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SEMI E92-0302 E © SEMI 1999, 2003 3 5.2.20 seal zone — a surface on the equi pment at the BOLTS/Light plane for sealing to the box opener/l oader. 5.2.21 side interface feat ure — an interface means to perform a seal bet…

SEMI E92-0302

SEMI E15.1 — Specification for 300 mm Tool Load

Port

SEMI E47.1 — Provisional Mechanical Specification

for Boxes and Pods Used to Transport and Store 300

mm Wafers

SEMI E57 — Mechanical Specification for Kinematic

Couplings Used to Align and Support 300 mm Wafer

Carriers

SEMI E62 — Provisional Specification for 300 mm

Front-Opening Interface Mechanical Standard (FIMS)

SEMI E63 — Mechanical Specification for 300 mm

Box Opener/Loader to Tool Standard (BOLTS-M)

Interface

SEMI E64  Specification for 300 mm Cart to SEMI

E15.1 Docking Interface Port

4.2 Other Standard

I300I/J300 GJG  I300I/J300 Global Joint Guidance

for 300 mm Semiconductor Factories

NOTE 1: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 AMHS — Automated Material Handling System

5.2 Definitions

5.2.1 bilateral datum plane — a vertical plane that

bisects the wafers and that is perpendicular to both the

horizontal and facial datum planes (as defined in SEMI

E57).

5.2.2 BOLTS/Light exclusion volume — a volume

reserved by equipment or loadport unit to put

BOLTS/Light compliant box opener/loader.

5.2.3 BOLTS/Light plane — a vertical plane that

interfaces BOLTS/Light compliant box opener/loader

and equipment.

5.2.4 bottom interface plane— an interface means

between the equipment and box opener/loader.

5.2.5 box — a protective portable container for a

cassette and/or substrate(s).

5.2.6 box opener/loader — the equipment component

that opens wafer carriers (if needed) and presents the

carriers to the equipment’s wafer handler for unloading

and loading wafers.

5.2.7 carrier — any cassette, box, pod, or boat that

contains wafers (as defined in SEMI E1.9). Also known

as wafer carrier.

5.2.8 carrier capacity — the number of substrates that

a carrier holds (as defined in SEMI E1.9).

5.2.9 cassette — an open structure that holds one or

more substrates.

5.2.10 control connection area — an area to be used

for placement of connectors for electrical signals,

power supplies, and other inlets/outlets.

5.2.11 docked facial datum plane — a vertical plane

that bisects the wafers at the carrier docked position. It

is also parallel to the load face plane specified in SEMI

E15.

5.2.12 docking stroke — the travel distance of the

carrier center between its load position (facial datum

plane) and the position where the door opening/closing

is done.

5.2.13 facial datum plane — a vertical plane that

bisects the wafers and that is parallel to the front side of

the carrier (where wafers are removed or inserted). On

equipment load ports, it is also parallel to the load face

plane specified in SEMI E15 on the side of the

equipment where the carrier is loaded and unloaded (as

defined in SEMI E57).

5.2.14 front-opening unified pod (FOUP) — a box

(that complies with SEMI E47.1) with a nonremovable

cassette (so that its interior complies with SEMI E1.9)

and with a front-opening interface (that mates with a

FIMS port that complies with SEMI E62) (as defined in

SEMI E47.1).

5.2.15 horizontal datum plane — a horizontal plane

from which projects the kinematic-coupling pins on

which the carrier sits. On equipment load ports, it is at

the load height specified in SEMI E15 and might not be

physically realized as a surface (as defined in SEMI

E57).

5.2.16 load face plane — the furthest physical vertical

boundary plane from the cassette centroid or carrier

centroid on the side (or sides) of the equipment where

loading of the equipment is intended (as defined in

SEMI E15).

5.2.17 loading slider area — two flat surfaces on

equipment which may be used by a maintenance

supporting mechanism (not defined in this standard) to

support the box opener/loader during attachment and

detachment.

5.2.18 minienvironment — a localized environment

created by an enclosure to isolate the product from

contamination and people.

5.2.19 pod — a box having a Standard Mechanical

Interface (SMIF) per SEMI E19.

SEMI E92-0302

5.2.20 seal zone — a surface on the equipment at the

BOLTS/Light plane for sealing to the box

opener/loader.

