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SEMI E49.5-0298 © SEMI 1995, 1998 3 Table 1 Summary of Recommended Specific ations Description Value Units Internal Surface Che mistry (AUGER) Surface chromiu m oxide enhan ced layer thickness at 1/2 peak height of measu…

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SEMI E49.5-0298 © SEMI 1995, 1998 2
6.7 Design should include a means of flow through
flushing and draining for removable components or
assemblies.
6.8 Pumping systems should include surge/pulse
suppression devices and provisions for vibration
isolation.
6.9 Supply and drain lines on a recirculation system
should be separated by an isolation valve. The system
should not use one line to perform both functions.
6.10 All filters should be able to be isolated from
process stream for maintenance.
6.11 Ball and needle type valves should not be used.
6.12 Backflow/back pressure protection should be
included in the system.
6.13 For processes requiring pressu re control,
regulators should be included in the system. Pressure
transducers and a means of pressure display should be
included on the equipment.
6.14 The systems should have a means of manifolding
supply and drain lines onboard, so that there is a single
point connection for each individual liquid.
7 Materials Guidelines
7.1 Material Mechanical Characte ristics - Stainless
Steel
7.1.1 All tubing greater than or equal to 1.27 cm (1/2
in.) diameter should conform to ASTM A 269.
7.1.2 Tubing less than 1.27 cm (1/2 in.) diameter
should conform to ASTM A 632.
7.1.3 All bar stock should conform to ASTM A 479.
7.1.4 All steel should conform to ASM UNS S31603
for chemical composition with the following
exceptions:
• Sulfur as reported by the SMTR ≤ 0.030%
• Carbon as reported by the SMTR ≤ 0.030%
7.2 Stainless steel should be 316L electropolished for
solvent system wetted flow streams.
7.3 Materials for valve seats, diaphragms, gaskets, and
O-rings should be chemically compatible to the process
gas.
7.4 Material Performance Guidelines
7.4.1 The performance guidelines below are SS
qualification values to be demonstrated by the original
component manufacturer. Semiconductor equipment
suppliers should provide proof that their components
conform to these requirements.
7.4.2 The performance tests should be considered
production qualification tests. It is the responsibility of
the component manufacturer to provide statistically
valid data which correlates their production tests to
these qualification tests (e.g., Statistical Process
Control, MIL-STD-105D).
7.4.3 The equipment supplier should be responsible
for maintaining and supplying, upon request,
documentation that proves their components meet the
user’s materials performance requirements.
SEMI E49.5-0298 © SEMI 1995, 19983
Table 1 Summary of Recommended Specifications
Description Value Units
Internal Surface Chemistry (AUGER)
Surface chromium oxide enhanced layer thickness at
1/2 peak height of measured oxygen signal level
For an example of a test method, see SEMASPEC 90120573B (AUGER)
≥ 15 Å
Internal Surface Chemistry (ESCA)
Total chromium to iron ratio including both reduced
and oxidized states
For an example of a test method, see SEMASPEC 90120403B (ESCA)
≥ 1.25:1 value
Internal Surface Chemistry (EDX)
Surface foreign elements, those elements not in the
Smelter’s Test Report (SMTR)
Test procedures per ASTM F 1375 (EDX)
0value
Internal Surface Defects
Photos per test method
Counts per photo
Test procedures per ASTM F 1372 (SEM)
5
≤ 50
value
value
Internal Surface Roughness
Average surface roughness
Roughness average (R
a
)
Maximum surface R
a
(individual reading)
For an example of a test method, see SEMASPEC 90120400B (Contact Profilometry)
≤ 0.25
(≤ 10)
≤ 0.38
(≤ 15)
µm
(µin.)
µm
(µin.)
Particulate Contribution
at ≥ 0.1 µm size
at ≥ 0.02 µm size
Test procedures per ASTM F 1394 (Particles)
≤ 0.71 (20)
≤ 2.6 (75)
ptc/L (ptc/ft
3
)
ptc/L (ptc/ft
3
)
Internal Absorbed Moisture
Time to recover to base line from a 2 ppm spike
for low surface area component (valve, regulator)
Time to recover to baseline from a 2 ppm spike
for high surface area component (filters, tubing)
Test procedures per ASTM F 1397
≤ 4
≤ 6
hour
hour
Total Anionic Contamination
Total anionic contamination added to test water
Individual anionic contaminant
Test procedures per ASTM D 4327 (Total Anions)
≤ 1
≤ 0.2
ppm
ppm
Leak Rate
Inboard leak rates for He
Outboard leak rates for He
Cross-seat leak rates for He
Test procedures per SEMI F1 (Leak Rate)
≤ 1 × 10
−9
≤ 1 × 10
−5
≤ 4 × 10
−8
scc/s
scc/s
scc/s
Cycle Life
Manual valves
High pressure automatic valves
Low pressure automatic valves
Test procedures per ASTM F 1373 (Cycle Life)
≥ 25 K
≥ 25 K
≥ 500 K
cycles
cycles
cycles
SEMI E49.5-0298 © SEMI 1995, 1998 4
8 Component Guidelines
8.1 For component leak rate and c ycle life
requirements, see Section 7.
8.2 Valves should be springless, packless, metal
diaphragm type with all metal bonnet seals.
8.3 Regulators should be threadless, packless type
with all metal bonnet seals.
8.4 Regulators and valve flow coefficient (C
v
) should
be selected based on liquid flow requirements and
liquid characteristics.
8.5 Mechanical fittings should be all metal face seal
type with solid nickel gaskets.
8.6 Pressure transducers should be used in place of
bourdon tube pressure gauges.
8.7 Filters should be PTFE media rated at 0.05 µm
pore size.
8.8 Check valves should be disk poppet type.
9 Subsystem Assembly Gui delines
See SEMI E49.6 for recommended SS system assembly
procedures.
10 Related Documents
10.1 SEMATECH Documents
3
SEMASPEC 90120400B — Test Method for
Determination of Surface Roughness by Contact
Profilometry for Gas Distribution System Components
SEMASPEC 90120403B — Test Method for XPS
Analysis of Surface Composition and Chemistry of
Electropolished Stainless Steel Tubing for Gas
Distribution System Components
SEMASPEC 90120573B — Test Method for AES
Analysis of Surface and Oxide Composition of
Electropolished Stainless Steel Tubing for Gas
Distribution System Components
3 SEMATECH, Technology Transfer Department, 2706 Montopolis
Drive, Austin, TX 78741
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