semi合集-English.pdf - 第1461页

SEMI 30.1-0200 © SEMI 1998, 2000 36 14.3 PP-SEL ECT Remote Comman d S cenario COMMENT HOST EQUIPMENT COMMENT The equipment is in the IDLE processing state and in the ONLINE REMOTE control state. Host sends a TABLE-DEF S1…

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SEMI 30.1-0200 © SEMI 1998, 200035
14.2 PP-UPDATE Remote Command Scenario — Host issues the PP-UPDATE remote command.
COMMENT HOST EQUIPMENT COMMENT
START S2,F41-->
<--S2,F42 Positive Acknowledge.
<--S6,F11 READY -> LOAD
Positive Acknowledge. S6,F12-->
[WHILE] Not End of Run
1) LOAD -> WORKING
2) WORKING -> UNLOAD
3) UNLOAD -> LOAD
[END WHILE]
Sometime during the [WHILE]:
PAUSE S2,F41-->
<--S2,F42 Positive Acknowledge.
<--S6,F11 Transition to PAUSING
Positive Acknowledge. S6,F12-->
<--S6,F11 PAUSING -> PAUSED
Positive Acknowledge. S6,F12-->
PP-UPDATE S2,F49-->
<--S2,F50 Positive Acknowledge.
<--S6,F11 PAUSED -> CHECKING
Positive Acknowledge. S6,F12-->
<--S6,F11 CEID is posted.
[IF] the updates are valid:
Return to the previous
process state through
history.
[ELSE]
Return to the PAUSED state.
The Process program remains
unchanged.
[ENDIF]
Positive Acknowledge. S6,F12-->
SEMI 30.1-0200 © SEMI 1998, 2000 36
14.3 PP-SELECT Remote Command Scenario
COMMENT HOST EQUIPMENT COMMENT
The equipment is in the IDLE
processing state and in the
ONLINE REMOTE control state.
Host sends a TABLE-DEF S13,F13-->
to the equipment.(See Section 11.)
<--S13,F14 Table Data Acknowledge
Host sends more tables S13,F13-->
if needed.
<--S13,F14 Table Data Acknowledge
Host prepares the remote
command to initiate an
inspection run, including
the “TABLE-AREA-DEF”,
”TABLE-ALIGN-DEF”, and
”ELEMENTLIST”, if required.
Host sends a PP-SELECT S2,F49-->
command specifying a
”CARRIERBLD”.
<--S2,F50 Command Acknowledge
The equipment transitions
from IDLE to SETTING UP to
READY.
START S2,F41-->
<--S2,F42 Host Command Acknowledge
READY -> LOAD.
[WHILE] Not End of Run
LOAD -> WORKING
WORKING -> UNLOAD
UNLOAD -> LOAD
[END WHILE]
LOAD -> STOPPING
<--S13,F13 Equipment sends anomaly table
with additional data,
including the table name
using Table Data Send
command.
Table Data Acknowledge S13,F14-->
The equipment transitions
from STOPPING to IDLE.
SEMI 30.1-0200 © SEMI 1998, 200037
14.4 Event Report and ISEM Table Transfer Command Scenario
COMMENT HOST EQUIPMENT COMMENT
The equipment is in the IDLE
processing state and in the
ONLINE REMOTE control state.
Host defines report S2,F33-->
with AnomalyTableName
and AnomalyTableType
<--S2,F34 Define Report Acknowledge
Link report to S2,F35-->
RunDataComplete event
<--S2,F36 Link Event Report Acknowledge
Enable event S2,F37-->
<--S2,F38 Enable Event Acknowledge
Host sends an ISEM S13,F13-->
table to the equipment.
<--S13,F14 Table Data Acknowledge
Host sends more tables S13,F13-->
if needed.
<--S13,F14 Table Data Acknowledge
Host sends a PP-SELECT S2,F49-->
command specifying a
”CARRIERBLD” <--S2,F50 Remote Command Acknowledge
The equipment transitions
from IDLE -> SETTING UP ->
READY.
START S2,F41-->
<--S2,F42 Host Command Acknowledge
READY -> LOAD.
[WHILE] Not End of Run
LOAD -> WORKING
WORKING -> UNLOAD
UNLOAD -> LOAD
[END WHILE]
LOAD -> STOPPING
STOPPING -> IDLE
<--S6,F11 RunDataComplete event with
AnomalyTableName and
AnomalyTableType.
Event Report Acknowledge S6,F12-->
Host sends Table S13,F15-->
DataRequest
<--S13,F16 Equipment sends requested
table TBLACK=0ifno
errors.