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SEMI F29-0997 © SEMI 1997, 1103 3 9.1.5 Record the pressure and peak oxyge n concentration in Ta ble 1. It is highl y recommended that, in a ddition to the peak oxygen concentrati on, the oxyge n concentration readings a…
SEMI F29-0997 © SEMI 1997, 1103 2
5.2.7 pigtail bleed — a pigtail bleed is a reverse flow
of purge gas from the pigtail to minimize atmospheric
intrusion into the gas panel.
5.2.8 purge cycle — following the initial process vent
step, a cycle is defined as a pressurization step followed
by an evacuation step.
5.2.9 purified nitrogen — nitrogen purified to meet the
following characteristics:
Moisture < 20 ppb
Oxygen < 10 ppb
Total hydrocarbons < 1 ppm
CO
2
< 1 ppm
CO < 1 ppm
6 Ordering Information
6.1 Orders for equipment or services requiring purge
efficacy testing in accordance with this test method
shall include the following:
6.1.1 This test method number and date of issue.
6.1.2 Test requirements as defined in the detailed
specifications for the specific product being purchased.
6.1.3 Whether certifications of tests and a report of the
test results is required.
7 Requirements
7.1 Personnel Qualification — Personnel performing
tests in accordance with this specification shall have
suitable training and experience. Such personnel
should, as a minimum,
7.1.1 be trained and experienced in operation of gas
source control equipment,
7.1.2 be trained and experienced in the use of oxygen
and moisture analyzers, and
7.1.3 be familiar with the operation and calibration of
the specific equipment used in performing the tests.
8 Apparatus
8.1 Oxygen Analyzer — The oxygen analyzer should
meet or exceed the following characteristics:
Limit of Detection 10 ppb
Accuracy ± 10 ppb
8.2 Moisture Analyzer — The moisture analyzer
should meet or exceed the following characteristics:
Limit of Detection 10 ppb
Accuracy ± 10 ppb
8.3 Pressure Transducer — The transducer should be
of a high-purity type with minimal dead volume and
meet or exceed the following characteristics:
Accuracy ± 3.4 kPa (0.5 psi)
Hysteresis ± 3.4 kPa (0.5 psi)
Non-Repeatability ± 0.7 kPa (0.1 psi)
8.4 Mass Flow Controller or Flow Meter — The mass
flow controller or flow meter should be accurate to ±
0.2 slpm.
8.5 Moisture Source — The moisture source must be
capable of providing a 2 slpm continuous flow of 2.0 ±
0.2 ppm moisture in nitrogen mixture at 138 kPa (g) [20
psi (g)] for a minimum of 30 minutes.
9 Procedure
9.1 Purge efficacy determination with non-interactive
gas at manufacturer’s recommended pressure, vacuum,
and dwell times.
9.1.1 Connect gas source equipment as in Figure 1.
NOTE 2: To avoid biasing the test results by substantially
increasing piping volume to be purged, the dead space
between the cylinder connection and the valves isolating the
analyzer and the contaminant source must be small compared
to the total pigtail volume. The use of mono-block valve and
flow-through type pressure transducer is highly
recommended.
9.1.1.1 However, the pigtail is connected to the
cylinder valve during the purge in an actual cylinder
change operation. The small additional volume to be
purged in the test setup may be used to account for the
volume of the cylinder valve outlet cavity, which must
be purged during a cylinder change.
9.1.2 To challenge the gas panel with a known
contaminant gas, completely fill and pressurize the gas
source system to 207 kPa (g) [30 psi (g)] with CDA as
measured at the pigtail with the pressure transducer.
9.1.3 Using purified nitrogen as the purge gas,
complete one purge cycle at the manufacturer’s
recommended pressure, vacuum, and dwell times.
9.1.4 Flow purified nitrogen using a pigtail bleed at 1
slpm or at the oxygen analyzer manufacturer’s
recommended flow rate, whichever is higher, into the
oxygen analyzer for 10 minutes or until below the
detection limit of the oxygen analyzer.
SEMI F29-0997 © SEMI 1997, 1103 3
9.1.5 Record the pressure and peak oxygen concentration in Table 1. It is highly recommended that, in addition to
the peak oxygen concentration, the oxygen concentration readings also be recorded at regular intervals during the
measurement, so that a graph of the oxygen concentration level in the pigtail bleed gas versus time can be drawn if
necessary.
