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SEMI E98-1102 © SEMI 2000, 2002 37 Parameter Definition Form ObjSpec Object s pecifier of targ et object. An empty string im plies Equipment is the target. Formatted text. See SEMI E39 for restrictions. ProcessCapability…

SEMI E98-1102 © SEMI 2000, 2002 36

11.13 Operations Management — This section

specifies the requirements related to operations,

including processing.

11.14 Recipe Execution — As a type of

EquipmentModule, Equipment providing temporary

recipe storage and recipe execution capabilities shall

comply to the fundamental requirements for the

Execution Recipe and Recipe Executor as specified in

SEMI E42.

11.15 Recipe Management — Equipment providing

long-term storage of recipes shall comply with the

fundamental requirements for the Managed Recipe and

either the Recipe Namespace with its Recipe

Namespace Manager, or the Distributed Recipe

Namespace Segment, for all recipes stored, as specified

in SEMI E42.

12 OBEM Service Definitions

12.1 This section defines the content of service

messages specified in this document and provided by

OBEM objects. The services are described in previous

sections. This section details the parameters for each

message.

12.2 Table 17 lists the services defined in this section.

Services of Type “R” are asynchronous requests that

require a response. Services of Type N are notifications

and do not require a response.

12.3 OBEM compliant equipment is required to

understand all service requests. However, if the service

is not marked as required, then support for the service

itself (the operations) is optional for the equipment, and

a response of “request denied” may be returned.

12.4 Services are listed in alphabetical order.

Table 17 List of Services

Operation Description Type Reqd

Abort Directs an object to immediately stop all activity as soon as it is safe to do so. R Y

AddElement Add a type of AbstractEquipmentElement. R N

AddProcessCapability Add a process capability. R Y

ChangeService Set an AbstractEquipmentElement in service or out of service. R N

Cleanup Directs Equipment to return all substrates to their carriers. R N

GetDateTime Returns the current date and time. R Y

GetProgramDirectory Returns the list of identifiers of Sensor Programs stored by the specified

Sensor/ActuatorDevice.

R N

Pause Directs an object to temporarily stop its activity as soon as it is at a point where

it is safe to the process to do so.

R Y

RemoveProcessCapability Remove a process capability from the list. R Y

RemoveElement Remove an element added by the user. R Y

Resume Directs a paused object to resume its activity. R Y

SelectProgram Provides an EquipmentIODevice Program identifier to be selected and executed. R N

SetDateTime Provides current date and time for setting the equipment Clock. R Y

Shutdown Prepare for powerdown. R N

Start Directs an object to begin an activity that has been set up. R N

Startup Prepare for standby for processing. R N

Stop Directs an object to stop an activity in progress by completing work already

started and not beginning new work.

R Y

12.5 Service Parameter Definitions — Table 18 defines the parameters for OBEM services.

Table 18 Service Parameter Definitions

Parameter Definition Form

DateTime Date and time setting. To be resolved.

DeviceProgramID Identifier for EquipmentIODevice program. Integer

ErrorCode Contains the code for the specific error found. Enumerated

ErrorText Text in support of the error code. Text

SEMI E98-1102 © SEMI 2000, 2002 37

Parameter Definition Form

ObjSpec Object specifier of target object.

An empty string implies Equipment is the target.

Formatted text. See SEMI E39 for

restrictions.

ProcessCapability User-defined description Text

Property An attribute name and value. Structure of attribute name, attribute value

RequestAcknowledge Acknowledgement of request. Enumerated:

Request performed

Cannot perform now

Invalid request

Already in requested state

Will perform when able and report results

when complete

RequestStatus Result of request Structure consisting of

RequestAcknowledge and Status

Service New substate of SERVICE Enumerated: IN SERVICE, OUT OF

SERVICE

Status Reports any errors found. List of ErrorCode, ErrorText pairs

12.6 Abort — Table 19 defines the Abort service. The Abort request may be directed to the Equipment or to an

EquiipmentModule.

Table 19 Abort Service Definition

Parameter Req/Ind Rsp/Conf Description

ObjSpec M - Object specifier for EquipmentModule.

RequestStatus - M Result status

12.7 AddProcessCapability — Table 20 defines the service to add a ProcessCapability. This request may be

directed to the Equipment or to an EquipmentModule.

Table 20 AddProcessCapability Service Definition

Parameter Req/Ind Rsp/Conf Description

ObjSpec M Object specifier for owner of capability

ProcessCapability M - User description of a process objective.

RequestStatus - M Result status

12.8 AddElement — Table 21 defines the service to add an AbstractEquipmentElement. This request may be

directed to the Equipment or to an EquipmentModule. Properties needed for the AbstractEquipmentElement must be

included in the list of properties.

Table 21 AddElement Service Definition

Parameter Req/Ind Rsp/Conf Description

ObjSpec M - Object specifier for new owner

(list of) Property M - Properties of new element

RequestStatus - M Result status

12.9 Cleanup — This service directs the equipment to return all substrates that have been removed from their

carriers to their appropriate destinations. Table 22 defines the Cleanup service.

Table 22 Cleanup Service Definition

Parameter Req/Ind Rsp/Conf Description

RequestStatus - M Result status

12.10 GetDateTime — Table 23 defines the GetDateTime service.

Table 23 GetDateTime Service Definition

Parameter Req/Ind Rsp/Conf Description

DateTime - M Date and time.

RequestStatus - M Result status

12.11 ChangeService — Table 24 defines the ChangeService service. This service requests that the target object be

placed either in service or out of service. The user shall only be allowed to place an object back into service if it was

originally put out of service by a user.

Table 24 ChangeService Service Definition

Parameter Req/Ind Rsp/Conf Description

ObjSpec M - Object specifier for target

Service M - New substate for SERVICE.

RequestStatus - M Result status

12.12 Pause — Table 25 defines the Pause service.

Table 25 Pause Service Definition

Parameter Req/Ind Rsp/Conf Description

ObjSpec M - Object specifier for target object.

RequestStatus - M Result status

12.13 RemoveProcessCapability — Table 26 defines the service to remove a process capability from the

ProcessCapabilityList.

Table 26 RemoveProcessCapability Service Definition

Parameter Req/Ind Rsp/Conf Description

ObjSpec M - Object specifier for target object.

ProcessCapability M - Capability to be removed

RequestStatus - M Result status

12.14 RemoveElement — Table 27 defines the service to remove an element previously added by a user.

Table 27 RemoveElement Service Definition

Parameter Req/Ind Rsp/Conf Description

ObjSpec M - Object specifier for element to be removed

RequestStatus - M Result status