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SEMI E81-0600 © 1999, 2 000 19 7.2.16.3 Run-time Responsibilities of P r o d uction Machine Component • Initiate and execute production machine j obs to perform specific process operations (and recipes) on specifi c mate…
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recommend the next task (dispatching) or a
sequence of tasks (scheduling) for factory
resources.
7.2.15 Responsibilities of Equipment Tracking and
Maintenance Component
7.2.15.1 The Equipment Tracking and Maintenance
component implements the Factory Resource
architecture (see Section 7.3.3) specialized for
production equipment (process and metrology tools and
material handling and storage equipment).
7.2.15.2 Note that the machine is the software
representation of physical equipment and should reflect
the state of that equipment. The functionality can be
implemented within the equipment, within the MES, or
in a separate system such as a cell controller, station
controller or equipment integration solution.
7.2.15.3 Build-time Responsibilities of Equipment
Tracking and Maintenance Component
• Configure production machines as a combination
of, or relationship to, process resources (such as
process chambers) and support resources
(loadports, add-on sensors, internal material buffers
and transport, etc.).
• Configure material handling resources as a
combination of transport machines and storage
machines and relations to support resources
(loadports, add-on sensors such as automatic
material identification, etc.).
• Configure equipment state models compatible with
SEMI E10 (at the machine level and/or at the
machine resource level).
• Configure (initial or nominal) production machine
capabilities.
• Configure the (initial) recipe namespaces that
production machines use and manage.
• Configure the (initial) material locations that
material transport equipment is able to reach and
the locations it is authorized to reach.
• Define equipment maintenance tasks and what
triggers them.
• Tasks: repair, calibration, qualification, etc.
• Triggers: failures, usage, elapsed time, need by
another related maintenance task, etc.
• Use document management and version control for
maintenance specification change control.
7.2.15.4 Run-time Responsibilities of Equipment
Tracking and Maintenance Component
• Track the equipment state and update the machine
state, accordingly.
• Keep the machine state model current.
• Report and record equipment and machine state
changes, alarms and events in machine history.
• Support query of machine state and history.
• Update machine and machine resource process
capabilities to reflect machine state and
capability and machine assigned capabilities.
• Drive the equipment to a requested state.
• Collect and report machine performance according
to SEMI E58 and other utilization and
effectiveness measures.
• Monitor equipment maintenance triggers.
• Execute and monitor triggered maintenance jobs.
• Update equipment state and resource capability
(before and after maintenance).
• Recommend maintenance jobs for scheduling.
• Execute maintenance jobs and report job
progress.
• Record maintenance triggered and maintenance
job results in equipment maintenance history.
• Manage the relationships between production
machines that have specific process capabilities
and process flows that need specific process
capabilities.
• Manage the material locations that material
transport equipment is capable of reaching and is
authorized to reach.
7.2.16 Responsibilities of Production Machine
Component
7.2.16.1 The Production Machine component supports
execution of production machine jobs on process
equipment and interaction with material handling
equipment for material input/output at the machine. The
functionality can be implemented within the equipment
and/or in a separate system such as a cell controller,
station controller or equipment integration solution.
7.2.16.2 Build-time Responsibilities of Production
Machine Component
7.2.16.2.1 Note that the configuration of the machine
is the responsibility of the Equipment Tracking and
Maintenance component.
SEMI E81-0600 © 1999, 200019
7.2.16.3 Run-time Responsibilities of Production
Machine Component
• Initiate and execute production machine jobs to
perform specific process operations (and recipes)
on specific material (process groups). Here are the
steps to initiating and executing production
machine jobs:
1) Validate the production machine job:
compatibility and availability of the material in the
process group, process capability of the equipment,
proper machine state, valid and available recipe or
process specification, necessary operator skills, etc.
2) Equipment setup: recipe download and select,
launch advanced process control (APC)
calculation, make operator and APC-recommended
adjustments, configure equipment and sensors
according to data collection plans.
3) Initiate processing.
4) Monitor process operation:
• Collect process run data from equipment,
add-on sensors and operator entry according
to data collection plans.
• per machine and per process resource.
• Store in process run histories.
• Event management: capture, interpret,
record and respond to equipment events,
fault detection events and other process
anomalies.
• Monitor equipment operation and state
(from the equipment tracking and
maintenance component) as another source
of information on process operation.
• Generate MES-level (machine) events and
alarms.
• Track material within machine and record
with process run histories and product
histories.
5) Complete processing.
• Execute post-processing tasks for the
process operation.
• Generate job completed events and invoke
“inform job completed” method on job
requestor.
• Sequence steps between machines and machine
resources (for that sequence logic that is not
covered by embedded equipment control).
• Implement recipe control and recipe agent
functionality as defined in SEMI E42 - Recipe
Management Standard. Integrate with factory-level
recipe namespace functionality in the CIM
Framework Recipe Management component.
