semi合集-English.pdf - 第5990页
SEMI P42-0304 © SEMI 2004 23 <Comment>TR-negaty pe</Comment> </AlignmentMarkInf ormation> <AlignmentMarkInf ormation> <AlignmentMarkID>TR -6</AlignmentMarkID> <Group>LSA</Gro …
SEMI P42-0304 © SEMI 2004 22
<X>-5450</X>
<Y>-9997</Y>
</Y-Mark>
<UnitType>um</UnitType>
</WaferMarkPosition>
<Comment>TR-negatype</Comment>
</AlignmentMarkInformation>
<AlignmentMarkInformation>
<AlignmentMarkID>TR-3</AlignmentMarkID>
<Group>LSA</Group>
<WaferMarkType>NLPD-G-3N</WaferMarkType>
<WaferMarkPosition>
<X-Mark>
<X>-7050</X>
<Y>-10000</Y>
</X-Mark>
<Y-Mark>
<X>-10000</X>
<Y>-5980</Y>
</Y-Mark>
<UnitType>um</UnitType>
</WaferMarkPosition>
<Comment>TR-negatype</Comment>
</AlignmentMarkInformation>
<AlignmentMarkInformation>
<AlignmentMarkID>TR-4</AlignmentMarkID>
<Group>LSA</Group>
<WaferMarkType>NLPD-G-3N</WaferMarkType>
<WaferMarkPosition>
<X-Mark>
<X>-6950</X>
<Y>10000</Y>
</X-Mark>
<Y-Mark>
<X>-10000</X>
<Y>7050</Y>
</Y-Mark>
<UnitType>um</UnitType>
</WaferMarkPosition>
<Comment>TR-negatype</Comment>
</AlignmentMarkInformation>
<AlignmentMarkInformation>
<AlignmentMarkID>TR-5</AlignmentMarkID>
<Group>LSA</Group>
<WaferMarkType>NLPD-G-3N</WaferMarkType>
<WaferMarkPosition>
<X-Mark>
<X>6050</X>
<Y>10000</Y>
</X-Mark>
<Y-Mark>
<X>10000</X>
<Y>6950</Y>
</Y-Mark>
<UnitType>um</UnitType>
</WaferMarkPosition>
SEMI P42-0304 © SEMI 2004 23
<Comment>TR-negatype</Comment>
</AlignmentMarkInformation>
<AlignmentMarkInformation>
<AlignmentMarkID>TR-6</AlignmentMarkID>
<Group>LSA</Group>
<WaferMarkType>NLPD-G-3N</WaferMarkType>
<WaferMarkPosition>
<X-Mark>
<X>5950</X>
<Y>-10000</Y>
</X-Mark>
<Y-Mark>
<X>10000</X>
<Y>-5880</Y>
</Y-Mark>
<UnitType>um</UnitType>
</WaferMarkPosition>
<Comment>TR-negatype</Comment>
</AlignmentMarkInformation>
<AlignmentMarkInformation>
<AlignmentMarkID>TR-7</AlignmentMarkID>
<Group>FIA</Group>
<WaferMarkType>NFPD-G-6N</WaferMarkType>
<WaferMarkPosition>
<X-Mark>
<X>-9170</X>
<Y>-10000</Y>
</X-Mark>
<Y-Mark>
<X>-10000</X>
<Y>-7300</Y>
</Y-Mark>
<UnitType>um</UnitType>
</WaferMarkPosition>
<Comment>TR-negatype</Comment>
</AlignmentMarkInformation>
<AlignmentMarkInformation>
<AlignmentMarkID>TR-8</AlignmentMarkID>
<Group>FIA</Group>
<WaferMarkType>NFPD-G-6N</WaferMarkType>
<WaferMarkPosition>
<X-Mark>
<X>-8990</X>
<Y>10000</Y>
</X-Mark>
<Y-Mark>
<X>-10000</X>
<Y>8810</Y>
</Y-Mark>
<UnitType>um</UnitType>
</WaferMarkPosition>
<Comment>TR-negatype</Comment>
</AlignmentMarkInformation>
<AlignmentMarkInformation>
<AlignmentMarkID>TR-9</AlignmentMarkID>
<Group>FIA</Group>
SEMI P42-0304 © SEMI 2004 24
<WaferMarkType>NFPD-G-6N</WaferMarkType>
<WaferMarkPosition>
<X-Mark>
<X>7370</X>
<Y>10000</Y>
</X-Mark>
<Y-Mark>
<X>10000</X>
<Y>8990</Y>
</Y-Mark>
<UnitType>um</UnitType>
</WaferMarkPosition>
<Comment>TR-negatype</Comment>
</AlignmentMarkInformation>
<AlignmentMarkInformation>
<AlignmentMarkID>TR-10</AlignmentMarkID>
<Group>FIA</Group>
<WaferMarkType>NFPD-G-6N</WaferMarkType>
<WaferMarkPosition>
<X-Mark>
<X>7190</X>
<Y>-10000</Y>
</X-Mark>
<Y-Mark>
<X>10000</X>
<Y>-7120</Y>
</Y-Mark>
<UnitType>um</UnitType>
</WaferMarkPosition>
<Comment>TR-negatype</Comment>
</AlignmentMarkInformation>
</AlignmentUSEMark>
</rfd:rdm>
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