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SEMI S2-0703a E © SEMI 1991, 2004 44 Energy Category Physical Quantity Measured (units) Operator- Accessible Limit Maintenance- and Service- Accessible Limit Pacemaker Labeling Level Testing Methods Sub Radio- frequency …
SEMI S2-0703a
E
© SEMI 1991, 2004 43
APPENDIX 5
NON-IONIZING RADIATION (OTHER THAN LASER) AND FIELDS TEST
VALIDATION — Design and Test Method Supplement Intended for
Internal and Third Party Evaluation Use, But Not for Field Survey of
Installed Equipment
NOTICE: The material in this appendix is an official part of SEMI S2 and was approved by full letter ballot
procedures on December 15, 1999 by the North American Regional Standards Committee.
A5-1 Introduction
A5-1.1 This appendix provides specific technical
information relating to Section 25. In general, it
provides information on hazard evaluation methods and
test validation criteria.
A5-1.2 This appendix is not intended to limit hazard
evaluation methods or control strategies (e.g., design
principles) employed by manufacturers. Alternative
methods are acceptable if they provide an equivalent
level of hazard control.
A5-1.3 Test validation criteria are generally referenced
from the applicable internationally recognized
standards. It is the user’s responsibility to ensure that
the most current revision of the standard is used.
A5-2 Non-Ionizing Radiation Surveys should be
conducted at the maximum operational power level and,
when applicable, at the most limiting frequency.
A5-3 Measurements should be taken at the exterior
surfaces of the equipment and at surfaces that
maintenance and repair personnel could encounter,
whenever practical (electric field measurements with
paddle-shaped sensors may not be possible in some
places due to the size and shape of the sensor).
Measurements for the purpose of evaluating emissions
accessible to operators should be taken at the operators
console and material loading station.
A5-4 Measurements to assess electromagnetic
emissions from equipment for safety purposes should
be taken in an area that is reasonably free of energy of
the wavelengths/frequencies of interest, especially if the
strength of the energy fluctuates in a manner that is
unpredictable. Instruments used for safety-related
measurements should be calibrated at a facility capable
of calibrating such instruments using standards
traceable to the National Institute of Standards and
Technology in the USA or an equivalent standards
service elsewhere, per the guidance of the instrument
manufacturer. This should be determined by conducting
surveys in the test area before the equipment is set up
for the measurements. Measurements taken for safety
purposes can also be combined with measurements
taken to address electromagnetic interference concerns.
The specific measurement locations may vary between
electromagnetic interference and safety-related
measurements.
NOTE A5-1: The values in the table below are shown as 20%
of the limit stated in the applicable standard (referenced).
Table A5-1 Non-Ionizing Radiation
Energy
Category
Physical
Quantity
Measured
(units)
Operator-
Accessible Limit
Maintenance-
and Service-
Accessible Limit
Pacemaker
Labeling
Level
Testing Methods
Static
4
0 Hz.
(e.g., static
magnets in
etch/implant
equipment)
Magnetic
Field
Strength
(A/m or
Gauss)
(See
NOTES 1
and 2.)
8 mT
(80 G)
40 mT
(400 G)
0.5 mT
(5 G)
Use a Hall effect probe at each
location (use three axis probe or
make three mutually orthogonal
measurements at each location).
Measure field at exterior surfaces
of equipment (2 to 3 cm from the
surface). Locate 5 gauss (G) line
to post pacemaker warnings and
30 G to identify where flying
tools, etc. and dislocations of
magnetizable prostheses could
become a hazard.
SEMI S2-0703a
E
© SEMI 1991, 2004 44
Energy
Category
Physical
Quantity
Measured
(units)
Operator-
Accessible Limit
Maintenance-
and Service-
Accessible Limit
Pacemaker
Labeling
Level
Testing Methods
Sub Radio-
frequency
1
1 Hz to
3 kHz
(e.g.,
electromagnets
in etch
equipment)
*See exception
below for 50
and 60 Hz
power
frequencies.
Electric
Field
Strength
(V/m) (See
NOTE 1.)
1–100 Hz
5 kV/m*
100 Hz to 3 kHz
500,000/f (Hz) in
V/m
1–100 Hz
5 kV/m*
100 Hz to 3 kHz
500,000/f (Hz) in
V/m
1 kV/m Use a displacement sensor.
Determine the maximum field
strength and orientation at the
surface of the equipment (2–3
cm).
Remove field perturbations by
using a long non-conductive
handle extension or remote fiber
optic readout.
Locate 1 kV/m line to post
pacemaker warnings.
Sub Radio-
frequency
1
1 Hz to
3 kHz
(e.g.,
electromagnets
in etch
equipment)
*See exception
below for 50
and 60 Hz
power
frequencies.
Magnetic
Field
Strength
(A/m or G)
(See
NOTES 1
and 2.)
1–300 Hz
12/f (Hz) in mT
300 Hz to 3 kHz
0.04 mT
(400 mG)*
1–300 Hz
12/f (Hz) in mT
300 Hz to 3 kHz
0.04 mT
(400 mG)*
0.1 mT
(1 G)
Use a loop sensor at each location
(use three axis probe or make
three mutually orthogonal
measurements at each location).
The sensor should be almost
contacting the equipment surface
(2 cm from surface).
