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SEMI E102-0600 © SEMI 2000 2 Manufacturing Execution S ystem (MES) as a s eparate logical s o ftware en ti ty. An A MHS i s made up of th e AMHS Framew or k, the system controllers for AMHS equipment (the software) and t…

SEMI E102-0600 © SEMI 20001

SEMI E102-0600

PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK MATERIAL

TRANSPORT AND STORAGE COMPONENT

This provisional specification was technically approved by the Global Information and Control Committee

and is the direct responsibility of the Japanese Information and Control Committee. Current edition approved

by the Japanese Regional Standards Committee on March 14, 2000 and by the North American Regional

Standards Committee on March 2, 2000. Initially available at www.semi.org March 2000; to be published

June 2000.

1 Purpose

1.1 Wafer fabrication factories will require the

baseline capabilities of stocker storage and interbay

transport. In addition to these baseline capabilities,

intrabay transport will be added as a result of

ergonomic and safety requirements brought about by

the increased size and weight of 300 mm wafer carriers.

These stocker, interbay transport, and intrabay transport

systems will be required to be fully integrated with each

other and the factory Manufacturing Execution System

(MES) in order to realize the full vision of cost

effective automated material transport to and from

production equipment.

1.2 A baseline requirement of Automated Material

Handling System (AMHS) equipment is efficient

integration with the factory MES. Therefore, the

purpose of this specification is to enable cost effective

integration of interoperable AMHS systems, as

illustrated in Figure 1. Manufacturers require a SEMI

standard which specifies the visible behavior of the

AMHS Integration system and its interface to the

factory MES. The purpose of this standard is to specify

these interfaces and the interactions between MES and

AMHS systems as a part of the CIM Framework. While

the term AMHS is commonly used to refer to a wide

range of equipment and systems that support automated

material handling, the CIM Framework specifies a

software component called “Material Transport and

Storage Component (MTSC)” which represents the

standard interface of the MES to the complete suite of

AMHS capabilities.

2 Scope

2.1 This specification provides the common interfaces

required by Manufacturing Execution Systems for

runtime interactions between the factory (as represented

by other CIM Framework components) and the

Material Tracking and Storage Component. Some

interfaces supporting configuration and tracking of the

material transport and storage equipment are the

responsibility of the Equipment Tracking and

Maintenance component of the CIM Framework. These

interfaces are complementary to the interfaces of

Transport Machines and Storage Machines presented in

this specification.

2.2 The responsibilities of the Material Transport and

Storage Component include interfaces that

• Support scheduling of material transport and

processing by predicting time for material delivery

to specific locations. NOTE: The interfaces for

delivery time prediction are deferred as one of the

deficiencies noted in this provisional specification.

• Execute and monitor transport jobs to move

material to specific locations.

• Validate that the job can be done: the material

is available, the destination is reachable and

has available storage or loadport capacity, and

there are sufficient material movement

resources (cars, storage space, etc.) to

implement the job.

• Request operations from AMHS equipment

controllers to enact internal material move-

ment and storage actions. Implementations of

the Material Transport and Storage Compo-

nent will use lower level standards such as

IBSEM and StockerSEM for communication

with equipment that performs the physical

movement and storage actions.

• Collect and record data on transport job

execution and history.

• Capture, record, interpret, and respond to

equipment events and fault detection.

• Generate MES-level job status events and

material location change events.

• Record and report on material locations and

material transport histories for material in the

system.

• Interact with machine and port interfaces for

material hand-off handshake protocols.

2.3 Automated Material Handling Systems (AMHS’s)

are an important part of any semiconductor factory and

have, typically, been implemented and integrated with a

SEMI E102-0600 © SEMI 2000 2

Manufacturing Execution System (MES) as a separate

logical software entity. An AMHS is made up of the

AMHS Framework, the system controllers for AMHS

equipment (the software) and the transport and storage

machines (the hardware). In keeping with this tradition,

the CIM Framework views the AMHS as a “black box”

where the interface into that system is visible, but the

inner workings and control of that system is the

responsibility of the AMHS supplier and not in the

domain of the MES. The CIM Framework specifies the

Material Transport and Storage Component (MTSC) as

the MES level interface to AMHS capabilities.

2.4 This specification does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this specification to

establish appropriate safety and health practices and

determine the applicability of regulatory limitations

prior to use.

