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SEMI P10-0705 © SEMI 1990, 2005 44 <xs:element name="BarcodeText" type="xs:string"/> </xs:sequence> <xs:sequence minOccurs="0"> <xs:element name="BarcodeLocation&qu…

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SEMI P10-0705 © SEMI 1990, 2005 43
<xs:sequence minOccurs="0">
<xs:element name="AimCdDelta" type="xs:double"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartAerialImageData"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndAerialImageData"/>
</xs:complexType>
<xs:complexType name="TitleDataType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TitleText" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TitleType" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TitleFont" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TitleHeight" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TitleMag" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TitleJustification"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="TitleLocation" type="XYType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MirrorTitle" type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RotateTitle" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RotateTitleCharacters"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartTitleData"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndTitleData"/>
</xs:complexType>
<xs:complexType name="BarcodeDataType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BarcodeType" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
SEMI P10-0705 © SEMI 1990, 2005 44
<xs:element name="BarcodeText" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BarcodeLocation" type="XYType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BarcodeRotation" type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartBarcodeData"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndBarcodeData"/>
</xs:complexType>
<xs:complexType name="SubstrateType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BlankSize" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BlankType" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BlankGrade" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BlankFlatness" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MaskCoating" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ResistType" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ResistThickness" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BlankBirefringenceReqd"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Attenuator" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CoatingGrade" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="EuvBlankType"
type="EuvBlankTypeType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartSubstrate"/>
SEMI P10-0705 © SEMI 1990, 2005 45
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndSubstrate"/>
</xs:complexType>
<xs:complexType name="EuvBlankTypeType">
<xs:sequence>
<xs:element name="EuvFlatnessFront" type="xs:string"/>
<xs:element name="EuvFlatnessBack" type="xs:string"/>
<xs:element name="EuvMultilayerComposition"
type="xs:string"/>
<xs:element name="EuvCappingComposition" type="xs:string"/>
<xs:element name="EuvMmrWavelength" type="xs:double"/>
<xs:element name="EuvMeanPeakReflectivity"
type="xs:double"/>
<xs:element name="EuvPeakReflectivityUniformity"
type="xs:string"/>
<xs:element name="EuvAbsorberComposition"
type="xs:string"/>
<xs:element name="EuvAbsorberOpticalProperties"
type="xs:double"/>
<xs:element name="EuvBlankResistance" type="xs:double"/>
<xs:element name="EuvExpansionCoeff" type="xs:string"/>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartEuvBlankType"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndEuvBlankType"/>
</xs:complexType>
<xs:complexType name="ShipPlotType">
<xs:sequence>
<xs:element name="PlotType" type="xs:string"/>
<xs:element name="PlotScale" type="xs:double"/>
<xs:element name="Quantity" type="xs:integer"/>
<xs:sequence minOccurs="0">
<xs:element name="Price" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PlotFormat" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PatternPlotNormalTone"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShipTo" type="ShipToType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartShipPlot"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndShipPlot"/>
</xs:complexType>
<xs:complexType name="FilmsType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Quantity" type="xs:integer"/>