Identify 1 G line to post
pacemaker warnings.
Power
Frequency (50
or 60 Hz)
1,5
(e.g.,
electromagnets
in etch
equipment)
Electric
Field
Strength
(V/m) (See
NOTE 1.)
1 kV/m 2 kV/m 1 kV/m See Sub radiofrequency Electric
Field Testing Method, but probe
is positioned as needed to
determine distance to 1 kV/m.
Power
Frequency (50
or 60 Hz)
1,5
(e.g.,
electromagnets
in etch
equipment)
Magnetic
Field
Strength
(A/m or G)
(See
NOTES 1
and 2.)
0.02 mT
(200 mG)
0.1 mT
(1 G)
0.1 mT
(1 G)
See Sub radiofrequency Magnetic
Field Testing Method, but probe
is positioned as needed to
determine distance to 1 G
pacemaker criterion.
Radio-
frequency
Field
2
3 kHz to
100 kHz
(e.g., RF used
to generate
plasma)
Induced
current and
contact
current
(mA)
Frequency-
dependent:
180f (kHz) in mA
through both feet
90f through each
foot
90f for contact.
where f is in MHz
Frequency-
dependent:
400f (kHz) in mA
through both feet,
200f through each
foot
200f for contact.
where f is in MHz
NA Contact instrument vendor for
suitable instrument based on
frequency and emission
characteristics.
Measurement of induced and
contact currents for freq. < 100
MHz should be made when
approaching 20% of the
applicable electric field emission
limit.
SEMI S2-0703a
E
© SEMI 1991, 2004 45
Energy
Category
Physical
Quantity
Measured
(units)
Operator-
Accessible Limit
Maintenance-
and Service-
Accessible Limit
Pacemaker
Labeling
Level
Testing Methods
Radio-
frequency
Field
2
100 kHz to
100 MHz
(e.g., RF used
to generate
plasma)
Induced
current and
contact
current
(mA)
18 mA through
both feet
9 mA through each
foot
9 mA contact
40 mA through
both feet
20 mA through
each foot
20 mA contact
NA Contact instrument vendor for
suitable instrument based on
frequency and emission
characteristics.
Measurement of induced and
contact currents for freq. < 100
MHz should be made when
approaching 20% of the
applicable electric field emission
limit.
Radio-
frequency
Field
2
3 kHz to
300 MHz
(e.g., RF used
to generate
plasma)
Electric
Field
Strength
(V/m) (See
NOTE 1.)
Frequency
dependent (see
ANSI/IEEE
C95.1).
20% of
Uncontrolled limit
in Table 2 of
C95.1
Frequency
dependent (see
ANSI/IEEE
C95.1).
20% of
Controlled limit
in Table 1 of
C95.1
NA Use a diode rectifier or
displacement sensor at each
location (use three axis probe or
make three mutually orthogonal
measurements at each location).
Measurements should be made at
20 cm from the surface.
Radio-
frequency
Field
2
3 kHz to
300 MHz
(e.g., RF used
to generate
plasma)
Magnetic
Field
Strength
(A/m) (See
NOTES 1
and 2.)
Frequency
dependent (see
ANSI/IEEE
C95.1).
20% of
Uncontrolled limit
in Table 2 of
C95.1
Frequency
dependent (see
ANSI/IEEE
C95.1).
20% of
Controlled limit
in Table 1 of
C95.1
NA Use a coil sensor at each location
(use three axis probe or make
three mutually orthogonal
measurements at each location)
Measurements should be made at
20 cm of the surface.
Radio-
frequency
Fields
2
300 MHz to
300 GHz
(e.g., RF used
to generate
plasma)
Power
Density
(mW/cm
2
)
(See NOTE
1.)
Frequency
dependent (see
ANSI/IEEE
C95.1).
20% of
Uncontrolled limit
in Table 2 of
C95.1
Frequency
dependent (see
ANSI/IEEE
C95.1).
20% of
Controlled limit
in Table 1 of
C95.1
NA Use a diode rectifier or
thermocouple at each location
(use three axis probe or make
three mutually orthogonal
measurements at each location).
Measurements should be made at
20 cm of the surface.
NOTE 1: It is assumed that electric and magnetic fields exist separately at frequencies below 300 MHz. It is assumed that electric and magnetic
fields exist as a combined entity (electromagnetic radiation) at higher frequencies. Two evaluations are needed at frequencies <300 MHz and only
one (usually made by measuring the electric field) at higher frequencies.
NOTE 2: 1 gauss (G) 79.55 amperes per meter (A/m). 1 tesla (T) = 10,000 G, 1 millitesla (mT) = 10 G.
Table A5-2 Optical Energy
Optical Energy Physical Quantity
Measured
(units)
Access Limit Testing Methods
Infrared
Energy
1
700 nm to
1 mm
(e.g., heating
lamps)
Irradiance
W/m
2
(See NOTES 1, 2,
and 3.)
Radiance
W/m
2
- sr
Wavelength dependent
20% of the applicable
exposure limits.
(See Reference 1.)
Thermocouple, thermopile, pyroelectric, photoelectric
Direct measurements locating the maximum irradiance
and orientation of the energy at the closest approach to
the view port(s) or accessible leakage point(s).