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SEMI F4-1000 © SEMI 1990 , 2000 1 SEMI F4-1000 SPECIFICA TION FOR PNEUM A TIC A LLY ACTUATED CYLINDER VALVES This spe cification was te chnically approve d by the Global Fa cilities Comm ittee and is the direc t responsi…

SEMI F3-94 © SEMI 1990, 2003 6

APPENDIX 2

HEXAVALENT CHROMIUM

ALERT

NOTE: This related information is not an official part of this

SEMI guide and is not intended to modify or supercede the

official guide. It has been derived from the cited document.

Publication was authorized by full letter ballot procedures.

Determination of the suitability of the material is solely the

responsibility of the user.

A2-1 General

A2-1.1 Hexavalent chromium, which is given off when

stainless steel is welded, causes lung cancer in humans.

For information about hexavalent chromium, refer to

HESIS Hazard Alert, June 1992, Hazard Evaluation

System & Information Service, California Occupational

Health Program, 2151 Berkeley Way, Annex 11, Third

Floor, Berkeley, CA 94704.

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproductio

of the contents in whole or in part is forbidden without express writte

consent of SEMI.

SEMI F4-1000 © SEMI 1990, 20001

SEMI F4-1000

SPECIFICATION FOR PNEUMATICALLY ACTUATED CYLINDER

VALVES

This specification was technically approved by the Global Facilities Committee and is the direct

responsibility of the North American Facilites Committee. Current edition approved by the North American

Regional Standards Committee on August 28, 2000. Initially available on SEMI OnLine September 2000; to

be published October 2000. Originally published in 1990; previously published February 2000.

1 Purpose

1.1 This specification establishes t he minimum design

and performance requirements for pneumatically

actuated cylinder valves used in semiconductor

manufacturing. It is also intended as an aid in the

procurement of these valves.

2 Scope

2.1 This specification applies to pn eumatically

actuated valves for use on cylinders containing gases

used in semiconductor manufacturing facilities and in

comparable research and development areas.

2.2 This specification does not pur port to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this specification to

establish appropriate safety and health practices and

determine the applicability of regulatory limitations

prior to use.

3 Limitations

3.1 This specification is not a repl acement for safety

regulations. It is the responsibility of the user to ensure

that pneumatically actuated cylinder valves comply

with all applicable safety regulations.

3.2 This specification excludes design or performance

requirements for any electrically operated devices used

in conjunction with, or as a replacement for, pneumatic

actuators.

4 Referenced Standards

4.1 SEMI Standards

SEMI F1 — Specification for Leak Integrity of High-

Purity Gas Piping Systems and Components

SEMI F19 — Specification for the Finish of the Wetted

Surfaces of Electropolished 316L Stainless Steel

Components

SEMI F20 — Specification for 316L Stainless Steel

Bar, Extruded Shapes, Plate and Investment Castings

for Components Used in High Purity Semiconductor

Manufacturing Applications

SEMI F32



Test Method for Determination of Flow

Coefficient for High Purity Shutoff Valves

SEMI S5 — Safety Guideline for Flow Limiting

Devices

4.2 ASME Document

B1.1 — Unified Inch Screw Threads (UN and UNR

Thread Form)

4.3 CGA Standards

CGA G-4.1 — Cleaning Equipment for Oxygen Service

CGA S-1.1 — Pressure Relief Device Standards - Part

1 - Cylinders for Compressed Gases

CGA S-7 — Method for Selecting Pressure Relief

Devices for Compressed Gas Mixtures for Cylinders

CGA V-1 — Compressed Gas Cylinder Valve Outlet

and Inlet Connections

CGA V-9



Compressed Gas Association Standard for

Compressed Gas Cylinder Valves

4.4 ISO Standards

ISO 68 — General Purpose Screw Threads - Basic

Profile

ISO 261 — General Purpose Metric Screw Threads -

General Plan

4.5 US Code of Federal Regulations

Title 49 CFR, Parts 100–199 —Transportation

NOTE 1: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

5 Terminology

5.1 Definitions

5.1.1 burst pressure — a pressure at which rupture or

uncontrolled leakage of one or more of the pressure

retaining components of the device occurs.

