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SEMI E40-0705 © SEMI 1995, 2005 2 NOTICE: This standard does not purport to address sa fety issu es, if any, associated w ith its use. It is the responsibility of th e users of this standard to establish appropriate safe…
SEMI E40-0705 © SEMI 1995, 2005 1
SEMI E40-0705
STANDARD FOR PROCESSING MANAGEMENT
This standard was technically approved by the global Information & Control Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available
at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published in 1995; last published
June 2003.
1 Purpose
1.1 Automated management and command of material processing in equipment is a crucial aspect enabling factory
automation. This standard addresses the communications needs within the semiconductor manufacturing
environment with respect to the processing of material in equipment.
1.2 This standard specifies the application of the appropriate processing to specified material received at the
processing agent. It describes the concepts of material processing, the behavior of the equipment in relation to
processing, and the messaging services which are needed to accomplish the task.
1.3 The communications services defined here enable standards-based interoperability of independent systems.
They allow application software to be developed that can assume the existence of these services and allow software
products to be developed which offer them.
1.4 Implementation of automated processing management will help eliminate misprocessing of material. The
adoption of the standards described will greatly reduce the effort required to integrate compliant equipment
components and reduce time to set up for processing. Compliance requires a minimal but specific set of standard
services.
2 Scope
2.1 The scope of this standard is automated material processing based on discrete processing jobs. It provides the
functionality required for process management for modules within a cluster tool. It may be applied to sub-systems of
other multi-resource equipment, as well as to host control of many types of equipment.
2.2 This standard supports individual management of jobs for identical processing of material within a group and
concurrent processing of independent groups. Where material contains other material (such as carriers containing
wafers), processing may be specified in terms of either material type.
2.3 A simple tuning mechanism is provided for limited feedforward and feedback control between process steps. A
method is defined for taking advantage of recipe variable parameters. This is not expected to satisfy all closed loop
control requirements. Other mechanisms are anticipated with greater flexibility for late tuning and handling complex
data.
2.4 This standard does not provide services for receiving material for processing, or disposing of it after processing
is complete. Automation of material transfer is assumed to be provided through other services, such as those defined
in applicable SEMI standards.
2.5 This standard presents a solution from the concepts and behavior down to the messaging services. It does not
define the messaging protocol.
2.6 A messaging service includes the identification that a message shall be exchanged and a definition of the data
which is contained in that message. It does not include information on the structure of the message, how the data is
represented within the message, or how the message is exchanged. This additional information is contained within
the message protocol.
2.7 The defined services may be applied to multiple protocols. Information on the mapping of processing
management services to special protocols (e.g., SECS-II) are added as adjunct standards.
2.8 The services assume a communications environment in which a reliable connection has been established
between the user of the services and the provider of the services. Establishing, maintaining, releasing a connection,
and handling communication failures are beyond the scope of this standard.
SEMI E40-0705 © SEMI 1995, 2005 2
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Referenced Standards and Documents
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E53 — Event Reporting
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 Terminology
4.1 The following definitions are arranged in alphabetical order. Some definitions use terms defined elsewhere
within this section. No references beyond this section should be necessary for a basic understanding of these terms.
4.2 Definitions
4.2.1 agent — an intelligent system within a factory that provides one or more service resources and uses the
services of other agents. A generalization of host, equipment, cell, cluster, cluster module, station controller, and
work station. Agents are associated with a physical system or a collection of physical systems, including computer
platforms.
4.2.2 form — type of data representing information contained in an object attribute or service message parameter.
4.2.3 fundamental requirements — the requirements for information and behavior that must be satisfied for
compliance to a standard. Fundamental requirements apply to specific areas of application, objects, or services.
4.2.4 post-conditioning — activities performed by the processing resource after departure of the material being
processed but related to the processing of that material (e.g., cleanup).
4.2.5 pre-conditioning — activities performed by the processing resource before arrival of the material being
processed but related to the processing of that material.
4.2.6 processing agent — an intelligent system within a factory which is independently capable of providing
manufacturing value added to material.
