semi合集-English.pdf - 第2999页
SEMI E120.1-0705 © SEMI 2004, 2005 13 ExecutionElement Type Figure 9 ModuleType 6.3.7 Subsystem => Su bsystemType 6.3.7.1 The Subsystem class is mapp ed to the XML SubsystemType. SubsystemType extends EquipmentElement…

SEMI E120.1-0705 © SEMI 2004, 2005 12
6.3.6 Module => ModuleType
6.3.6.1 The Module Class is mapped to the XML ModuleType. The ModuleType extends the
ExecutionElementType (see Figure 9). It is also a container for all of the components of the Module – Subsystems,
IODevices, MaterialLocations, and other Modules.
6.3.6.2 Table 8 shows how the attributes and associations of the Module class are mapped into XML. The
ModuleType contains the element ModuleComponents to act as a container. The XML elements listed in the table
are contained in ModuleComponents.
Table 8 Translation Table For Module Class
Attribute or Role
Name
UML Type
XML Element or Attribute
(or Reference)
XML Name/Type
element (used first time a Module
is defined in the system)
Modules: ModuleArrayType
modules aggregation
element (references a previously
defined Module)
ModuleRefs: ModuleRefArrayType
element (used first time a
Subsystem is defined in the
system)
Subsystems: SubsystemArrayType
subsystems aggregation
element (references a previously
defined Subsystem)
SubsystemRefs: SubsystemRefArrayType
element (used first time an
IODevice is defined in the system)
IODevices: IODeviceArrayType
iodevices aggregation
element (references a previously
defined IODevice)
IODeviceRefs: IODeviceRefArrayType
materialLocations composition element MaterialLocations: MaterialLocationArrayType

SEMI E120.1-0705 © SEMI 2004, 2005 13
ExecutionElement Type
Figure 9
ModuleType
6.3.7 Subsystem => SubsystemType
6.3.7.1 The Subsystem class is mapped to the XML SubsystemType. SubsystemType extends EquipmentElement
(see Figure 10). It is also a container for all of the components of the Subsystem – IODevices and other Subsystems.
6.3.7.2 Table 9 shows how the associations of the Subsystem class are mapped into XML. The SubsystemType
contains the element SubsystemComponents to act as a container. The XML elements listed in the table are
contained in SubsystemComponents.

SEMI E120.1-0705 © SEMI 2004, 2005 14
Table 9 Translation Table For Subsystem
Attribute or Role
Name
UML Type
XML Element or Attribute
(or Reference)
XML Name/Type
element (used first time a Subsystem is
defined in the system)
Subsystems: SubsystemArrayType
subsystems aggregation
element (references a previously
defined Subsystem)
SubsystemRefs: SubsystemRefArrayType
element (used first time an IODevice is
defined in the system)
IODevices: IODeviceArrayType
iodevices aggregation
element (references a previously
defined IODevice)
IODeviceNodeArrayType
materialLocations composition element
MaterialLocations:
MaterialLocationArrayType
Figure 10
SubsystemType
6.3.8 IODevice => IODeviceType
6.3.8.1 The IODevice class is mapped to the XML IODeviceType. IODeviceType defines no attributes or
navigable associations, but it does extend EquipmentElementType (see Figure 11). It is included in multiple
associations, but it cannot navigate any of them. Therefore, its translation table is empty.
Table 10 Translation Table For IODevice
Attribute or Role Name UML Type
XML Element or Attribute
(or Reference)
XML Name/Type
none