semi合集-English.pdf - 第3313页

SEMI E130-1104 © SEMI 2003, 2004 27 22.5 Restrict ion on t he Operator b y Control States 22.5.1 For the remote comm ands, the operator of the prober or the host is restri cted by the control states of the equipment. Tab…

100%1 / 7923
SEMI E130-1104 © SEMI 2003, 2004 26
22.4 Remote Commands and PSEM300 Process Model Mapping
22.4.1 Each remote command either can or cannot be executed depending on a state other than the control state.
22.4.2 The following table shows remote commands and the relationship between the PSEM300 process states to be
operated by these commands.
Table 9 Remote Command vs. Process State
UNLOAD-ALLSUBSTRATES
UNLOAD-SUBSTRATE
UNLOAD-TEST-SUBST
SET-CONTROL-MAP
SET-PROBE-CARD-ID
RESET-CONTROL-MAP
RESET-CONTACT-CNT
ONLINE-LOCAL
MOVE-TO-REF-DIE
MOVE-SUB-STEPS
MOVE-ABS
MOVE
LOCKOUT-CONTROL
LOAD-SUBSTRATE
LOAD-TEST-SUBST
INSPECT-PTP-ALIGNMENT
INSPECT-PROBES
INSPECT-INK-MARKS
INK-DIE
INK-DEVICE
INDEX
CLEAN-PROBES
PROCESSING STATE
IDLE O O O O O O
IDLE with ALARMS O O O O O
PROCESSING ACTIVE
…PROCESS
…SETTING UP
…EXECUTING
……AWAITING LOAD O O O O O O O O
……HANDLING MATERIAL
……SUBSTRATE LOADED
………AWAITING COMMAND O OOOOOOOOOOOOO O O O O OOOO
……… MOVING XYZ
………SERVICE TASK
…PROCESSING BLOCKED
O: Operation is allowed.
SEMI E130-1104 © SEMI 2003, 2004 27
22.5 Restriction on the Operator by Control States
22.5.1 For the remote commands, the operator of the prober or the host is restricted by the control states of the
equipment.
Table 10 Table of Restrictions on the Operator by Control States
Operator Host
Remote Commands
LOCAL REMOTE LOCAL REMOTE
CLEAN-PROBES O X X O
INDEX O X X O
INK-DEVICE O X X O
INK-DIE O X X O
INSPECT-INK-MARKS O X X O
INSPECT-PROBES O X X O
INSPECT- PTP-ALIGN O X X O
LOAD- TEST-SUBST O X X O
LOAD-SUBSTRATE O X X O
MOVE O X X O
MOVE-ABS O X X O
MOVE-SUB-STEPS O X X O
MOVE-TO-REF-DIE O X X O
UNLOAD-TEST-SUBST O X X O
RESET-CONTACT-CNT O O O O
RESET-CONTROL-MAP O X O O
SET-CONTROL X X X O
SET-PROBE-CARD-ID O O O O
SET-CONTROL-MAP O X O O
UNLOAD-SUBSTRATE O X X O
UNLOAD-ALLSUBSTRATES O X X O
ONLINE-LOCAL X X X O
O: Operation is allowed.
X: Operation is prohibited.
23 GEM Addition Request
23.1 The purpose of this section is to specify all GEM
addition requests that are required to support the
equipment of this class.
23.2
Requirements
23.2.1 GEM addition requests required of PSEM300
are as shown below:
Establish Communications,
Dynamic Event Report Configuration,
Variable Data Collection,
Status Data Collection,
Alarm Management,
Remote Control,
Equipment Constants,
Process Program Management,
Equipment Terminal Services,
Clock,
Spooling, and
Control (host-initiated).
SEMI E130-1104 © SEMI 2003, 2004 28
RELATED INFORMATION 1
NOTICE: This related information is not an official part of SEMI E130 and was derived from the work of the
originating task force. This related information was approved for publication by full letter ballot procedures on
September 3, 2003.
R1-1 Scenarios
R1-1.1 Scenario I – Complete Multiple Process Job Run
R1-1.1.1 Job Description
R1-1.1.1.1 A single carrier containing six wafers in two lots is processed as two separate Process Jobs. E90 state
transitions are omitted for the sake of clarity. See Section R1-1.2 for a description of the substrate tracking events.
CarrierId: “CarrierA”
Process Job 1: Id: PJ01 Slots 1-3 Substrate Ids: SubstPJ01.01, SubstPJ01.02, SubstPJ01.03
Process Job 2: Id: PJ02 Slots 23-25 Substrate Ids: SubstPJ02.01, SubstPJ02.02, SubstPJ02.03
Pre-Align Chuck
CarrierA
PJ02
PJ01
Figure R1-1
Processing Environment for Scenarios