4.2.7 processing resource — an entity within a processing agent which provides the manufacturing value added to
material.
4.2.8 process job — a material processing job for a processing resource specifying and tracking the processing to be
applied to the material.
4.2.9 recipe — the pre-planned and reusable portion of the set of instructions, settings, and parameters under control
of a processing resource that determines the processing environment seen by the material. Recipes may be subject to
change between runs or processing cycles.
4.2.10 recipe executor — a component of a module that stores and executes recipes.
4.2.11 recipe namespace — a logical management domain with the responsibility for the storage and management
of recipes. It ensures the uniqueness of recipe identifiers and provides services pertaining to recipes stored within
that domain.
4.2.12 service — the set of messages and definition of the behavior of a service-provider that enables remote access
to a particular functionality.
4.2.13 service-provider — the software control entity that is the provider of a particular functionality which may be
accessible remotely.
SEMI E40-0705 © SEMI 1995, 2005 3
4.2.14 service-user — the software control entity that is the user of any of the related services.
4.2.15 supervisor — an entity or entities having supervisory control responsibilities for one or more processing
resource. It is the service-user of the processing management services.
4.2.16 tuning — specification of information which supplements the pre-defined recipe used to achieve the
particular process goals.
4.3 Data Type
4.3.1 boolean — may take on one of two possible values, equating to TRUE or FALSE.
4.3.2 enumerated — may take on one of a limited set of possible values. These values may be given logical names,
but they may be represented by any single-item data type.
4.3.3 form — type of data: positive integer, unsigned integer, integer, enumerated, boolean, text, formatted text,
structure, list, ordered list.
4.3.4 formatted text — a text string with an imposed format. This could be by position, by use of special characters,
or both.
4.3.5 integer — may take on the value of any negative or unsigned integer. Messaging protocol may impose a limit
on the range of possible values.
4.3.6 list — a set of one or more items that are all of the same form (one of the above forms).
4.3.7 ordered list — a list for which the order in which items appear is significant.
4.3.8 positive integer — may take the value of any positive whole number. Messaging protocol may impose a limit
on the range of possible values.
4.3.9 structure — a complex structure consisting of a specific set of items, of possibly mixed data types, in a
specified arrangement.
4.3.10 text — a text string. Messaging protocol may impose restrictions, such as length or ASCII representation.
4.3.11 unsigned integer — may take the value of any positive integer or zero. Messaging protocol may impose a
limit on the range of possible values.
5 Conventions
5.1 Harel State Model — This document uses the Harel State Chart notation to describe the dynamic behavior of the
objects defined. An overview of this notation is presented in an appendix of SEMI E30. The formal definition of this
notation is presented in Science of Computer Programming 8, “Statecharts: A Visual Formalism for Complex
Systems,” by D. Harel, 1987.
5.1.1 The Harel notation does not include the concept of “creation” and “deletion” of state models to represent
transient entities. The “job” described in this document is such an entity, where each new job created uses a copy of
the same state model. In this document, an oval is used to denote the creation of an entity and also the deletion of
that entity.
5.1.2 Transition tables are provided in conjunction with the state diagrams to describe explicitly the nature of each
state transition. A transition contains columns for Transition #, Current State, Trigger, New State, Action(s). The
“trigger” (column 3) for the transition occurs while in the “current” state. The “actions” (column 5) include a
combination of (1) actions taken upon exit of the current state, (2) actions taken upon entry of the new state, and (3)
actions taken which are most closely associated with the transition. No differentiation is made.
5.1.3 The state models included in this standard are a requirement for Processing Management compliance. A state
model consists of a state model diagram, state definitions, and a state transition table. When using SEMI E30, E53
or similar style collection events, all state transitions in this standard, unless otherwise specified, shall correspond to
collection events.
5.1.4 A state model represents the host’s view of the equipment, and does not necessarily describe the internal
equipment operation. When using collection events, all Processing Management state model transitions shall be
mapped sequentially into the appropriate internal equipment collection events that satisfy the requirements of those