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SEMI E109-0305 © SEMI 2001, 2005 46 Parameter Name Form Description OutputPortID Integer 0, 101 to 255. ID number of a load port where the Pod will be presented for removal. The OutputPortID num ber should be the same as…

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SEMI E109-0305 © SEMI 2001, 2005 45
Parameter Name Form Description
ErrorCode Enumerated:
Valid for all services listed below
Unsupported option [service]
requested
Command not valid for current state
Insufficient parameters specified
Parameters improperly specified
Bind
Load port does not exist
Object identifier already in use
Invalid attribute value
Unknown attribute name
CancelAllPodOut
(none)
CancelBind
Load port does not exist
Unknown object instance
CancelPod
Load port does not exist
Unknown object instance
CancelPodAtPort
Load port does not exist
CancelPodNotification
Unknown object instance
CancelPodOut
Unknown object instance
CancelReservationAtPort
Load port does not exist
PodIn
Unknown object instance
PodNotification
Object identifier already in use
Invalid attribute value
Unknown attribute name
PodOut
Load port does not exist
Unknown object instance
ChangeAccess
Load port does not exist
ChangeServiceStatus
Load port does not exist
ProceedWithPod
Load port does not exist
Unknown object instance
Invalid attribute value
Unknown attribute name
ReserveAtPort
Load port does not exist
Contains the code for the specific error found.
ErrorText Text. Text in support of the error code.
InputPortID Integer
0, 101–255.
ID number of the load port where the Pod will be delivered. The
InputPortID number should be the same as the load port number.
When the value of the InputPortID = zero, the Pod will be picked
up from the internal buffer.
SEMI E109-0305 © SEMI 2001, 2005 46
Parameter Name Form Description
OutputPortID Integer
0, 101 to 255.
ID number of a load port where the Pod will be presented for
removal. The OutputPortID number should be the same as the
load port number. When the value of the OutputPortID = zero,
the Pod will be delivered to the internal buffer.
PortID Integer
1-n.
ID number of a load port. The PortID number should be the
same as the load port number.
PortList List
1-n items.
List of n items
PortID
1
.
.
n PortID
n
PodPropertiesList List
1-n name/value pairs.
List of n items
1. AttributeID
1
AttributeData
1
.
.
n. AttributeID
n
AttributeData
n
ReticlePlacement-
Instruction
Enumerated:
0 = PLACE
1 = PASS BY
2 = CURRENTLY OCCUPIED
The instructions for placing reticles in pod slot.
ReticlePropertiesList List
1-n name/value pairs.
List of n items
1. AttributeID
1
AttributeData
1
.
.
n. AttributeID
n
AttributeData
n
ReticleLocation-
PropertiesList
List
1-n name/value pairs.
List of n items
1. AttributeID
1
AttributeData
1
.
.
n. AttributeID
n
AttributeData
n
ReticleRemoval-
Instruction
Enumerated:
0 = REMOVE
1 = PASS BY
The instructions for removing reticles from a pod slot.
ServiceStatus Enumerated:
IN SERVICE,
or OUT OF SERVICE.
The desired transfer service status of the specified load port.
SourceLocation LocationID. The source location from which to move a reticle.
Status A list of ErrorCode/ErrorText pairs. Reports any errors found.
18.4 Fundamental Service Message Definitions
18.4.1 The following tables specify the allowable/required parameters for each service. The column marked
“REQ/OPT”, specifies which parameters are required to be supported for RPMS compliance (R = Required, O =
Optional).
SEMI E109-0305 © SEMI 2001, 2005 47
18.4.2 Bind
18.4.2.1 The Bind service is used to associate a PodID with a load port. The Bind can contain a PropertiesList of
pod object attributes that are supplied by the host. A pod object is instantiated when this service is used
successfully. The Bind service will be rejected if the pod specified has already been instantiated through the Bind or
PodNotification service, or a PodID read. The Bind service also triggers a transition in the Load Port Reservation
state model from NOT RESERVED to RESERVED.
Table 23 Bind Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — The PortID where a pod is expected.
PodID M — The expected PodID.
PodPropertiesList C — A list of name value pairs providing attributes for the
pod object being instantiated with the Bind service.
CMStatus — M Information concerning the result of the service.
18.4.3 CancelBind
18.4.3.1 The CancelBind request is used to cancel the association between a port and a PodID. The pod object is
destroyed when this service is used successfully. The CancelBind service also triggers a transition in the Load Port
Reservation state model from RESERVED to NOT RESERVED.
Table 24 CancelBind Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID C — The PortID for which to cancel the load port to pod association.
Either PortID or PodID must be specified.
PodID C — The PodID for which to cancel the load port to pod association.
Either PortID or PodID must be specified.
CMStatus — M Information concerning the result of the service.
18.4.4 CancelPod
18.4.4.1 The CancelPod request is used to stop a reticle pod. If the reticle pod is at a reticle pod load port, then it
shall be made ready for unload. The production equipment shall reject this service if issued after reticles have been
removed for processing.
Table 25 CancelPod Service Parameters
Parameter Name Req/Opt Rsp/Conf Description
PodID M — The PodID to cancel.
CMStatus — M Information concerning the result of the service.
PortID C — The PortID where the pod object is located. This parameter is not
required if the pod object has been previously instantiated.
18.4.5 CancelPodAtPort
18.4.5.1 CancelPodAtPort is used to abort any pod at a designated port. This service can be used when the podID
of the pod at the designated port is unknown.