semi合集-English.pdf - 第391页

SEMI E52-0703 © SEMI 1995, 2003 27 Code Gas Name Symbol Formula Synonym Ref 53 Nitrogen Trifluo ride NF3 NF 3 1 29 Ammonia NH3 NH 3 1 16 Nitric Oxide NO NO 2 26 Nitrogen Dioxid e NO2 NO 2 1 141 Nitrosyl Chlorid e NOCl NO…

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SEMI E52-0703 © SEMI 1995, 2003 26
Code Gas Name Symbol Formula Synonym Ref
37 Cyanogen Chloride ClCN ClCN 1
77 Chlorine Trifluoride ClF3 ClF
3
1
202 Chlorine Pentafluoride ClF5 ClF
5
2
201 Chlorine Dioxide ClO2 ClO
2
2
72 Perchloryl Fluoride ClO3F ClO
3
F 1
9 Carbon Monoxide CO CO 1
25 Carbon Dioxide CO2 CO
2
1
34 Carbonyl Sulfide COS COS 1
40 Carbon Disulfide CS2 CS
2
2
14 Deuterium D2 H
2
2
D2 2
18 Fluorine F2 F
2
1
217 Digermane Ge2H6 Ge
2
H
6
2
113 Germanium Tetrachloride GeCl4 GeCl
4
Tetrachlorogermane 2
99 Germanium Tetrafluoride GeF4 GeF
4
Tetrafluorogermane 2
43 Germane GeH4 GeH
4
1
7 Hydrogen H2 H
2
1
20 Water Vapor H2O H
2
O 2
22 Hydrogen Sulfide H2S H
2
S 1
23 Hydrogen Selenide H2Se H
2
Se 1
171 Sulfuric Acid H2SO4 H
2
SO
4
2
229 Hydrogen telluride H2Te H
2
Te 2
10 Hydrogen Bromide HBr HBr 1
11 Hydrogen Chloride HCl HCl 1
24 Hydrogen Cyanide HCN HCN 1
1 Helium He He 1
12 Hydrogen Fluoride HF HF 1
275 Hafnium Tetranitrate HfN4O12 Hf(NO
3
)
4
1
329 Mercury Hg Hg UN 2809 2
17 Hydrogen Iodide HI HI 1
269 Hydrazoic Acid HN3 HN
3
1
167 Nitric Acid HNO3 HNO
3
2
115 Iodine Pentafluoride IF5 IF
5
1
5 Krypton Kr Kr 1
124 Molybdenum Hexafluoride MoF6 MoF
6
2
13 Nitrogen N2 N
2
1
157 Tetrafluorohydrazine N2F4 F
2
NNF
2
Dinitrogen Tetrafluoride 1
50 Hydrazine N2H4 H
2
NNH
2
2
27 Nitrous Oxide N2O N
2
O 1
78 Nitrogen Trioxide N2O3 N
2
O
3
1
95 Nitrogen Tetroxide N2O4 N
2
O
4
Dinitrogenoxide 2
346 Niobium Pentachloride NbCl5 NbCl
5
3
350 Deuterium Ammonia ND3 ND
3
3
2 Neon Ne Ne 1
232 Difluoroamidogen NF2 NF
2
2
SEMI E52-0703 © SEMI 1995, 2003 27
Code Gas Name Symbol Formula Synonym Ref
53 Nitrogen Trifluoride NF3 NF
3
1
29 Ammonia NH3 NH
3
1
16 Nitric Oxide NO NO 2
26 Nitrogen Dioxide NO2 NO
2
1
141 Nitrosyl Chloride NOCl NOCl 1
15 Oxygen O2 O
2
1
30 Ozone O3 O
3
1
238 Oxygen Dichloride OCl2 OCl
2
2
41 Oxygen Difluoride OF2 OF
2
1
193 Phosphorus Trichloride PCL3 PCl
3
2
62 Phosphorus Trifluoride PF3 PF
3
1
143 Phosphorus Pentafluoride PF5 PF
5
1
31 Phosphine PH3 PH
3
1
102 Phosphorous Oxychloride POCl3 POCl
3
2
243 Rhenium Hexafluoride ReF6 ReF
6
2
3 Radon Rn Rn 2
189 Sulfur Monochloride S2Cl2 S
2
Cl
2
2
255 Tribromostibine SbBr3 SbBr
3
2
256 Trichlorostibine SbCl3 SbCl
3
2
245 Stibine SbH3 SbH
3
2
349 Diselenium Dichloride Se2Cl2 Se
2
Cl
2
3
325 Selenium hexafluoride SeF6 SeF
6
UN 2194; Selenium fluoride 2
