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SEMI E5-1104 © SEMI 1982, 2004 23 Name Format Description Values Where Used LRACK 10 Link Report Acknowledge Code, 1 byte 0 = Accepted 1 = Denied. Insufficient space 2 = Denied. Invalid format 3 = Denied. At least one CE…

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SEMI E5-1104 © SEMI 1982, 2004 22
Name Format Description Values Where Used
LIMITID 10 The identifier of a specific
limit in the set of limits (as
defined by UPPERDB and
LOWERDB) for a variable to
which the corresponding limit
attributes refer, 1 byte.
S2F45, F46,
F48
LIMITMAX 11, 20,
3(), 4(),
5()
The maximum allowed value
for the limit values of a
specific variable. The
equipment manufacturer
should specify this value,
which would typically
coincide with the maximum
value of the variable being
monitored. The format must
match that of the referenced
variable.
S2F48
LIMITMIN 11, 20,
3(), 4(),
5()
The minimum allowed value
for the limit values of a
specific variable. The
equipment manufacturer
should specify this value,
which would typically
coincide with the minimum
value of the variable being
monitored. The format must
match that of the referenced
variable.
S2F48
LINKID 54 Used to link a completion
message with a request that
an operation be performed.
LINKID is set to the value of
RMOPID in the initial
request except for the last
completion message to be
sent, where it is set to zero.
S6F25;
S14F20, F21;
S15F22, F30
LLIM 3(), 4(),
5()
Lower limit for numeric
value
S7F22
LOC 10 Machine material location
code, 1 byte
S2F27;
S3F2
LOCID 20 The logical identifier of a
material location.
S3F29, F31
LOWERDB 11, 20,
3(), 4(),
5()
A variable limit attribute
which defines the lower
boundary of the deadband of
a limit. The value applies to
a single limit (LIMITID) for a
specified VID. Thus,
UPPERDB and LOWERDB
as a pair define a limit.
S2F45, F48
SEMI E5-1104 © SEMI 1982, 2004 23
Name Format Description Values Where Used
LRACK 10 Link Report Acknowledge
Code, 1 byte
0 = Accepted
1 = Denied. Insufficient space
2 = Denied. Invalid format
3 = Denied. At least one CEID
link already defined
4 = Denied. At least one CEID
does not exist
5 = Denied. At least one RPTID
does not exist
>5 = Other errors
6-63 Reserved
S2F36
LVACK 10 Variable limit definition
acknowledge code, 1 byte.
Defines the error with the
limit attributes for the
referenceVID.
1 = Variable does not exist
2 = Variable has no limits
capability
3 = Variable repeated in
message
4 = Limit value error as
described in LIMITACK
5-63 Reserved
S2F46
MAPER 10 Map Error
0 = ID not found
1 = Invalid Data
2 = Format Error
>2 = Invalid error
3-63 Reserved
S12F19
MAPFT 10 Map data format type
0 = Row format
1 = Array format
2 = Coordinate format
>2 = Error
3-63 Reserved
S12F3, F5
MCINDEX 5() Identifier used to link a
handoff command message
with its eventual completion
message. Corresponding
messages carry the same
value for this data item.
S4F31, F33
MDACK 10 Map data acknowledge
0 = Map received
1 = Format error
2 = No ID match
3 = Abort/discard map
>3 = Error
4-63 Reserved
S12F8, F10,
F12
MDLN 20 Equipment Model Type, 6
bytes max
Same data as returned by S1,F2
S1F2, F13, F14;
S7F22, F23,
F26, F31, F39,
F43
MEXP 20 Message expected in the form
SxxFyy where x is stream and
y is function
S9F13
SEMI E5-1104 © SEMI 1982, 2004 24
Name Format Description Values Where Used
MF 10, 20 Material format code 1 byte
by Format 10
Items with format 10 will be
encoded as follows:
1 = Quantities in wafers
2 = Quantities in cassette
3 = Quantities in die or chips
4 = Quantities in boats
5 = Quantities in ingots
6 = Quantities in leadframes
7 = Quantities in lots
8 = Quantities in magazines
9 = Quantities in packages
10 = Quantities in plates
11 = Quantities in tubes
12 = Quantities in waterframes
13 = Quantities in carriers
14 = Quantities in substrates
15-63 Reserved
Items with format 20 will be a
unit identifier for one of the
special SECS generic units, as
specified in Section 12.
S3F2, F4, F5,
F7;
S16F11, F13,
F15
MHEAD 10 SECS message block header
associated with message
block in error
S9F1, F3, F5,
F7, F11
MID 10, 20 Material ID
80 Characters maximum
S2F27;
S3F2, F4, F7,
F9, F12, F13;
S4F1, F3, F5,
F7, F9, F11,
F13, F15, F17;
S7F7, F8, F10,
F11, F13, F35,
F36;
S12F1, F3, F4,
F5, F7, F9, F11,
F13, F14, F15,
F16, F17, F18;
S16F11, F13,
F15;
S18F10, F11
MIDAC 10 Material ID Acknowledge
Code, 1 byte
0 = Accepted
1 = Invalid port number
2 = Material is not present at
identified port
>2 = Error
3-63 Reserved
S3F14
MIDRA 10 Material ID Acknowledge
Code, 1 byte
0 = Acknowledge, MID follows
1 = Acknowledge, will not send
MID
2 = Acknowledge, will send MID
later in S3F13
3-63 Reserved
S3F12
MLCL 5() Message length
Defined by message size in
(bytes)
S12F4, F5