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SEMI E127-0705 © SEMI 2003, 2005 6 5.2.5 inspection module, n. — a measurement m odule that inspects substrates and reports info rmation regardi ng anomalies. Inspection modules may deter mine the location of anomalies r…

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SEMI E127-0705 © SEMI 2003, 2005 5
SEMI E32 — Material Movement Management (MMM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E40 — Standard for Processing Management
SEMI E41 — Exception Management (EM) Standard
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E53 — Event Reporting
SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior,
and Services
SEMI E90 — Specification for Substrate Tracking
SEMI E98 — Provisional Standard for the Object-Based Equipment Model (OBEM)
SEMI E116 — Provisional Specification for Equipment Performance Tracking
SEMI E120 — Provisional Specification for the Common Equipment Model (CEM)
SEMI M20 — Specification for Establishing a Wafer Coordinate System
4.2 Other Sources
Unified Modeling Language (UML) Specification, Version 1.4, OMG Specification 01-09-67, available from
http://www.omg.org/technology/documents/modeling_spec_catalog.htm.
uuid: ISO/IEC 11578:1996 Information technology - Open Systems Interconnection – Remote Procedure Call
(RPC),
http://www.iso.ch/cate/d2229.htm.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
NOTE 1: Terms defined in §5 that are used in other definitions have been underlined
.
5.1 Abbreviations and Acronyms
5.1.1 IMM — Integrated Measurement Module
5.1.2 IMMC — Specification for Integrated Measurement Module Communications: Concepts, Behavior, and
Services
5.1.3 IMMDTOSM — IMM Data Table Object State Model
5.1.4 SLOSM — Substrate Location Object State Model (SEMI E90)
5.1.5 STPO — Substrate Transfer Path Object, an abstraction of the IMM capability to load and unload substrates
into the IMM.
5.1.6 STPOSM — Substrate Transfer Path Object State Model
5.2 Definitions
5.2.1 array, n. — an ordered list of numeric values. A valid data type for table row entries.
5.2.2 conversion recipe, n. — a recipe or portion of a recipe that describes the steps required for taking
measurement data and reporting a result. This does not need to be a physically separate recipe.
5.2.3 error message, n. — a notification to the user/client that an error has occurred. It may or may not be
associated with an alarm. Note: depending upon the communication protocol, error messages may or may not be
treated differently from normal collection events.
5.2.4 inspection, n. — an examination of an area of material to detect anomalies.
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5.2.5 inspection module, n. — a measurement module that inspects substrates and reports information regarding
anomalies. Inspection modules may determine the location of anomalies relative to a coordinate system and may
also provide other types of data related to the anomaly.
5.2.6 integrated measurement module, n. — a measurement module intended to be integrated into manufacturing
equipment, and with the capability of receiving substrates from the equipment, measuring those substrates, and
returning the substrates and the measurement results to the equipment and other concerned clients.
5.2.7 measurement module, n. — an equipment module whose intended function is to measure or inspect the
product and to report the results. Measurement of the product is the factory’s means of gaining feedback on the
manufacturing process.
5.2.8 measurement recipe, n. — a recipe or portion of a recipe intended for use during a measurement, that
describes among other things the locations for measurement. This does not need to be a physically separate recipe.
5.2.9 metrology module, n. — a measurement module that collects and reports information on specific
predetermined locations or features on a substrate with consistent data structure, or reports general information
about the entire substrate.
5.2.10 object-based, adj. — a programming language, or database, is called object-based if it supports the concept
of data abstraction, but partly or entirely lacks more advanced concepts such as class, inheritance, polymorphism,
and so on. [Oestereich, Bernd, “Developing Software with UML,” Addison-Wesley (1999)]
5.2.11 substrate context information, n. — information concerning the substrate that may be useful to for analysis,
such as process flow step, substrate orientation, the identifier of the process equipment/chamber most likely to have
affected results, the recipe run on that equipment/chamber, etc.
5.2.12 substrate orientation, n. — the angle of rotation from normal. For wafers, this is the angle of rotation from
the primary fiducial.
