consists of pressurizing tube
fitting connections made of fluorocarbon materials to
1 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohoken, PA 19428-2959
failure by continuously increasing the internal hydraulic
pressure. New tubing and fitting samples are required at
each specific elevated fluid temperature condition, and
failures are to occur within 60 to 70 seconds from initial
exposure to the high pressure fluid.
5 Significance and Use
5.1 In the manufacturing of semiconductor products,
many types of hazardous chemicals and solvents are
required. As a result, tubing and various fitting designs
made of fluorocarbon materials (which are chemically
resistant to these fluids) are used to transport those
fluids. It is important to control the testing process
when evaluating various fitting designs, so that accurate
comparisons of the pressure limits can be made.
5.2 It is the intent of this method to provide a
procedure to determine the maximum pressure limits of
tube fitting connections made of fluorocarbon
materials. By using this method, accurate comparisons
of various tube fitting designs can be achieved.
5.3 The results obtained when usin g this method are
applicable only to conditions that specifically duplicate
the procedures used within this method.
5.4 When using this test method, it is assumed that the
test specimens are truly representative of the material
and manufacturing process specified for that product.
Departure from this assumption could introduce
discrepancies that are greater than those introduced by
departure from the details of the procedure outlined in
this method.
6 Terminology
6.1 characterize — To describe the quality of.
6.2 failure — Any external leakage of fluid through
the tube wall or the tube fitting connection, whether it
be catastrophic or a slow leak.
6.3 free end closure — A metal tube fitting connection
which is securely fastened to the tube and does not
contribute to the restraint of the test specimen.
6.4 isolation valve — A valve used to separate the
high temperature fluid from the high pressure fluid or to
separate the samples from each other.
NOTE: This definition is used in only this test method.
SEMI F10-0698 © SEMI 1993, 1998 2
6.5 pressure containing envelope — The internal area
of a specimen which contains the fluid media.
6.6 standard deviation — A measure of the variation
among the members of a statistical sample.
6.7 subject — To expose to.
7 Description of Test Equipment
7.1 This test method requires the use of two hydraulic
systems.
7.1.1 A high pressure system capable of applying a
continuous increase of the internal hydraulic pressure to
the test specimen.
7.1.2 A low pressure, high temperature circulation
system capable of controlling a fluid temperature within
± 3°C (± 5°F) of a specified test temperature.
7.1.2.1 The pressure is to be 75 kPa (11 psig) or less
for all temperatures, within the range of 25° to 200°C
(77° to 392°F).
7.2 Test Fluid — When testing at or below 82°C
(180°F), an SAE 20 weight hydraulic oil may be used.
When testing at elevated fluid temperatures, use a
synthetic oil that is acceptable for elevated temperatures
of up to 200°C (392°F) and compatible with the test
stand and test specimens.
7.3 An instrument to record the peak pressure within
1% of full scale.
7.4 An instrument to monitor temperature within ±
1°C (± 2°F).
7.5 Specimen Support — Any support is acceptable as
long as it does not contribute to the restraint of the
specimen in either the circumferential or axial direction.
7.6 An enclosure that will allow observation of the test
specimen and that is also capable of controlling the
ambient temperature to 31° ± 6°C (88° ± 11°F).
7.7 See Figure 1 for basic pressure and circulation
system.
Figure 1
Basic Pressure and Circulation System
8 Safety Precautions
WARNING: This test method will subject test
specimens to conditions that exceed the
normal performance rating of the product
under evaluation. Adequate precautions must
be taken to prevent injury to the person
conducting the test, as catastrophic failures of
the test specimens are expected. The hydraulic
plumbing and safety enclosure is to be
constructed of materials which are capable of
containing a fluid at 200°C (392°F).
9 Test Specimens and Conditioning
9.1 Sample Size — A minimum of three specimens
shall be tested at each temperature condition.
9.1.1 The three connections will be conditioned
simultaneously. See Figure 1 for a basic pressure and
circulation system.
9.2 Specimen Surface — All surfaces of the specimens
shall be free of visible flaws, scratches, or other
imperfections, unless typically found on a
representative sample of the product.
9.3 Specimen Conditioning — All specimens must be
conditioned for a minimum of one hour in an air
environment of 23° ± 2.8°C (73° ± 5°F) prior to being
subjected to pressure.
9.4 A fluid at the specified temperature must be
circulated through all the test specimens for a minimum
of one-half hour.
SEMI F10-0698 © SEMI 1993, 19983
10 Test Procedure
10.1 Install three fitting connections, assembled per
manufacturer’s specifications, to the test system. Allow
for a minimum of 30 cm (12 in.) of tube length between
the test fitting connection and the free end closure.
10.2 The plumbing must permit free movement of
each test specimen to allow for distortion.
10.3 Using the low pressure circulation system (see
Section 7.1.2), condition the test specimens to 25°C
(77°F) per 9.4. The system pressure is not to exceed 75
kPa (11 psig) during conditioning.
10.4 Properly position the isolation valves in such a
way that only one specimen will be pressure tested,
while the remaining specimens continue to have heated
fluid circulating through them.
WARNING: Take all necessary precautions when
positioning the isolation valves, due to the potential
harm which might be caused by an accidental
exposure to the high temperature fluid.
10.4.1 Test each specimen within two minutes after
isolating it from the hot oil circulation system.
10.5 Using the high pressure system (see Section
7.1.1), pressurize the specimen until failure occurs.
10.5.1 Increase the pressure at a uniform and constant
rate such that failure occurs between 60 to 70 seconds
from initial exposure to the high pressure fluid.
10.6 Record on test data sheet (see Appendix 1 for
sample test data sheet) the pressure and temperature at
which the failure occurred. To identify mode of failure,
record pressure reading under column:
“T” — for tube failure.
“F” — for fitting connection failure.
10.7 Repeat 10.1 through 10.5, substituting, for the
fluid temperature in Section 10.2, the remaining six
temperatures: 75°C (167°F), 100°C (212°F), 125°C
(257°F), 150°C (302°F), 175°C (347°F), and 200°C
(392°F).
11 Calculations
11.1 Calculate the average pressure for each test
temperature and record in kPa (psig).
11.2 Calculate the standard deviation for each test
temperature and record.
12 Data Accuracy
12.1 Pressure — kPa: ± 2%
12.2 Fluid Temperature — ± 1°C (± 2°F)
13 Test Data Sheet
The test data sheet shall include the following
information:
13.1 Date tested.
13.2 Operator and test facility.
13.3 Description of items tested, including:
Tubing — manufacturer, O.D., wall thickness, part
number, and material type.
Fitting — manufacturer, type, size, part number, and
material type.
13.4 The actual temperature for each test.
13.5 The failure pressure for each sample, in the
appropriate column.
13.6 The average and standard deviation for each
failure mode of each specimen.
NOTE: A sample test data sheet is provided as Related
Information 1.
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.