E81 – CIM Framework

Domain Architecture

E96 – CIM Framework

Technical Architecture

Global Declarations and Abstract Interfaces

Factory Services

Factory Operations

Product Management

Specification

Production Machine

Equipment Tracking and

Maintenance

Advanced Process Control

Scheduling

Factory Labor

Material Transport & Storage

Interbay Transport

System Controller

Stocker

System Controller

Intrabay Transport

System Controller

Intrabay Transport

Equipment

Stocker

Equipment

Interbay Transport

Equipment

nteroperable AMHS Equipmen

IBSEM

Stocker SEM

IBSEM

E84

Production

Equipment

SECS,GEM

AMHS

Framework

Durables Management

Figure 1

AMHS Environment

SEMI E102-0600 © SEMI 20003

3 Limitations

3.1 The Material Transport and Storage Component

provides AMHS Framework level interfaces to

interoperable AMHS Equipment. This level of material

transport is factory level movement, i.e., the transport

of product and durables between machines, areas or

material tracking locations. The Material Tracking and

Storage Component does not provide interfaces that

make material movement within machines visible.

3.2 Provisional Status — This specification is

designated as provisional due to known areas that need

to be completed. The following items summarize the

deficiencies of the provisional specification to be

addressed before a subsequent ballot to upgrade it to

full standard status.

3.2.1 Dependence on Global Declarations and

Abstract Interfaces — Components of this document

reference global declarations and specialize abstract

interfaces for material, resource and job concepts. The

provisional specification for these declarations and

interfaces was balloted and recommended by the SEMI

Information and Control Committee in July, 1999.

When this specification is published a revision will be

undertaken to clearly define the relationship of this

specification to those common elements of the CIM

Framework.

3.2.2 Dependence on Durables Management

Component — The Material Transport and Storage

Component depends upon interfaces specified as part of

the Durables Management Component of the CIM

Framework. This document includes only the required

interfaces from Durables Management. Those

interfaces, found in Section 6.2.3, will be removed from

this document when the Durables Management

Component of the CIM Framework is adopted in a

future ballot.

3.2.3 Dependence on Machine Abstract Interface

Group — The Material Transport and Storage

Component depends upon interfaces specified as part of

the Machine Abstract Interface Group (Machine AIG)

of the CIM Framework. This document includes only

the required interfaces from the Machine AIG. Those

interfaces, found in Section 6.2.4, will be removed from

this document when the Machine AIG of the CIM

Framework is adopted in a future ballot.

3.2.4 Dependence on Factory Operations Component

— The Material Transport and Storage Component

depends upon interfaces specified as part of the Factory

Operations Component of the CIM Framework. This

document includes only the required interfaces from the

Factory Operations Component. Those interfaces,

found in Section 6.2.5, will be removed from this

document when the Factory Operations Component of

the CIM Framework is adopted in a future ballot.

3.2.5 Deterministic Prediction of Transport Time —

The responsibility for providing estimates of predicted

transport time of future TransportJobs in a deterministic

way is beyond the scope of the Provisional

Specification. This capability may be offered in future

upgrades of this specification based on added

experience with such predictions. It may be found that

heuristic methods for transport time prediction are the

most practical way to provide such estimates.

4 Referenced Standards

4.1 SEMI Documents

SEMI E81 — Provisional Specification for CIM

Framework Domain Architecture

4.2 Other Documents

ISO/IEC International Standard 14750 (also ITU-T

Recommendation X.920): Information Technology –

Open Distributed Processing – Interface Definition

Language

UML Notation Guide, Version 1.1, document number

ad/97-08-05, Object Management Group

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 AMHS — Automated Material Handling System

5.1.2 MTSC — Material Transport and Storage

Component

6 Requirements

6.1 The following sections specify the interfaces that

comprise the Material Transport and Storage

Component of the CIM Framework. Additionally, the

subsets of interfaces from Durables Management,

Machine Abstract Interface Group, and Factory

Operations required to support Material Transport and

Storage are included here pending future ballots that

will address the full scope of these other specifications.

6.1.1 Figure 2 illustrates the context of the Material

Transport and Storage Component within the CIM

Framework. The Factory Operation component

requests the transport of material by the Material

Transport Manager which provides services for creation

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2 UML Notation Guide v1.1 is available to the general public at

http://www.omg.org/cgi-bin/doclist.pl, +1-508-820 4300, Object

Management Group, Inc. , Framingham Corporate Center, 492 Old

Connecticut Path, Framingham, MA 01701.