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SEMI D25-0600 E © SEMI 2000, 2003 5 G las s S u b s t ra t e Lid Figure 2 Full Box Type 4 Corner Supporter Ty pe 2 Edge Suppo rter Type Figure 3 Partial Box Type
SEMI D25-0600
E
© SEMI 2000, 2003 4
6.2.6 Reference Plane
6.2.6.1 The reference plane needs to be determined as
follows from three directions, x, y, and z in Figure 5 for
automatic transferring:
x: Both sides or center position
y: Both sides or center position
z: Bottom surface of the box (not the bottom of the
skid described later)
6.2.6.2 Specifically use the small area as a reference
surface in Figure 11. The detail of the position and size
of the reference surfaces shall be standardized to use a
compatible reference for two different design boxes.
Also the center line of substrate is automatically
defined by symmetrical location between substrate and
reference plane of case.
6.2.7 Transfer and Lift Method for Packing Boxes
6.2.7.1 It is expected that not only boxes containing
glass substrates but also empty boxes are fairly heavy.
At least, they probably cannot be carried by hand.
Therefore, it is assumed that whether the box contains
glass substrates or not and whether the box is in a
regular room or a clean room, it shall be lifted by a
forklift and transferred mechanically. To accommodate
a mechanical transfer and lift, skids must be installed at
the bottom of the box so that the forklift can insert its
tongues underneath the box (see Figure 5). The height
of the skids shall be standardized for each shipping case
supplier, but not exceed 150 mm.
6.2.7.2 Assuming lifting of the box and short distance,
transfer is done using a balancer; the packing box is
required to have handles, as shown in Figure 12, on the
sides of the box. The structure of the handles shall be
designed in such a way that it does not hinder the
reference plane.
6.2.8 Packing Box Strength
6.2.8.1 The weight of the contents of the box, with the
prescribed number of substrates, can be calculated from
the density of substrates. The packing box has to be
strong enough to bear that weight. Moreover, it has to
be strong enough to hold another full box on top of
itself.
6.2.8.2 Stacking three boxes with glass substrates is
prohibited. Therefore there is no need for the packing
box strength to hold two boxes on top of one box.
However, empty boxes may be stacked three high, but
the box has to be designed to bear the weight of two
empty boxes.
6.2.8.3 The handles shall be strong enough to hold the
weight when the box is filled with glass substrates as
well as a full box on top or two empty boxes on top.
6.2.9 Packing Box Material
6.2.9.1 Packing box material is not covered in this
document. Neither carcinogen nor de-gasification is
covered. For the purpose of cleaning, cleanliness, and
particle reduction, the material of the box has to be
washable and solvent-resistant. The addition of draining
holes is acceptable. Material must meet cleanliness,
mechanical strength, and durability in line with
specifications of this document.
h
Long Edge
2 Edge Support
W
L
4 Edge Support
h4
W
L
Figure 1
Sag
SEMI D25-0600
E
© SEMI 2000, 2003 5
Glass Substrate
Lid
Figure 2
Full Box Type
4 Corner Supporter Type 2 Edge Supporter Type
Figure 3
Partial Box Type
SEMI D25-0600
E
© SEMI 2000, 2003 6
Spacer Type
Interleaf Type
Glass Substrate
Spacer
Protective
Packaging
Glass Substrate
Interleaf
Figure 4
Separator Contact Types