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SEMI E109-0305 © SEMI 2001, 2005 28 provided by the h ost by either the Bin d, PodNo tification, ReticleTransfer Job, Proce edWithPod, or Mo veReticle Services or if the equi pment has m eans of determining the attribute…

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SEMI E109-0305 © SEMI 2001, 2005 27
successfully reads the ReticleID from the reticle pod tag, or when the equipment successfully reads the ReticleID
from the reticle itself. A reticle is instantiated by reticle pod tag read or ReticleID read only if there are no currently
existing objects with the ReticleID just read. A reticle object can also be instantiated by either the ProceedWithPod
or CancelPod Services when these services contain the content map. A Reticle can be instantiated by the
MoveReticle Service if the ReticleID(s) provided by the service have not been previously instantiated.
14.2.2 From the host point of view, an object is instantiated if the host is able to query the equipment about that
object, it's current state, and other attributes. Once instantiated, the object is considered destroyed (no longer
instantiated) if the response to such queries is “unknown object”.
14.2.3 Summary of possible reticle object instantiation methods:
1. Bind, ReticleTransferJob, or PodNotification Service that contains the content map attribute;
2. PodID tag read containing the content map with no currently existing reticle objects having the ReticleID just
read from the pod tag;
3. ReticleID read with no currently existing reticle objects having the ReticleID just read from the ReticleID read;
4. ProceedWithPod or CancelPod Service containing the content map attribute; and
5. MoveReticle
Service when the reticle is not previously instantiated.
14.2.4 Reticle Object Identifier (ObjID)
14.2.4.1 The purpose of an Object Identifier is to allow references to an object within the system. The object
identifier is created when an object is instantiated and should be unchanged or persistent until the end of the object
lifecycle. The Object Identifier shall be unique at the equipment during lifecycle of the object. The ReticleID is the
Reticle Object Identifier. The equipment is responsible for ensuring uniqueness of the ReticleID prior to
instantiation by the bind, PodNotification, ReticleTransferJob, or MoveReticle
service.
14.2.5 Reticle Object Destruction
14.2.5.1 Normally, the Reticle Object reaches the end of its lifecycle when the reticle pod containing the reticle is
unloaded from the equipment. Abnormally, the Reticle Object reaches the end of its lifecycle when a CancelBind,
CancelReticleTransferJob, or
CancelPodNotification service (if the original Bind, ReticleTransferJob, or
PodNotification service contained the contentmap) is executed prior to the reticle
pod being loaded, when a
CancelMoveReticle service is executed prior to reticle removal from the reticle pod (if the reticle was instantiated
using the MoveReticle command), when an equipment based pod verification fails following reticle pod and reticle
instantiation by the bind service, ReticleTransferJob, or reticle pod tag read.
14.2.5.2 Summary of reticle object destruction:
1. A reticle pod is unloaded from the equipment;
2. A CancelBind, CancelReticleTransferJob, or CancelPodNotification service that contained the content map is
received;
3. An equipment based verification fails (after the object has been instantiated via the bind, ReticleTransferJob
service, or reticle pod tag read);
4. A CancelMoveReticle service is executed prior to reticle removal from the reticle pod (when the content map
has not been provided by other service or reticle pod tag read); and
5.
Manual removal of the physical reticle.
14.3 Reticle Attribute Definitions
14.3.1 The following table contains the attributes that are of importance to the host and/or the equipment in order to
manage the history and the reports about the reticle object.
14.3.2 REQD Column
14.3.2.1 All attributes in the following table are required to be associated with the reticle object. However only the
attributes marked with a “Y” in the REQD column are always required to be maintained and updated by the
equipment. The attributes marked with an “N” in the REQD column are only required to be maintained if they are
SEMI E109-0305 © SEMI 2001, 2005 28
provided by the host by either the Bind, PodNotification, ReticleTransferJob, ProceedWithPod, or MoveReticle
Services or if the equipment has means of determining the attribute values. (for example, if the equipment has a
ReticleID reader, the equipment can determine the ContentMap).
