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SEMI E4-0699 © SE MI 1980, 1999 1 SEMI E4-0699 SEMI EQUIP MENT COMMUNICATIONS STA NDARD 1 MESSA GE TRANSFER (SECS-I) This st andard w as technica lly approve d by the Global Inform ation & Contr ol Comm ittee and is …

SEMI INTERNATIONAL STANDARDS

EQUIPMENT AUTOMATION SOFTWARE

Semiconductor Equipment and Materials International

SEMI E4-0699 © SEMI 1980, 19991

SEMI E4-0699

SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE

TRANSFER (SECS-I)

This standard was technically approved by the Global Information & Control Committee and is the direct

responsibility of the North American Information & Control Committee. Current edition approved by the

North American Regional Standards Committee on February 28, 1999. Initially available at www.semi.org

May 1999; to be published June 1999. Originally published in 1980; previously published January 1999.

1 Introduction

1.1 Revision History — This is the first major revision

since the original release of SECS-I in 1980. Very little

of the original intent of SECS-I has been altered,

although there are a few significant additions. The

changes are summarized in Appendix 1. This

specification has been developed in cooperation with

the Japan Electronic Industry Development Association

Committee 12 on Equipment Communications.

1.2 Scope — The SECS-I standard defines a

communication interface suitable for the exchange of

messages between semiconductor processing equipment

and a host. Semiconductor processing equipment

includes equipment intended for wafer manufacturing,

wafer processing, process measuring, assembly and

packaging. A host is a computer or network of

computers which exchange information with the

equipment to accomplish manufacturing. This standard

includes the description of the physical connector,

signal levels, data rate and logical protocols required to

exchange messages between the host and equipment

over a serial point-to-point data path. This standard

does not define the data contained within a message.

The meaning of messages must be determined through

some message content standard such as SEMI

Equipment Communications Standard E5 (SECS-II).

1.3 Intent — This standard provides a means for

independent manufacturers to produce equipment

and/or hosts which can be connected without requiring

specific knowledge of each other.

1.3.1 Layered Protocol — The SECS-I protocol can

be thought of as a layered protocol used for point-to-

point communication. The levels within SECS-I are the

physical link, block transfer protocol, and message

protocol. (See Related Information R1-1.1.)

1.3.2 Speed — It is not the intent of this standard to

meet the communication needs of all possible

applications. For example, the speed of RS-232 may be

insufficient to meet the needs of transferring mass

amounts of data or programs in a short period of time,

such as might be required by high speed functional test

applications.

1.3.3 Network Support — The method by which

blocks of data are routed to a piece of equipment or find

their way back to the proper host application is not

specified by SECS-I. In a network, the roles of host and

equipment might be assumed by any party in the

network. In this situation, one end of the

communications link must assume the role of the

equipment and the other the role of the host.

1.4 Applicable Documents

1.4.1 Electronics Industries Association Standards

EIA RS-232-C — Interface between Data Terminal

Equipment and Data Communication Equipment

Employing Serial Binary Data Interchange

EIA RS-269-B — Synchronous Signaling Rates for

Data Transmission

EIA RS-334 — Signal Quality at Interface Between

Data Processing Terminal Equipment and Synchronous

Communication Equipment for Serial Data

Transmission

EIA RS-422 — Electrical Characteristics of Balanced

Voltage Digital Interface Circuits

EIA RS-423 — Electrical Characteristics of

Unbalanced Voltage Digital Interface Circuits

1.4.2 European Computer Manufacturing Association

ECMA/TC24/82/18 — "Network Layer Principles,"

Final Draft (April, 1982)

1.4.3 Japanese Industrial Standards Committees

JIS C 6361 — "The Interface between Data Circuit

Terminating Equipment (DCE) and Data Terminal

Equipment (DTE) (25-pin Interface)"

