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SEMI E74-0301 © SEMI 1998 , 2001 2 ISO 1609 — Vacu um Technology - Flang e dimensions ISO 2861- 1 — Vacuum technology - Quick-release coupling s - Dimensions - Part 1: Clam ped type NOTE 1: A s listed or revised, all d o…

SEMI E74-0301 © SEMI 1998, 20011

SEMI E74-0301

SPECIFICATION FOR VACUUM PUMP INTERFACES -

TURBOMOLECULAR PUMPS

This specification was technically approved by the Global Physical Interfaces & Carriers Committee and is

the direct responsibility of the Japanese Physical Interfaces & Carriers Committee. Current edition approved

by the Japanese Regional Standards Committee on December 1, 2000. Initially available at www.semi.org

January 2001; to be published March 2001. Originally published June 1998; previously published February

1999.

1 Purpose

1.1 This standard specifies the physical and electrical

interfaces for turbomolecular pump (TMP) type

vacuum pumps. Standardization of pump interfaces

will allow for interchangeability of pumps. Device

manufacturers use this standard when procuring

processing equipment to specify to the equipment

supplier the interface required for interchangeability of

pumps. This document is also used by semiconductor

processing equipment suppliers to specify standardized

interfaces to pump suppliers.

2 Scope

2.1 This standard applies to vacuum pumps supplied

with 300 mm semiconductor processing equipment.

2.2 The standard specifies the mechanical and

electrical interfaces for turbomolecular pumps,

including the following:

• Mechanical connectors and locations

• Control signals and connector

• Power supply and connector

Tool

Power Supply

Range of Standardization

Area (within the broken line)

Signal for

equipment controller

Physical Interface

Electrical

I/O signal

& input power

TMP

DRP

The cables between TMP and

Power supply are not standardized

Figure 1

Scope of Standardized Interface

2.3 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 This standard is not intended to dictate how to

build a vacuum pump, but to specify interfaces that will

allow for interchangeability of individual pumps.

3.2 This standard does not include specifications for

sensor-bus compliant interfaces.

3.3 This standard is not intended to address design

issues related to safety considerations and containment

issues which are addressed elsewhere in the SEMI

guidelines.

3.4 International, national and local codes, regulations

and laws should be consulted to ensure that the

equipment meets regulatory requirements in each

location of use.

3.5 This standard does not apply to turbomolecular

pumps less than 300 l/s or greater than 3000 l/s. Pumps

less than 300 l/s are too small and pumps greater than

3000 l/s pumps are not commonly used.

3.6 Double flow turbomechanical pumps are excepted

from this standard, because their shapes and structures

are different from turbomolecular pumps to be applied

this standard.

4 Referenced Standards

4.1 SEMI Standard

SEMI S2 — Environmental, Health, and Safety

Guideline for Semiconductor Manufacturing Equipment

4.2 ISO Documents

ISO 7-1 — Pipe threads where pressure-tight joints are

made on the threads - Part 1: Dimensions, tolerances

and designation

1 International Organization for Standardization, C.P. 56 CH-1211

Geneva 20, Switzerland

SEMI E74-0301 © SEMI 1998, 2001 2

ISO 1609 — Vacuum Technology - Flange dimensions

ISO 2861-1 — Vacuum technology - Quick-release

couplings - Dimensions - Part 1: Clamped type

NOTE 1: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

5 Terminology

5.1 pump alarm  A cautionary signal that the pump

has stopped or is to be stopped.

5.2 pump warning  A state of an abnormal or

extraordinary event during pump operation which

means there is a probability the pump will stop.

5.3 turbomolecular pump (TMP)  Equipment used

to create a high vacuum. Rapidly rotating blades force

molecules to the bottom for removal by a mechanical

pump.

5.4 Vacuum Pump  A pumping apparatus which

exhausts gas or air from an enclosed space to achieve a

desired degree of vacuum.

6 Requirements

6.1 Mechanical Interfaces

6.1.1 Table 1 specifies the required TMP connector

type and size by flange/port. Axial orientation and

position of the connectors are specified in Table 2 and

Figure 2. Port and connector positions shall be at the

periphery of the pump. Put inlet port on the z-axis and

the outlet port on the x-axis. Other connector locations

are specified by the angle between the x-axis and the

center of the connector.

Table 1 Mechanical Connectors

No. Items Connector Type Connector Size Referenced

Standard

Remarks

1 Inlet flange ISO bolted flange Connector dimensions

should be based on the

referenced standard

ISO 1609 A port flange which connects the

pump to a process tool to evacuate

gases.

2 Outlet flange ISO KF flange Connector dimensions

should be based on the

referenced standard

ISO 2861-1 A port flange which connects the

pump to the DRP (Dry Pump).

3 Purge gas port ISO KF flange Size 10 or 16 connector ISO 2861-1 A connection port used to supply

inert gas, typically N

, to the pump.

The purge gas protects the inside of

the pump from corrosion due to

process gases.

4 Cooling water port ISO taper pipe thread

(female on pump side)

1/4" or 3/8" ISO 7/1 A connection port to supply water

used to keep the pump cool.

Table 2 Connector Locations

No. Items Connector

Location

Connector Angle

(degrees)

Remarks

1 Inlet flange z-axis Flange bolt holes shall be symmetrically located at equal

distance from the center line of the outlet flange.

2 Outlet flange transverse

0°

3 Purge gas port transverse

- 90° to + 90°

4 Cooling water port transverse

- 90° to + 90°

The forbidden area shall be symmetrically located at

equal distances from the center of the outlet flange.

Distance from the x-axis shall be more than 1.5 times the

nominal bore of the outlet flange.

5 Electrical connections transverse

0° to -120°

6 Other ports transverse

- 90° to + 90°

D: nominal bore of the outlet flange

Top view

1.5D

X axis

the area for the purge gas inlet

& the cooling water connectors

Purge gas

inlet

bolt holes

the area

for the electrical connectors

Y axis

the forbitten area

for installation

0 to –120 deg

0 to –90 deg

0 to +90 deg

Inlet flange

Outlet flange

electrical

connector(s)

Cooling water

connectors

Side view

Z axis

Figure 2

Connector Locations