• Job accountability: account for and report material
yield loss in material management component and
equipment productivity loss in equipment tracking
component.
• Interact with Material Transport and Storage
component and loadport for material hand-off
handshake protocols.
• Manage and monitor equipment when idle.
7.2.17 Responsibilities of Recipe Management
Component
7.2.17.1 The Recipe Management component provides
a capability for applying machine recipes across the
factory. Recipes for multiple machines of the same
process capability using the same recipe syntax are
managed by specializing the recipes based on specific
machine settings. The Production Machine component
is responsible for merging the recipe with machine-
specific data and run-time data (such as Advanced
Process Control component recommendations for recipe
settings) into an executable recipe and for downloading
it to the equipment or selecting and modifying it in the
equipment. The Recipe Management component also
works with Recipe Executors and Recipe Agents
(terminology from SEMI E42) implemented in the
Production Machine component, in the equipment, or
elsewhere.
7.2.17.2 Build-time Responsibilities of Recipe
Management Component
• Build process recipes.
• Generic.
• Specific to a machine type (same process
capability and recipe syntax).
• Including identification of variable parameters
in recipe.
• Use document management and version control
for change management and effectivity.
• Define, configure and initialize recipe namespaces.
NOTE 12: Including this responsibility under “build
time” does not imply that all recipes are built at MES
system build time. Recipes may be built after the MES
system is running.
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7.2.17.3 Run-time Responsibilities of Recipe
Management Component
• Work with Production Machine component and
other recipe controllers to select, download and
modify recipes.
• Implement resource effectivity control (manage
when and to what material and machines to apply
recipe changes).
7.2.18 Responsibilities of Advanced Process Control
Component
7.2.18.1 The Advanced Process Control component
(defined in SEMI E93) supports the Production
Machine component execution of production machine
jobs by optimizing machine-specific settings for the
current material and machine state to achieve desired
process effects. It also detects faults in processing and
recommends an appropriate response to the Production
Machine component. Advanced Process Control
strategies can include statistical process control, model-
based process control, multi-variate analysis, trace
analysis, fault pattern matching, or any other
appropriate mechanism. The internal design of the
Advanced Process Control component allows
integrating different types of analysis and computation
mechanisms and their execution environments into a
single control strategy.
7.2.18.2 Build-time Responsibilities of Advanced
Process Control Component
• Define control strategies and associated sensor
processing algorithms, fault detection algorithms
and optimal process control algorithms.
• Define real-time control data structures to support
control algorithms.
• Define data collection plans to acquire control data.
• Define control strategy selection logic.
7.2.18.3 Run-time Responsibilities of Advanced
Process Control Component
• Select a control strategy and associated sensor
processing and analysis algorithms to optimize
processing and detect faults.
• Launch, coordinate and monitor the execution of
data collection plans and control processing and
analysis algorithms.
• Apply algorithm results to recommend process
settings and detected fault response actions (recipe
adjustment, equipment shutdown, maintenance,
rework, etc.).
• Update control data with algorithm results.
• Update control data with equipment and product
material data (current equipment state, material
state, process operation, etc.).
• Record and report control strategy and algorithm
results and recommendations in process run
histories.
7.2.19 Responsibilities of Material Transport and
Storage Component
7.2.19.1 The Material Transport and Storage
component (defined in SEMI E102) supports active and
manual material movement and active and passive
material storage (active storage: stockers, smart racks,
equipment buffers; passive storage: tables, racks). It
executes Transport Jobs and interacts with the
Production Machine components for material handoff
to and from process equipment. The component tracks
and reports on material location and material movement
history. The equipment configuration, tracking and
maintenance functions are the responsibility of the
Equipment Tracking and Maintenance component. For
complicated interbay and intrabay material transport
and storage, there may be multiple instances of the
component -- one for each material movement area --
that cooperate to provide factory-wide material
movement functions.
7.2.19.2 Build-time Responsibilities of Material
Transport and Storage Component
7.2.19.2.1 Note that configuration of the material
transport and storage equipment and its capabilities is
the responsibility of the Equipment Tracking and
Maintenance component.
7.2.19.3 Run-time Responsibilities of Material
Transport and Storage Component
• Support scheduling of material movement and
processing by predicting time for material delivery
to specific locations.
• Execute and monitor transport jobs to move
material groups (transport groups) to specific
locations.
• Validate that the job can be done: the material
is available, the destination is reachable and has
available storage or loadport capacity, there are
sufficient material movement resources (cars,
storage space, etc.) to implement the job.
• Implement the job by scheduling and enacting
actions on internal material movement and
storage resources (cars, turntables, stocker
shelves, etc.).
• Collect and record data on transport job
execution and history.