9.1.6 Repeat Sections 9.1.2–9.1.5 for 2, 5, 25, and 50 purge cycles at the manufacturer’s recommended pressure,
vacuum and dwell times. Additional tests using other purge cycle numbers are encouraged and may provide a more
complete characterization of the purge performance of the test piece.
9.1.7 Plot the peak residual oxygen concentration versus cycles as in Figure 2 for manufacturer’s recommended
pressure, vacuum, and dwell times.
9.2 Purge efficacy determination with non-interactive gas at standard pressure, vacuum and dwell times.
9.2.1 Connect the gas source equipment as in Figure 1.
Figure 1
Test Schematic
9.2.2 To challenge the gas panel with a known contaminant gas, completely fill and pressurize the gas source
system to 207 kPa (g) [30 psi (g)] with CDA as measured at the pigtail with the pressure transducer.
SEMI F29-0997 © SEMI 1997, 1103 4
9.2.3 Using purified nitrogen as the purge gas,
complete one purge cycle with the purge gas pressure at
522 kPa (g) [80 psi (g)], vacuum at -75 kPa (g) [-22"
Hg (g)], and dwell times for pressurization and vacuum
evacuation at 5 and 15 seconds, respectively.
Figure 2
Data Presentation for Purge
Efficacy — Non-Interactive Gas
9.2.4 Flow purified nitrogen using a pigtail bleed at 1
slpm or at the oxygen analyzer manufacturer’s
recommended flow rate, whichever is higher, into the
oxygen analyzer for 10 minutes or until below the
detection limit of the oxygen analyzer.
9.2.5 Record the pressure and vacuum measured with
the transducer and the peak oxygen concentration as in
Table 1. It is highly recommended that, in addition to
the peak oxygen concentration, the oxygen
concentration readings also be recorded at regular
intervals during the measurement, so that a graph of the
oxygen concentration level in the pigtail bleed gas
versus time can be drawn if necessary.
Table 1 Data Collection Form
Manufacturer’s
Recommended Purge
Parameters
SEMI Standard Purge
Parameters
Pressure kPa (g)
Vacuum kPa (g)
Cycles Peak Residual Oxygen
1
5
25
50
9.2.6 Repeat Sections 9.2.2–9.2.5 process for 2, 5, 25,
and 50 cycles. Additional tests using other purge cycle
numbers are encouraged and may provide a more
complete characterization of the purge performance of
the test piece.
9.2.7 Plot the peak residual oxygen concentration
versus number of cycles as in Figure 2 for standard
pressures, vacuum, and dwell time.
9.3 Purge efficacy determination with interactive gas at
manufacturer’s pressure, vacuum, and dwell times.
9.3.1 Connect gas source equipment as in Figure 1.
9.3.2 To challenge the gas panel with a known
contaminant gas, flow wet (2 ppm) N
2
at 2 slpm and
138 kPa (g) [20 psi (g)] for 30 minutes or until the
process outlet concentration reaches the inlet
concentration, whichever is less.
9.3.3 Using purified nitrogen as the purge gas,
complete one purge cycle at manufacturer’s
recommended pressure, vacuum, and dwell times.
9.3.4 Flow purified nitrogen using a pigtail bleed at 1
slpm or at the moisture analyzer manufacturer’s
recommended flow rate, whichever is higher, into the
moisture analyzer for 30 minutes or until below the
detection limit of the moisture analyzer.
9.3.5 Record the pressure and vacuum measured with
the pressure transducer and peak residual moisture
concentration in Table 2. It is highly recommended that,
in addition to the peak moisture concentration, the
moisture concentration readings also be recorded at
regular intervals during the measurement, so that a
graph of the moisture concentration level in the pigtail
bleed gas versus time can be drawn if necessary.
9.3.6 Repeat Sections 9.3.2–9.3.5 process for 2, 3, 4, 5,
10, 25, and 50 cycles. Additional tests using other purge
cycle numbers are encouraged and may provide a more
complete characterization of the purge performance of
the test piece.
9.3.7 Plot the peak residual moisture concentration
versus number of cycles as in Figure 3 for
manufacturer’s pressure, vacuum, and dwell time.