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SEMI E88-1104 E © SEMI 1999, 2004 26 Table 10 Alarm ID, Alarm Set/Cleared Event Table Alarm ID (ALID) Alarm SET Event (CEID set ) Alarm CLEARED Event (CEID cleared ) 12 Remote Commands 12.1 The purpose of this section is…

SEMI E88-1104

Variable Name Type Description Class Format Comments

ZoneCapacity

CV Available capacity (in

carriers) of a particular

zone.

SV U2 Example: If a stocker zone can

store 100 carriers and 25 of the

locations are currently occupied,

then the ZoneCapacity is 75.

ZoneData CV Information associated

with a particular zone.

DVVAL L,2

1. <ZoneName>

2. <ZoneCapacity>

ZoneData

CV Information associated

with a particular zone.

SV L,2

1. <ZoneName

2. <ZoneCapacity

ZoneName CV Alphanumeric name of a

particular zone.

DVVAL A[1–64]

ZoneName

CV Alphanumeric name of a

particular zone.

SV A[1–64]

ZoneSize

CV Size (in carriers) of a

particular zone.

SV U2 The physical size of the zone.

ZoneType

CV Type of the Zone. SV U2 1: Shelf

2: Port

3: Other

11 Alarm List

11.1 Since each model of Stocker SEM equipment differs in configuration, it is not practical to provide an

exhaustive list of all possible alarms. Instead, the Stocker SEM is requiring the two tables provided as described in

SEMI E30 (Section 8.4). Alarm List Table which is intended to provide for equipment configuration specific alarms

and Alarm ID, Alarm Set/Cleared Event Table. Any alarm that is displayed locally at the equipment, if enabled, is

required to be sent to the host. To be compliant, Tables 9 and 10 must be completed by the supplier, documenting

all alarms.

11.2 Alarm List Table

11.2.1 The alarm list table contains examples of alarms that pertain to various configuration aspects of equipment.

These examples are intended to illustrate that alarms pertain to situations in which there exists a potential for

exceeding physical safety limits associated with people, equipment, and material being transported as per the SEMI

E30 definition of an alarm. See SEMI E30 for further reference. The supplier is responsible for supplying

documentation associated with these alarm definitions. Each alarm will have an associated alarm text (ALTX) and

alarm identifier (ALID). Table 9 contains an example of alarm list information that is intended to be augmented

when the Stocker SEM equipment supplier documents their interface. Examples highlighted by (*) are required by

Stocker SEM.

Table 9 Alarm List Table

Danger Affected

Equipment Cfg. Alarm Text ALID

Potential Imminent Operator Equipment Material

Stocker stocker unit error* X X X

handoff error* X X X X

database error* X X

11.3 Alarm ID, Alarm Set/Cleared Event Table

11.3.1 The Alarm ID, Alarm Set/Cleared Event table documents the association of each ALID to a set and cleared

event as required by SEMI E30. See SEMI E30 for further reference. The supplier is responsible for supplying

documentation associated with these alarm definitions. Each alarm will have associated alarm set and cleared

collection event identifiers (CEID

set

and CEID

clear

SEMI E88-1104

Table 10 Alarm ID, Alarm Set/Cleared Event Table

Alarm ID (ALID) Alarm SET Event (CEID

set

) Alarm CLEARED Event (CEID

cleared

)

12 Remote Commands

12.1 The purpose of this section is to identify remote

commands, command parameters, and valid commands

versus states pertinent to the Stocker SEM.

12.2 A. Requirements

 The equipment shall support the SEMI E30

(according to the GEM capabilities required per

Section 13) required remote commands.

 All the remote commands defined by Stocker SEM

are required to be implemented as specified.

 The alphanumeric strings defined by Stocker SEM

for RCMD and CPNAME are required.

 A completed table must be generated where an “X”

is placed in the table for each state that a given

command is valid.

 If additional remote commands are supported then

a “remote commands versus valid states” matrix

must be generated for these additional commands.

 For additional commands, a table must be

generated similar to the remote command

descriptions summary.

12.3 Remote Commands Description

12.3.1 ABORT — This command terminates the

activity of a specific TRANSFER command based on

CommandID while the command is in the ACTIVE

state. This command might not be accepted due to

mechanical issues if the stocker is in a specific con-

dition (e.g., moving a carrier). The exact conditions

surrounding when the ABORT command is not ac-

cepted by the SC must be documented by the Stocker

SEM equipment supplier. If accepted, this command

shall clear any error condition that was generated by the

TRANSFER command being aborted. For example, if

a ‘DestOccupied’ or ‘SourceEmpty’ error had occurred,

the error shall be cleared.

