semi合集-English.pdf - 第905页
SEMI E117-1104 © SEMI 2002, 2004 7 Option 1 Option 2 Option 3 Reserv ed space for overhead transport of boxes Figure 4 Reticle Load Port Options
SEMI E117-1104 © SEMI 2002, 2004 6
D
250
bilateral reference plane facial reference plane
RSP footprint
C1
75
equipment boundary above H1
load face
plane
C2
50
C2
50
C1
75
horizontal reference plane
bilateral reference plane
(reticle
centroid)
equipment
boundary
above H1
C1
75
RSP
H1 60
Figure 3
Exclusion Volumes at Horizontal Reference Plane of Reticle Load Port
SEMI E117-1104 © SEMI 2002, 2004 7
Option 1
Option 2
Option 3
Reserved
space for
overhead
transport of
boxes
Figure 4
Reticle Load Port Options
SEMI E117-1104 © SEMI 2002, 2004 8
RELATED INFORMATION 1
APPLICATION NOTES
NOTICE: This related information is not an official part of SEMI E117 and was derived from current industry
knowledge. This related information is to be approved for publication by full letter ballot procedure.
NOTICE: This related information is not meant to modify or supersede SEMI E117 in any way. Rather, these notes
are provided primarily as a source of information to aid in the application of the standard. As such, they are to be
considered as reference material only. The standard should be referred to in all cases.
R1-1 Application Notes
R1-1.1 Compliance with This Standard — It is the device makers’ expectation that suppliers of production
equipment are ultimately responsible for ensuring that their equipment (as installed in the device makers’ facility)
complies with this standard. This expectation is the same whether the reticle load port is developed internally by the
equipment supplier or is purchased from a third party source. In either case, the production equipment supplier is
responsible for understanding all of the requirements contained in this standard. Full compliance with this standard
can only be determined after the reticle load port is integrated with the equipment and can be directly affected by
production equipment design features (such as user interfaces and light towers).
R1-1.2 To prevent interference between transport systems on the same or adjacent load ports, it is recommended
that floor-based transport vehicles and over-head hoist vehicles not exceed clearances C1 and C2 when picking up or
placing a RSP on the load port.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
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