semi合集-English.pdf - 第2075页
SEMI E54.10-0600 © SEMI 2 000 20 Data Inde x Source Object I D Source Attr ibut e ID Descr iption N ≤ 1024 (See NOTE 1.) ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N Valu e NOTE 1: “N ” is the valu e of the Sen sor-A I-Coun …
SEMI E54.10-0600 © SEMI 200019
Table 23 Assembly-ISPM #1 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #1
Value
3 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #2
Value
. ISPMD16 SaiA16 Sensor-AI-Counter #3 to Sensor-AI-Counter-ISPM #N-1
Value
N≤1024
(See NOTE 1.)
ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N
Value
NOTE 1: “N” is the value of the Sensor-AI-Counter object attribute “Number of Bins”. Note also that the number of bins reported in an assembly
is fixed throughout the life of the device, and is specified by the manufacturer.
Table 24 Assembly-ISPM #2 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 ISPMD2 SacA65 SAC
Number of Bins
3 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #1
Value
4 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #2
Value
. ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #3 to Sensor-AI-Counter-ISPM #N-1
Value
N≤1024
(See NOTE 1.)
ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N
Value
NOTE 1: “N” is the value of the Sensor-AI-Counter object attribute “Number of Bins”. Note also that the number of bins reported in an assembly
is fixed throughout the life of the device, and is specified by the manufacturer.
Table 25 Assembly-ISPM #3 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 ISPMD3 SaiA16 Sensor-AI-LCS
Value (Laser Current Diagnostic)
3 ISPMD4 SaiA16 Sensor-AI-SLS
Value (Stray Light Diagnostic)
4 ISPMD5 SaiA16 Sensor-AI-MNS
Value (Median Noise Diagnostic)
5 – – Reserved (2 bytes)
6 ISPMD2 SacA65 SAC
Number of Bins
7 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #1
Value
8 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #2
Value
. ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #3 to Sensor-AI-Counter-ISPM #N-1
Value
SEMI E54.10-0600 © SEMI 2000 20
Data Index Source Object ID Source Attribute ID Description
N ≤ 1024
(See NOTE 1.)
ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N
Value
NOTE 1: “N” is the value of the Sensor-AI-Counter object attribute “Number of Bins”. Note also that the number of bins reported in an assembly
is fixed throughout the life of the device, and is specified by the manufacturer.
Table 26 Assembly-ISPM #4 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 DM1 A35 Device Manager
Tool State
3 DM1 A41 Device Manager
Time Stamp
4 ISPMD2 SacA67 SAC
Duration
6 ISPMD2 SacA65 Sensor-AI-Counter
Number of Bins
7 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #1
Value
8 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #2
Value
. ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #3 to Sensor-AI-Counter-ISPM #N-1
Value
N ≤ 1024
(See NOTE 1.)
ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N
Value
NOTE 1: “N” is the value of the Sensor-AI-Counter object attribute “Number of Bins”. Note also that the number of bins reported in an assembly
is fixed throughout the life of the device, and is specified by the manufacturer.
Table 27 Assembly-ISPM #5 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 DM1 A35 Device Manager
Tool State
3 DM1 A41 Device Manager
Time Stamp
4 ISPMD2 SacA67 SAC
Duration
5 ISPMD3 SaiA16 Sensor-AI-LCS
Value (Laser Current Diagnostic)
6 ISPMD4 SaiA16 Sensor-AI-SLS
Value (Stray Light Diagnostic)
7 ISPMD5 SaiA16 Sensor-AI-MNS
Value (Median Noise Diagnostic)
8 – – Reserved (2 bytes)
9 ISPMD2 SacA65 SAC
Number of Bins
10 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #1
Value
11 ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #2
Value
SEMI E54.10-0600 © SEMI 200021
Data Index Source Object ID Source Attribute ID Description
. ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #3 to Sensor-AI-Counter-ISPM #N-1
Value
N ≤ 1024*
ISPMD16 SaiA16 Sensor-AI-Counter-ISPM #N
Value
NOTE 1: “N” is the value of the Sensor-AI-Counter object attribute “Number of Bins”. Note also that the number of bins reported in an assembly
is fixed throughout the life of the device, and is specified by the manufacturer.
Table 28 Assembly-ISPM #6 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
Table 29 Assembly-ISPM #7 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 DM1 A13 Device Manager
Exception Detail Alarm
Table 30 Assembly-ISPM #8 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 DM1 A14 Device Manager
Exception Detail Warning
Table 31 Assembly-ISPM #9 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 DM1 A13 Device Manager
Exception Detail Alarm
3 DM1 A14 Device Manager
Exception Detail Warning
Table 32 Assembly-ISPM #40 Object Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A33 Device Manager
Gain
2 DM1 A13 Device Manager
Filter Bandwidth
3 ISPMD2 SacA65 SAC
Number of Bins
4 ISPMD3 SaiA73 Sensor-AI-LCS
Alarm Trip Point High (See NOTE 1.)
5 ISPMD3 SaiA76 Sensor-AI-LCS