12.3.2 CANCEL — This command terminates the

activity of a specific TRANSFER command based on

CommandID while the command is in the QUEUED

state. This command must always be accepted by the

SC when in the QUEUED state.

12.3.3 INSTALL — This is used to update the SC

database by adding a specified CarrierID record to a

specified CarrierLoc. If the CarrierID specified by the

Host is already in the SC database then the additional

fields will be updated based on the information

contained in this command.

12.3.4 LOCATE — This command is used by the Host

to query the SC for database carrier information.

12.3.5 PAUSE — This command puts the SC in the

PAUSING state.

12.3.6 REMOVE — This is used to update the SC

database by deleting a specified carrier. This command

would be used for database recovery.

12.3.7 RESUME — This command puts the SC in the

AUTO state.

12.3.8 RETRY (Supplier Option) — This command

may be used by the Host when an error is encountered

by the stocker. The Host would use this command to

allow the stocker to retry the movement which gener-

ated the error condition. This command shall clear the

error condition that is being addressed by the command.

12.3.9 TRANSFER — This is a SECS-II Enhanced

Remote Command instead of a SECS-II Host

Command Send (S2,F49 instead of S2,F41). See the

examples in Section 15.1 for details.

12.3.10 This command is used to perform the entire

transfer command for the carrier to be transferred

between stocker locations. The execution of this com-

mand will include allocation of resources, acquiring the

carrier, moving the carrier to the destination, queuing

the carrier at an alternate destination (if needed),

depositing the carrier, and returning the resources for

other use. The number of carriers in the TRANSFER

command is always equal to one (i.e., the size of the

transfer unit is always equal to one carrier).

12.3.11 INFOUPDATE — This is used to associate

information with a carrier while in the SC database.

This command is an optional feature and is not required

for compliance. If this command is not supported, then

a HCACK of ‘1’ (Command does not exist ) shall be

returned. If the carrier does not exist in the SC

database, then a HCACK of ‘3’ (At least one parameter

is invalid) shall be returned.

SEMI E88-1104

12.3.12 Remote Commands and Associated Host Command Parameters

12.3.12.1 This table describes the allowable command parameters (CPNAME) for each remote command

(RCMD). Equipment shall support all parameters. The column marked Req/Opt, specifies which parameters are

required to be sent by the host and which parameters may be optionally sent by the host.

Table 11 Allowable Command Parameters

Parameters

Remote

Command

Cpname Req/Opt Comment

ABORT “COMMANDID” R Must specify the commandID that was used for the TRANSFER command

that is being ABORT’ed.

CANCEL “COMMANDID” R Must specify the commandID that was used for the TRANSFER command

that is being CANCEL’ed.

INSTALL “CARRIERID”

“CARRIERLOC”

“CARRIERID”

“ZONENAME”

“CARRIERLOC”

SC will check its database and return the carrier information to the Host

with a single ‘CarrierLocateCompleted’ event for all relevant carriers. If

the Host issues the LOCATE command with CARRIERID then SC returns

information associated with the carrier specified by the Host.

If the Host issues the LOCATE command with ZONENAME or

CARRIERLOC, all carrier information in the specified area (ZONENAME

or CARRIERLOC) will be returned.

If the Host issues the LOCATE command without a Cpname, all carrier

information in the SC database will be returned.

LOCATE

“COMMANDID” O

Unique Command Identifier for the LOCATE command. It does not have

a relationship to the CommandId of a TRANSFER command.

PAUSE None N/A Once received by the SC, the SC will queue any TRANSFER commands

until the SC receives and successfully executes the RESUME command.

Once in the AUTO state the SC will process the TRANSFER commands in

its queue.

REMOVE “CARRIERID” R

RESUME None N/A Returns the PAUSEd SC to the AUTO state.

RETRY

Supplier Option

“ERRORNUMBER” R Since more than one error can occur for the same TRANSFER command,

an ERRORNUMBER must be used to identify the ERRORNUMBER to

which to apply the RETRY.

TRANSFER “COMMANDINFO”

“TRANSFERINFO”

INFOUPDATE “CARRIERID”

“hostDefined”

The “HostDefined” cpnames are used to indicate the name of the data that

is to be associated with a carrier. See Section 13 for example scenarios.

The data associated with a carrier is for display purposes only and

information such as the carrier’s current location and state cannot be

changed with this command.

12.3.13 Host Command Parameters Name and Values

Table 12 Host Command Parameters CPNAMES

Parameter Value

Cpname

Description Range Format

CARRIERID Unique ID of the carrier.

A[164]

CARRIERLOC Unique carrier location within the stocker.

A[164]

COMMANDID Unique command identifier created by the Host.

A[164]