6 Conventions
6.1 Object Conventions
6.1.1 This document conforms to the conventions for objects established by SEMI E39, including object diagrams,
object terminology, and requirements for standardized objects. However, the notation used for object diagrams is
the Universal Modeling Language (UML) notation (see ¶4.2 for additional detail).
6.1.2 Formal Name of an Object — The text capitalizes formal object name references, similar to the way
capitalization is normally used when discussing entities. When describing something in the general (like cities)
lower case is used, but when a specific entity is of interest (New York City), then first letters are capitalized. Where
words are concatenated, they retain their capitalization to enhance readability.
6.1.3 Object Attributes — Attribute tables define those public attributes that can be read and set through the basic
OSS services GetAttr and SetAttr. Simple attributes have a single data type as their value. Complex or compound
attributes are made up of an ordered set of other elements, either a list or a structure. See SEMI Compilation of
Terms for the definition of “form” for both the list of valid data type formats and for the different types of formats
themselves.
6.1.4 Attribute Definitions — Attributes are formally defined in an attribute definition table with the following
form:
Attribute Name Definition Access Reqd Form
The formal name of the
attribute.
Defines the requirements of the
attribute.
RO or RW Reqd or
Optional
Data type: see SEMI E39 ¶4.5.
Complex attributes must declare the
order of their components.
6.1.5 Complex Attribute Data — The individual data items of Complex attributes are defined in a separate Attribute
Definition Table as individual attributes. However, these data items are not Attributes and the SEMI E39 GetAttr
and SetAttr services are not valid for them.
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6.1.6 Lists of Data — Lists of data shall be identified as 0+ when a null list is permitted. Otherwise, they shall be
identified as 1+.
6.2 State Model Conventions
6.2.1 This document uses the Harel state chart convention for describing dynamic operation of defined objects. The
outline of this convention is described in an attachment of SEMI E30. The official definition of this convention is
described in “State charts: A Visual Formalism for Complex Systems” written by D. Harel in Science of Computer
Programming 8, 1987.
6.2.2 The Harel convention has no concepts of “creation” and “extinction” for expressing the state model of a
temporary entity. The “job” described in this document is such an entity, and a copy of the same state model is used
for an independent job newly created. In this document, a circle with a black circle inside is used for expressing
extinction of an entity. A filled black circle denotes the entry to the state model (the entity creation). This is the
convention used in the OMT notation as well.
6.2.3 Transition tables are provided in conjunction with the state diagrams to explicitly describe the nature of each
state transition as shown in the state model diagram. A transition table contains columns for Transition number,
Previous State, Trigger, New State, Actions, and Comments. The “trigger” (column 3) for the transition occurs
while in the “previous” state. The “actions” (column 5) includes a combination of:
1. Actions taken upon exit of the previous state.
2. Actions taken upon entry of the new state.
3. Actions taken which are most closely associated with the transition.
No differentiation is made between these cases.
# Previous State Trigger New State Actions Comments
6.2.4 State models are referred to in the Event Variables tables as an acronym consisting of the first letters of the
state model name, ending in “SM” for State Model. Specific transitions with the state model are represented with
the state model acronym plus “-Tn”, where n represents the number of the transition. State model transitions
without numbers are not expected to be reported.
6.3 Service Message Representation
6.3.1 Services are functions or methods that may be provided by either the equipment or the host. A service
message may be either a request message, which always requires a response, or a notification message, which does
not require a response.
6.3.2 Service Definition Table — A service definition table defines the specific set of messages for a given service
resource, as shown in the following table:
Message Service Name Type Description
6.3.2.1 Type can be either “N” = Notification or “R” = Request & Response.
6.3.2.2 Notification type messages are initiated by the service provider (e.g., the equipment) and the provider does
not expect to get a response from the service user. Request messages are initiated by a service user (e.g., the host).
Request messages ask for data or an activity from the provider. Request messages expect a specific response
message (no presumption on the message content).
6.3.3 Service Parameter Dictionary — A service parameter dictionary table defines the description, format and its
possible value for parameters used by services, as shown in the table below. A row is provided in the table for each
parameter of a service. See SEMI Compilation of Terms for the definition of “form” for both the list of valid data
type formats and for the different types of these formats.