1.4.4 International Organization for Standardization

EIA Engineering Department, Standards Sales Office, 2001 Eye

Street, N.W., Washington, D.C. 20006

European Computer Manufacturing Association, 114 Rue du Rhone,

1204 Geneva, Switzerland

Japanese Standards Association, 1-24, Akasaka 4 Chome, Minato-

ku, Tokyo 107, Japan

ANSI, 1430 Broadway, New York, NY 10018

SEMI E4-0699 © SEMI 1980, 1999 2

ISO 2110-1980 — Data Communications, Interface

Connectors and Pin Assignment

1.4.5 SEMI Specifications

SEMI E5 — SEMI Equipment Communications

Standard 2 — Message Content (SECS-II)

SEMI E6 — SEMI Facilities Interface Specification

Format

1.5 Overview of SECS-I — The SECS-I standard

defines point-to-point communication of data utilizing a

subset of the international standard known in the U.S.A.

as EIA RS-232-C and in Japan as JIS C 6361 for the

connector and voltage levels. The actual transmission

consists of 8-bit bytes sent serially with one start and

one stop bit. The communication is bidirectional and

asynchronous, but flows in one direction at a time. The

direction is established by special characters and a

handshake, after which the data itself is sent. Data is

sent in blocks of 254 bytes or less. Each block consists

of a 10-byte header followed by data. A message is a

complete unit of communication in one direction and

consists of 1 to 32,767 blocks. Each block header

contains information for identifying the block as part of

a specific message. Messages are paired by a request

and its reply which together are called a transaction.

1.6 Structure of Document — This document is

divided into sections which correspond to major aspects

of the standard. The sections outline requirements as

well as implications of the requirements. The standard

may be implemented in a variety of ways, depending

upon the computer environment where it is placed.

Implementation is not part of the standard. Information

which may be useful for implementation is included in

the form of Related Information.

2 Terminology

2.1 The following brief definitions refer to sections

providing further information.

2.1.1 ACK — "Correct Reception" handshake code.

(See Section 5.2.)

2.1.2 application software — the software performing

the specific task of the equipment or the host.

2.1.3 block — header plus up to 244 bytes of data.

(See Sections 1.5, 6.7.)

2.1.4 block length — the number of bytes sent in the

block transfer protocol. (See Section 5.6.)

2.1.5 block number — a 15-bit field in the header for

numbering blocks in a message. (See Sections 6.7.)

2.1.6 character — a byte sent on the SECS-I serial

line. (See Section 4.1.)

2.1.7 checksum — a 16-bit number used to detect

transmission errors. (See Section 5.7.)

2.1.8 communication failure — a failure in the

communication link resulting from a failed send. (See

Section 5.4.)

2.1.9 device ID — a 15-bit field in the header used to

identify the equipment. (See Section 6.3.)

2.1.10 E-bit — a bit in the header identifying the last

block of a message. (See Section 6.6.)

2.1.11 ENQ — "Request to Send" handshake code.

(See Section 5.2.)

2.1.12 EOT — "Ready to Receive" handshake code.

(See Section 5.2.)

2.1.13 equipment — the intelligent system which

communicates with a host.

2.1.14 expected block — the block of a message which

is expected by the message protocol. (See Section

7.4.4.)

2.1.15 header — a 10-byte data element used by the

message and transaction protocols. (See Section 6.)

2.1.16 host — the intelligent system which

communicates with the equipment.

2.1.17 length byte — the character used to establish

the block length during transmission. (See Section 5.6.)

2.1.18 line control — a portion of the block transfer

protocol. (See Section 5.8.2.)

2.1.19 master — the block transfer designation for the

equipment. (See Section 5.5.)

2.1.20 message — a complete unit of communication.

(See Section 7.)

2.1.21 message ID — a 15-bit field in the header used

in the process of message identification. (See Sections

6.5, 7.3.1.)

2.1.22 multi-block message — a message sent in more

than one block. (See Sections 6.7, 7.2.2.)

2.1.23 NAK — "lncorrect Reception" handshake code.

(See Section 5.2.)

2.1.24 open message — a multi-block message for

which not all of the blocks have been received. (See

Section 7.4.4.)

2.1.25 open transaction — a transaction in progress.

(See Section 7.3.)

2.1.26 primary message — a message with an odd

numbered message ID. Also the first message of a

transaction. (See Section 6.5.)