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SEMI C50-0699 © SEMI 1995, 1999 2 Table 1 Impurity Limits and Other Requirements f or Trimeth y lphosphite Previ ous SEMI Reference # C7.22 -95 Tier A (Guide line) Assay (P(CH 3 O) 3 ) 99.0% m in Color (APHA) 10 max Alum…
TRIMETHYLPHOSPHITE SEMI C50-0699 © SEMI 1995, 19991
SEMI C50-0699
GUIDELINE FOR TRIMETHYLPHOSPHITE
This guideline was technically approved by the Global Process Chemicals Committee and is the direct
responsibility of the North American Process Chemicals Committee. Current edition approved by the North
American Regional Standards Committee on April 23, 1999. Initially available on SEMI OnLine May 1999;
to be published June 1999. This document replaces SEMI C7.22 in its entirety. Originally published in
1995.
1 Purpose
1.1 The purpose of this document is to standardize
requirements for trimethylphosphite used in the
semiconductor industry and testing procedures to
support those standards. Test methods have been shown
to give statistically valid results. This document also
provides guidelines for grades of trimethylphosphite for
which a need has been identified. In the case of the
guidelines, the test methods may not have been
statistically validated yet.
2 Scope
2.1 The scope of this document is all grades of
trimethylphosphite used in the semiconductor industry.
3 Limitations
3.1 None.
4 Referenced Documents
4.1 None.
5 Terminology
5.1 None.
6 Physical Property (for information only)
Density at 20°C 1.05 g/mL
Boiling Point 112°C
7 Requirements
7.1 The requirements for trimethylphosphite for Tier
A are listed in Table 1.
8 Grade 1 Procedures
8.1 This section does not apply to this chemical.
9 Grade 2 Procedures
9.1 This section does not apply to this chemical.
10 Grade 3 Procedures
10.1 This section does not apply to this chemical.
11 Grade 4 Procedures
11.1 This section does not apply to this chemical.
12 Grade 5 Procedures
12.1 This section does not apply to this chemical.
13 VLSI Grade Procedures
13.1 This section does not apply to this chemical.
14 Tier A Procedures
14.1 Standardized test methods are being developed
for all parameters at the purity levels indicated. Until
standardized test methods are published, test
methodology shall be determined by user and supplier.
The Process Chemicals Committee considers a test
method to be valid only if there is a documented
recovery study showing a recovery of 75 - 125%.
Recovery is for a known sample spike at 50% of the
specified level.
15 Tier B Procedures
15.1 This section does not apply to this chemical.
16 Tier C Procedures
16.1 This section does not apply to this chemical.
17 Tier D Procedures
17.1 This section does not apply to this chemical.
SEMI C50-0699 © SEMI 1995, 1999 2
Table 1 Impurity Limits and Other Requirements for Trimethylphosphite
Previous SEMI Reference # C7.22-95
Tier A
(Guideline)
Assay (P(CH
3
O)
3
) 99.0% min
Color (APHA) 10 max
Aluminum (Al) 5 ppb max
Arsenic (As) 10 ppb max
Barium (Ba) 5 ppb max
Bismuth (Bi) 5 ppb max
Calcium (Ca) 5 ppb max
Chromium (Cr) 5 ppb max
Cobalt (Co) 5 ppb max
Copper (Cu) 5 ppb max
Gallium (Ga) 5 ppb max
Gold (Au) 5 ppb max
Iron (Fe) 5 ppb max
Lead (Pb) 5 ppb max
Lithium (Li) 5 ppb max
Magnesium (Mg) 5 ppb max
Manganese (Mn) 5 ppb max
Mercury (Hg) 5 ppb max
Nickel (Ni) 5 ppb max
Potassium (K) 5 ppb max
Silver (Ag) 5 ppb max
Sodium (Na) 15 ppb max
Strontium (Sr) 5 ppb max
Tin (Sn) 5 ppb max
Titanium (Ti) 5 ppb max
Zinc (Zn) 10 ppb max
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
XYLENES SEMI C51-0699 © SEMI 1978, 19991
SEMI C51-0699
SPECIFICATION FOR XYLENES
This specification was technically approved by the Global Process Chemicals Committee and is the direct
responsibility of the North American Process Chemicals Committee. Current edition approved by the North
American Regional Standards Committee on April 23, 1999. Initially available on SEMI OnLine May 1999;
to be published June 1999. This document replaces SEMI C1.21 in its entirety. Originally published in
1978.
1 Purpose
1.1 The purpose of this document is to standardize
requirements for xylenes used in the semiconductor
industry and testing procedures to support those
standards. Test methods have been shown to give
statistically valid results. This document also provides
guidelines for grades of xylenes for which a need has
been identified. In the case of the guidelines, the test
methods may not have been statistically validated yet.
2 Scope
2.1 The scope of this document is all grades of xylenes
used in the semiconductor industry.
2.2 This material is a mixture of ortho, meta, and para
isomers and ethylbenzene. Xylene (o-, m-, and p- iso-
mers and ethylbenzene) 99.0% min and Ethylbenzene
18% max.
3 Limitations
3.1 None.
4 Referenced Documents
SEMI C1 — Specifications for Reagents
5 Terminology
5.1 None.
6 Physical Property (for information only)
Density at 25°C 0.86 g/mL
Boiling Range 136 - 144°C
7 Requirements
7.1 The requirements for xylenes for Grade 1 are listed
in Table 1.
8 Grade 1 Procedures
8.1 Assay — Assay the sample by gas chromatography
(see SEMI C1, Section 3.1, Guidelines for Assay by
Wide Bore Gas Chromatography). The parameters cited
have given satisfactory results.
Column: 30 meter × 530 micron I.D. fused silica
capillary, coated with 5 micron film of DB-1 or
equivalent (100% methyl Silicone which has been
surface bonded and cross linked).
Column Temperature: 40°C isothermal for 5 minutes,
then programmed to 200°C at 10°C/min.
Injector Temperature: 175°C
Detector Temperature: 250°C
Sample Size: 0.2 µL splitless
Carrier Gas: Helium at 3 mL/min
Detector: Thermal Conductivity or
Flame Ionization
Approximate Retention
Times (min):
Toulene 14.4
Ethylbenzene 17.0
p-xylene 16.9
m-xylene 17.2
o-xylene 17.8
8.1.1 Measure the areas under all peaks by any
convenient means and calulate the concentration of all
components in area percent (see SEMI C.1, Section
3.11, Guidelines for Assay by Wide Bore Column Gas
Chromatography).
8.2 Color — Dilute 2.0 mL of platinum-cobalt stock
solution (APHA No. 500) to 100 mL with water.
Compare this standard (APHA No. 10) with 100 mL of
sample in Nessler tubes. View vertically over a white
background. The sample must be no darker than the
standard.
8.3 Acidity — To 25 mL of water in a glass-stoppered
flask, add 10 mL of sample and 0.1 mL of
phenolphthalein indicator solution. Add 0.01 N sodium
hydroxide until a slight pink color persists after shaking
for one-half minute. Add 38 mL (33 g) of the sample,
mix well, and titrate with 0.01 N sodium hydroxide
until the pink color is reproduced. Not more than 1.0
mL of the sodium hydroxide solution should be
required.
8.4 Residue After Evaporation — Evaporate 232 mL
(200 g) of sample to dryness. Dry at 105°C for 30
minutes, cool in a desiccator, and weigh (see SEMI C1,