86 Sulfur Tetrafluoride SF4 SF
4
1
110 Sulfur Hexafluoride SF6 SF
6
1
347 Disilabutane Si2C2H10 Si
2
C
2
H
10
3
97 Disilane Si2H6 Si
2
H
6
2
328 Trisilane Si3H8 Si
3
H
8
Silicopropane; Trisilicane; H
8
Si3 2
253 Tetrasilane Si4H10 Si
4
H
10
2
108 Silicon Tetrachloride SiCl4 SiCl
4
Tetrachlorosilane 2
244 Deuteriumsilane SiD4 SiH
2
4
2
88 Silicon Tetrafluoride SiF4 SiF
4
1
326 Disilane hexafluoride SiF6 SiF
6
F
6
Si
2
; Hexafluorodisilane 2
67 Dichlorosilane SiH2Cl2 SiH
2
Cl
2
1
134 Difluorosilane SiH2F2 SiH
2
F
2
10
205 Chlorosilane SiH3Cl SiH
3
Cl 2
327 Fluoro silane SiH3F SiH
3
F H
3
FSi 2
39 Silane SiH4 SiH
4
1
147 Trichlorosilane SiHCl3 SiHCl
3
5
261 Trifluorosilane SiHF3 SiHF
3
2
145 Tin Tetrachloride SnCl4 SnCl
4
Tetrachlorostannane 2
32 Sulfur Dioxide SO2 SO
2
1
87 Sulfuryl Fluoride SO2F2 SO
2
F
2
1
246 Sulfur Trioxide SO3 SO
3
2
159 Tritium T2 H
3
2
T2 2
SEMI E52-0703 © SEMI 1995, 2003 28
Code Gas Name Symbol Formula Synonym Ref
247 Tellurium Hexafluoride TeF6 TeF
6
2
114 Titanium Tetrachloride TiCl4 TiCl
4
2
254 Titanium Tetraiodide TiI4 TiI
4
2
123 Uranium Hexafluoride UF6 UF
6
2
121 Tungsten Hexafluoride WF6 WF
6
2
6 Xenon Xe Xe 1
324 Xenon difluoride XeF2 XeF
2
F
2
Xe; Xenon fluoride 2
330 Zinc Zn Zn UN 1383 2
90 Intentionally Left Blank
92 Intentionally Left Blank
175 Intentionally Left Blank
9 Mixed Gas Table Sorted by Code
Table 4 Mixed Gases Sorted by Code
MIXED GAS NAME SYMBOL CODE
15%PHOSPHINE/NITROGEN 15%PH3/N2 0500
5%PHOSPHINE/NITROGEN 5%PH3/N2 0501
20%SILANE/NITROGEN 20%SiH4/N2 0502
40%ARGON/TUNGSTEN HEXAFLUORIDE 40%Ar/WF6 0503
10%ARSINE/HYDROGEN 10%AsH3/H2 0504
40%OXYGEN/HEXAFLUOROETHANE(FREON-116) 40%O2/C2F6 0505
2%TRICHLOROETHANE/NITROGEN 2%C2H3Cl3/N2 0506
20%CARBON DIOXIDE/HYDROGEN 20%CO2/H2 0507
30%CARBON DIOXIDE/AIR 30%CO2/Air 0508
10%GERMANE/HYDROGEN 10%GeH4/H2 0509
5%HYDROGEN SELENIDE/HYDROGEN 5%H2Se/H2 0510
10%HYDROGEN SELENIDE/HYDROGEN 10%H2Se/H2 0511
13%HYDROGEN CHLORIDE/1.32%XENON/NEON 13%HCI/1.32%Xe/Ne 0512
20%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 20%O2/CF4 0513
1%PHOSPHINE/NITROGEN 1%PH3/N2 0514
1.6%PHOSPHINE/21%SILANE/ARGON 1.6%PH3/21%SiH4/Ar 0515
10%PHOSPHINE/HYDROGEN 10%PH3/H2 0516
25%PHOSPHINE/SILANE 25%PH3/SiH4 0517
50%PHOSPHINE/NITROGEN 50%PH3/N2 0518
15%SILANE/NITROGEN 15%SiH4/N2 0519
21%SILANE/4%PHOSPHINE/ARGON 21%SiH4/4%PH3/Ar 0520
50%SILANE/HELIUM 50%SiH4/He 0521
20%TRICHLOROSILANE/HYDROGEN 20%SiHCI3/H2 0522
5%TETRAETHYLORTHOSILICATE(TEOS)/NITROGEN 5%Si(C2H5O)4/N2 0523
5%TRIETHYLANTIMONY(TESb)/HYDROGEN 5%(C2H5)3Sb/H2 0524
20%TRIMETHYLALUMINUM(TMAI)/HYDROGEN 20%(CH3)3AI/H2 0525
1%TRIMETHYLBORATE(TMB)/HYDROGEN 1%(CH3O)3B/H2 0526
10%PHOSPHINE/NITROGEN 10%PH3/N2 0527