semi合集-English.pdf - 第2532页
SEMI E88-1104 E © SEMI 1999, 2004 29 QUEUED NA NA NA X X NA STOCKER CARRIER STATE STORED (ALTERNATE) NA NA NA X NA X X STORED (COMPLETED) X NA NA X NA X X NA X TRANSFERRING X NA NA NA X NA NA X WAIT IN X NA NA X NA X X N…

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Parameter Value
Cpname
Description Range Format
COMMANDINFO L,2
COMMANDID
PRIORITY
L,2
DEST Destination location identifier. Must be a valid ZoneName.
Must be a loading port for a move to an
output shuttle (DEST = LP).
A[164]
ERRORNUMBER Unique error identifier created by the stocker.
A[164]
PRIORITY Remote command priority. 0 is not valid.
1 is the LOWEST priority, 99 is the highest
priority.
U2
SOURCE Unique source location identifier. Stocker Robot/Crane is a valid SOURCE
(Supplier Option).
A[164]
TRANSFERINFO L,3
CARRIERID
SOURCE
DEST
SOURCE may intentionally be left blank by
the Host. If this is true, the stocker must
determine the carrier’s current location by
checking its database for the specified
CARRIERID.
L,3
12.3.14 Remote Commands versus SC, Transfer Command and Stocker Carrier States
12.3.14.1 The following table indicates SC, TRANSFER Command and Stocker Carrier States where the remote
commands are allowed. This is indicated with a “X” mark. Remote commands act independently of other state
models (e.g., Stocker Crane States are independent from the Stocker SEM remote commands). “NA” (Not
Applicable) means that States and Remote Commands have no direct relationship.
Table 13 Remote Commands versus SC and TRANSFER Command States
COMMAND
TRANSFER
RETRY
RESUME
REMOVE
PAUSE
LOCATE
INSTALL
CANCEL
ABORT
INFOUPDATE
SC STATE
AUTO X X X X X X X X X
ALARMS X X X X X X X X X X
SC INIT
NO ALARMS X X X X X X X X X
PAUSED X X X X X X X X X
PAUSING X X X X X X X X X
TRANSFER COMMAND STATE
ACTIVE (PAUSED) NA X NA NA X X NA
ACTIVE (QUEUED AT ALT.) NA NA NA X X NA
ACTIVE (TRANSFERRING) NA NA NA X X NA
ABORTING NA NA NA X NA
CANCELING NA NA NA X NA

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QUEUED NA NA NA X X NA
STOCKER CARRIER STATE
STORED (ALTERNATE) NA NA NA X NA X X
STORED (COMPLETED) X NA NA X NA X X NA X
TRANSFERRING X NA NA NA X NA NA X
WAIT IN X NA NA X NA X X NA NA X
WAIT OUT NA NA X NA X X NA NA X
12.4 Remote Command Relies
12.4.1 For a TRANSFER remote command the HCACK in the reply message must return an error 6 (No such
Object Exists) if the SOURCE is not specified and the CARRIERID is not in the SC database. If the SOURCE is
invalid (i.e. not a valid CarrierLoc), then the HCACK in the reply message must return an error of 3 (Invalid
Parameter).
12.4.2 For a LOCATE remote command the HCACK in the reply message must return an error 6 (No such Object
Exists) if value specified for the CARRIERID, ZONENAME, or CARRIERLOC does not exist in the SC database.
13 Scenarios
13.1 The scenarios that follow represent Application Notes. In the scenarios, all unique Remote CommandIDs must
initially be created and sent by the Host. Subsequent event reports sent from the equipment referring to the status of
a particular remote command must return the applicable CommandID. All collection events identified in Table 6 are
assumed to be enabled (per the SEMI E30 definition/scenario) throughout the following scenarios. Variable data
specified in the Host commands has been chosen arbitrarily for the purpose of demonstrating message
structure/content. The Collection Event Report definitions contained in the scenarios are examples that could be
defined by the host.

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Normal Operation
13.1.1 Carrier Transfer from an Input to a Storage Location (No ID Reader at Input Port)
13.1.1.1 The carrier is transferred from a stocker input port to a storage location. The SC inserts the carrier into the
database based on the CarrierID sent by the Host in the TRANSFER command. This is the scenario when the
stocker does not have a carrier ID reader at the input port. A good example of this would be for a interbay transport
input port.
STEP COMMENTS HOST SC COMMENTS
1. Carrier 123456 enters the
domain of the stocker
2. Since there is no ID reader,
the SC can choose an
y
arbitrar
y
CarrierID to internally track
the carrier; However, the SC
must send the empty string as
the CarrierID to the Host so
that the Host can distinguish
this condition. It is the Host
responsibility to recognize
that the empty string “” for
the CarrierID denotes that a
carrier ID reader does not
exist at this input port.
S6,F11
Event Report Send (ERS)
CarrierWaitIn
· CarrierID = “” /* Empty
String */
· CarrierLoc
· CarrierZoneName
3. Event Report Acknowledge (ERA)
S6,F12
4.
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
5. Event Report Acknowledge (ERA)
S6,F12
6. Enhanced Remote Command (ERC)
TRANSFER
· COMMANDID
· PRIORITY
· TRANSFERINFO
1. CARRIERID = “123456”
2. SOURCE = blank
3. DEST = “STORAGE”
S2,F49
In this scenario SOURCE is the
name of an input port position
and DEST is the ZoneName
STORAGE which is a SC selected
shelf. Both CARRIERID and
SOURCE must be included to do
an automatic install of the
carrier into the SC database.
7.
S2,F50
Enhanced Remote Command
Acknowledge (ERCA)
8.
S6,F11
Event Report Send (ERS)
TransferInitiated
· CommandID =
· CarrierID = “123456”
· CarrierLoc =
· CarrierZoneName =
· Dest = “STORAGE”
9. Event Report Acknowledge (ERA)
S6,F12
10.
S6,F11
Event Report Send (ERS)
CarrierTransferring
· CarrierID = “123456”
· CarrierLoc
· CarrierZoneName
11. Event Report Acknowledge (ERA)
S6,F12
12.
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
13. Event Report Acknowledge (ERA)
S6,F12
14.
S6,F11
Event Report Send (ERS)
CraneActive
15. Event Report Acknowledge (ERA)
S6,F12