5.2.21 side interface feature — an interface means to

perform a seal between the mini-environment of the

equipment and box opener/loader.

5.2.22 wafer carrier — any cassette, box, pod, or boat

that contains wafers (as defined in SEMI E15).

6 Functional Requirements

6.1 This standard does not define actual

implementation but requires functional compliance with

the following standards for interchangeability and

interoperability of box opener/loader.

6.2 The box opener/loader of this standard should be

compliant with related sections of factory interface

standards such as SEMI E15.1, SEMI E57, SEMI E47.1

and SEMI E62.

6.3 Outer Dimensions and Physical Factory Material

Delivery Interface Compatibility — Physical

dimensions, such as clearances and trenches required

for factory delivery systems (human or automated),

should be compliant with SEMI E15.1.

6.3.1 Carrier Registration — The physical alignment

mechanism for the box consists of features (not

specified in this standard) on the box that mate with

three pins underneath as defined in SEMI E57. Primary

kinematic coupling pins should be used.

6.3.2 Loadport Pitch — The loadport pitch which

conforms to this standard is S ≥ 475 mm (minimum

value for FOUP without handles as defined in SEMI

E15.1).

6.4 Carrier ID Reader/Writer Head Exclusion Volume

— The box opener/loader compliant with this standard

should have a carrier ID reader/writer head exclusion

volume defined in SEMI E15.1 for automated units that

read or write to an ID tag. Regarding the box

opener/loader, the front end of this exclusion volume is

limited by y111. And the rear end of this exclusion

volume is defined in SEMI E15.1 D3. The difference

between y111 and SEMI E15.1 D4 should be supplied

by the equipment.

6.5 Carrier Sensing — The box opener/loader

compliant with this standard has to have the following

capabilities:

6.5.1 Carrier Presence Sensor — Carrier sensing

capability which detects carrier presence regardless of

its correct placement.

6.5.2 Carrier Placement Sensor — Carrier sensing

capability which detects correct carrier placement on

the kinematic coupling.

6.6 Info-pad Interfaces — Optional info-pad

sensing/detecting capability as defined in SEMI E1.9

and SEMI E15.1.

6.6.1 Info-pad A, B Sensors — Optional carrier sensing

capability which detects carrier type as defined in SEMI

E1.9 and SEMI E15.1.

6.6.2 FEOL/BEOL Lockout Pin — Optional pin that

physically detects/rejects a misplaced carrier by using

info-pads C and D to distinguish a FEOL carrier vs. a

BEOL carrier. This pin should be capable of being

installed easily after the equipment is delivered.

6.7 Box to Equipment Sealing Interface and Door

Lock/Unlock Interface — This standard requires a box

to equipment seal interface and door lock/unlock

interface compliant with SEMI E47.1 and SEMI E62.

This standard does not specify any of the actual design.

7 Mechanical Requirements

7.1 Datum Planes and Dimensioning Rules —

Dimensions defined in this standard are determined

with respect to the following datum planes and default

dimensioning rules.

NOTE 2: Unless otherwise stated, perpendicularity and

parallelism are implicitly defined in the geometric tolerances.

7.1.1 Three Common Datum Planes — Many of the

dimensions of the BOLTS/Light interface are

determined with respect to the three orthogonal datum

planes defined in SEMI E57: the horizontal datum

plane, the facial datum plane, and the bilateral datum

plane.

7.1.2 Symmetry — All of the dimensions for the

interface are bilaterally symmetric about the bilateral

datum plane unless otherwise noted. These dimensions

are shown in Figures 2 and 3 and specified in Table 1.

7.1.3 Inner and Outer Radii — All required concave

features may have a radius of up to r100 to allow

cleaning and to prevent contaminant build-up. All

required convex features may also have a radius of up

to r101 to prevent small contact patches with large

stresses that might cause wear and particles. Note that

these limits on the radius of all required features are

specified as a maximum (not a minimum) to ensure that

the required features are not rounded off too much. The

lower bound on the radius is up to the equipment

supplier. Note also that this radius applies to every

required feature unless another radius is called out

specifically.

SEMI E92-0302

7.2 BOLTS/Light Exclusion Volume — Equipment or

loadport unit compliant with this standard must provide

a BOLTS/Light exclusion volume defined in this

section. BOLTS/Light exclusion volume consists of

multiple sub-volumes and spaces defined in this

section. The box opener/loader compliant with this

standard must be compatible with BOLTS/Light

exclusion volume. Bolts/Light exclusion volume is

shown in Figure 2.