1 American Society of Mechanical Engineers, 345 East 47th Street,

New York, NY 10017

2 Compressed Gas Association, Inc., 1725 Jefferson Davis Highway,

Suite 1004, Arlington, VA 22202

3 International Organization for Standardization, Case Postale 56,

Geneve 20, CH-1211, Switzerland

4 Department of Transportation, Superintendent of Documents, U.S.

Government Printing Office, Mail Stop: SSOP, Washington, D.C.

20402-9328

SEMI F4-1000 © SEMI 1990, 2000 2

5.1.2 cylinder — a pressure vessel designed for

pressures higher than 276 kPa (40 psia), having a

circular cross-section, and a maximum water capacity

of less than 454 kg (1,000 lbs.). It does not include a

portable tank, multi-unit tank car tank, cargo tank, or

tank car.

5.1.3 cylinder valve — a mechanica l device attached

to a compressed gas cylinder that permits flow into or

out of the cylinder when the device is in the open

position and prevents flow when in the closed position.

5.1.4 disconnect shutoff — a device, which will not

permit the flow of gas through an open cylinder valve

without attachment to an outlet connector.

5.1.5 flow coefficient (Cv) — a num eric constant used

to characterize the flow capacity of a valve.

5.1.6 manual locking device — a device used to

prevent the cylinder valve from opening during

transportation or service.

5.1.7 manual override — a device u sed for opening

the cylinder valve manually.

5.1.8 normal temperature — a temp erature of 21°C ±

6°C (70°F ± 10°F).

5.1.9 normally closed — a design in which the

cylinder valve closure member automatically assumes

the closed position upon loss of compressed gas to the

actuator.

5.1.10 packless valve — a valve with a diaphragm or

bellows stem seal instead of a packing or O-ring seal at

the stem.

5.1.11 pneumatic actuator — a devic e which converts

compressed gas pressure into mechanical motion and

force to move the cylinder valve closure member.

5.1.12 proof pressure — a pressure g reater than the

cylinder valve’s rated pressure that the cylinder valve

can withstand without impairing its ability to meet the

leak rate limits specified in SEMI F1 upon return to

rated pressure.

5.1.13 rated pressure — the pressure at which the

cylinder valve can meet the performance and

qualification requirements of this specification. Rated

pressure shall be specified by the manufacturer.

5.1.14 valve closure member — that part of the cylin-

der valve which is positioned in the flow stream to per-

mit or obstruct flow, depending on its closure position.

5.1.15 wetted surface — surface with in the interior of

the cylinder valve, which is in contact with the

controlled gas. The surface in contact with the gas used

to actuate the cylinder valve is not, for the purpose of

this specification, considered a “wetted surface”.

6 Design Requirements

6.1 General — Components not covered by this

specification or CGA Standards shall be constructed

such that they do not compromise the safety,

substantiality, and durability of the valve or actuator.

6.2 Configuration — The cylinder valve shall be a

packless valve design with a normally closed actuator.

6.3 Size — The cylinder valve and actuator shall be of

a design size which permits the use of a protective

transportation cover which satisfies the requirements of

49 CFR Section 173.40(d)(2).

6.4 Materials — Ferrous materials used for the wetted

surfaces shall be per SEMI F20. Other materials may be

supplied to satisfy specific material or performance

requirements, provided they are compatible with the gas

service.

6.5 Inlet — The inlet of the cylind er valve shall have

tapered external threads as specified by CGA V-1 or

other recognized governmental or industry standards for

the connection of cylinder valves to gas cylinders.

6.6 Outlet — The outlet of the cylinder valve shall

conform to a CGA 630/710 series connection in

accordance with CGA V-1 or other recognized

governmental or industry standards for the outlet

connections of gas cylinder valves.

6.7 Actuator Pressure — The actuating pressure

required to open the cylinder valve fully shall not

exceed 550 kPa (gauge) (80 psig).

6.8 Manual Override — A manual override shall be

supplied.

6.9 Vents — Vent hole(s) for mass spectrometer

helium leak testing shall be supplied at appropriate

locations.

6.10 Internal Volume — The wetted surfaces should

be configured, and the internal volume minimized, to

enhance the efficacy of purging.

6.11 Particle Control — The design should minimize

accumulation and generation of particles.

6.12 Threaded Fasteners — Thread ed fasteners used

in the covers, housings, casings, and any external

mounting brackets shall have threads conforming to, as

applicable, the ASME B1.1, ISO 68, or ISO 261

standards.

6.13 Cleanliness — The cylinder valve and actuator

shall be cleaned, as a minimum, per CGA Standard G-

4.1.