14.3.3 ACCESS Column
14.3.3.1 Even though a value may be marked as RO (read only), the initial value for the attribute may be provided
by the host when attached to either the Bind, PodNotification, ReticleTransferJob or ProceedWithPod services. The
only other time the PodCapacityStatus attributes are updated is at the first ProceedWithPod service.
Table 12 Reticle Attribute Definition
Attribute Name Definition Access Reqd Form
ObjType Object type. RO Y Text equal to “Reticle”.
ObjID Object identifier. RO Y Text 1 to 80 characters equal to the ReticleID.
# of Exposures Count of the number of exposures
since the reticle was loaded to the
equipment.
RO Y Non negative integer.
QualificationInterval-
Time
The amount of time (in minutes)
allowed between equipment
inspections of a reticle. If this time
is exceeded, the reticle state must
transition to REJECTED.
RW Y 52
Qualification-
TerminationTime
The actual time if when a qualified
reticle will expire and the reticle
state must transition to rejected.
RO Y 20
ReticleStatus Current state of the Reticle. RO Y Enumerated: RETICLE NOT PRESENT,
WAITING QUALIFICATION, READING
ID, QUALIFIED, IN USE, REJECTED,
RETICLE WAITING FOR HOST,
PARTICLE INSPECTION.
ReticleAllocationStatus The current allocation state of the
reticle by the equipment. The
current substate of the Reticle
Allocation state model.
RO Y Enumerated:
NOT ALLOCATED, ALLOCATED.
ReticleLocationID The specific location of the reticle. RO Y Enumerated:
Equipment dependent text.
Example locations: Inspection position,
ReticleID read position, storage location 1.
Reticle type The type of reticle. RO Y Enumerated:
Equipment dependent text.
Example subtypes: phase shift, binary.
14.4 Reticle State Model
14.4.1 The purpose of the Reticle State Model is to define the host’s view of a reticle. The equipment shall
maintain a separate and independent state model for each reticle.
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14.4.2 Reticle State Model Diagram
RETICLE STATE
RETICLE AT
EQUIPMENT
RETICLE NOT PRESENT
3
UNQUALIFIED RETICLE
4
8
RETICLE QUALIFICATION
QUALIFIED RETICLE
REJECTED
QUALIFIED
IN USE
20
22
1
2
13
WAITING
QUALIFICATION
18 19
11
10
21
6
PARTICLE
INSPECTION
15
RETICLE ID VERIFICATION
9
14
7
5
READING ID
RETICLE
WAITING FOR
HOST
16
17
Figure 7
Reticle State Model Diagram
14.4.3 Reticle State Definition
14.4.3.1 RETICLE NOT PRESENT This is a subset of RETICLE STATE and is active when the reticle is not
present on the Equipment. The reticle has been instantiated with a Bind, PodNotification, ReticleTransferJob, or
MoveReticle service.
14.4.3.2 RETICLE AT EQUIPMENT This is a subset of RETICLE STATE and is active when the reticle is
present. The reticle is physically present on the Equipment. There are two substates, UNQUALIFIED RETICLE
and QUALIFIED RETICLE.
14.4.3.2.1 UNQUALIFIED RETICLE
This is a substate of RETICLE AT EQUIPMENT and is active when the
reticle is physically present but not QUALIFIED. There are three substates, WAITING QUALIFICATION,
RETICLE QUALIFICATION, AND REJECTED.
14.4.3.2.1.1 WAITING QUALIFICATION This is a substate of UNQUALIFED RETICLE and is active when
the reticle is waiting to be selected for qualification. The physical ReticleID is not read in this state.
14.4.3.2.1.2 REJECTED This is a substate of UNQUALIFIED RETICLE and is active when the reticle did not
pass the qualification(s) due to an unexpected ReticleID or poor inspection results. The operator or the host
(depending on the control mode) will have to decide if the reticle must be re-qualified or removed from the
equipment.
14.4.3.2.1.3 RETICLE QUALIFICATION This is a substate of UNQUALIFIED RETICLE and is active when
the reticle is being qualified for production. The ReticleID is being read from the ReticleID and/or a reticle
inspection for particles is being performed. There are two substates: RETICLE ID VERIFICATION and
PARTICLE INSPECTION.