7.2.1 Loader Exclusion Volume — Loader exclusion

volume is an exclusion volume for the main part of box

opener/loader that is defined by x108, y101, y110, y111,

and z107. y111 is intentionally shorter than SEMI

E15.1 D dimension in order to allow the equipment

integrators to place a safety door, a carrier ID

reader/writer, and/or any other features required by the

user. An additional removable cover can be mounted on

the box opener/loader if it is to be supplied as a

complete unit compliant with the SEMI E15.1 D

dimension.

7.2.2 Door Seal Exclusion Volume — Door seal

exclusion volume is an exclusion volume for the door

seal portion of box opener/loader that is defined by the

distance between the plane at the SEMI E15.1 D1 and

y101, x108, and z109.

7.2.3 BOLTS/Light Opening Exclusion Volume —

BOLTS/Light opening exclusion volume is an exclu-

sion volume for the box opener/loader encroachment of

equipment from BOLTS/Light plane at portion above

the permanent reserved space. There should be an

opening when the door is opened. Through this opening

substrates may be moved between the box on the

BOLTS/Light compliant box opener/loader and the

equipment by a wafer handler in the equipment.

BOLTS/Light opening exclusion volume is defined by

x102, y103, z103, and z108.

7.2.4 Permanent Reserved Space — Space that is

reserved permanently in the equipment defined by

x102, y102, z105, and z108.

7.2.5 Temporarily Reserved Space — Space that is

reserved temporarily during a door open/close motion is

being done and when the door is closed. The

temporarily reserved space during a door open/close is

defined by x102, y102, y103, z103, and z108. The

temporarily reserved space when a door is closed is

defined by x102, y103, y112, z103, and z108.

7.2.6 The Loader Bottom Flange Exclusion Volume —

The loader bottom flange exclusion volume is an

exclusion volume for fixing the box opener/loader to

bottom interface plane. Loader bottom flanges are

located on the both bottom side of the box

opener/loader and directly mounted on bottom interface

plane. The loader bottom flange exclusion volume is

defined by x108, x109, y115, y116, and z113 measured

from the bottom end of z107.

NOTE 3: The spaces to access the fixing bolt should be

reserved by equipment side. This document does not define

these spaces.

7.3 Side Interface Features — This standard defines

the equipment side of the side interface features. Side

interface features are defined with respect to “Docked

facial datum plane” instead of “Facial datum plane”.

The box opener/loader should mate with these features

to provide the seal to the equipment. The side interface

features are shown in Figure 2.

7.3.1 BOLTS/Light Plane — The BOLTS/Light plane

is defined to be parallel to and at a distance y101 from

the docked facial datum plane. The Seal Zone is on this

plane.

7.3.2 Cycle-to-Cycle Repeatability — The cycle-to-

cycle repeatability of y101 must be within y113.

7.3.3 Seal Zone — The equipment side of the

BOLTS/Light plane specified by x101, x103, z101,

z102, z104, and z106 must be a flat area for sealing

between the equipment and the box opener/loader.

7.3.3.1 The flatness of the seal zone must be within

y114 and the perpendicularity of the seal zone to the

facial and horizontal datum planes must be within

σ1

7.3.3.2 This standard only defines the seal zone on the

equipment side. The actual seal is not defined in this

standard, but should be mounted on the box

opener/loader.

7.3.4 Wafer Position — This standard defines a typical

wafer position when the box opener/loader positions the

wafers to the equipment. The facial datum plane of a

docked carrier is defined by y110 from the facial datum

plane. This provides compatible wafer center positions

from the facial datum plane.

NOTE 4: This means that this standard defines a specified

typical docking stroke.

7.4 Bottom Interface Features — This standard defines

mainly the equipment side of the bottom interface

features. Bottom Interface Features are shown in

Figure 3.

7.4.1 Regarding the box opener/loader, parallelism of

the bottom interface feature and the horizontal datum

plane must be within

σ2

7.4.2 Bottom Interface Planes — The Bottom Interface

Feature should have two Bottom Interface Planes

defined by x104, x105, y104, y105, and z107. Nothing

other than locating pins can protrude above these

planes. During maintenance, the front end of the