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SEMI T6-0697 © SEMI 1997, 2004 33 Segment: LM Code Source Information Level: Detail Loop: LM Usage: Optional Max Use: 1 Purpose: To transmit stan dard code list id entification infor mation. Comments: 1 LM02 identifies t…

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SEMI T6-0697 © SEMI 1997, 2004 32
Segment: TSP Test Period or Interval
Level: Detail
Loop: TSP
Usage: Optional
Max Use: 1
Purpose: To describe a specific period or interval at which tests are performed.
Syntax Notes: 1 If either TSP03 or TSP04 is present, then the other is required.
Comments: 1 TSP02 is used to further expand TSP01 as a qualifier.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
M TSP01 1312 Test Period or Interval Qualifier M ID 2/2
Code indicating the type of period or interval as related to when a test event occurs.
TF Final Test Measurement or Read-point (Cumulative).
This code marks the end of the experiment under a specific test.
TI Intermediate Test Measurements or Read-point (Cumulative).
There may be a number of intermediate test points during an
experiment; this code would likely be combined with DE 350 to
indicate which intermediate test point it is.
TO Initial Test Measurement or Read-point (Cumulative).
This is the first test interval that a product or item is subjected to.
O TSP02 350 Assigned Identification O AN 1/11
Alphanumeric characters assigned for differentiation within a transaction set.
X TSP03 1313 Test Period or Interval Value X N0 1/6
Numeric value of period or interval signifying when a test event occurs.
X TSP04 344 Unit of Time Period or Interval X ID 2/2
Code indicating the time period or interval.
AD Average Daily
AM Average Monthly
AY Average Year
CY Calendar Year
DA Calendar Days
F1 Fiscal Year Plus One Year
F2 Fiscal Year Plus Two Years
FY Fiscal Year
MO Month
P
R
Preceding Six Months
Q1 First Quarter
Q2 Second Quarter
Q3 Third Quarter
Q4 Fourth Quarter
QY Quarter of a Year
SA Semiannual
WK Weeks
WW Work Week
SEMI T6-0697 © SEMI 1997, 2004 33
Segment: LM Code Source Information
Level: Detail
Loop: LM
Usage: Optional
Max Use: 1
Purpose: To transmit standard code list identification information.
Comments: 1 LM02 identifies the applicable industry code list source information.
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
M LM01 559 Agency Qualifier Code M ID 2/2
Code identifying the agency assigning the code values.
SM Semiconductor Equipment and Materials International
ZZ Mutually Defined
O LM02 822 Source Subqualifier O AN 1/15
A reference that indicates the table or text maintained by the Source Qualifier.
SEMI T6-0697 © SEMI 1997, 2004 34
Segment: LQ Industry Code
Level: Detail
Loop: LM
Usage: Mandatory
Max Use: >1
Purpose: Code to transmit standard industry codes.
Syntax Notes: 1 If LQ01 is present, then LQ02 is required.
Comments: This section will allow for a breakdown of the measurement or parameter (e.g., Flatness, STIR, Font
Ref, 90% PUA, ADE7700).
Data Element Summary
SEMI USE: Ref. Des. Data Element Name Attributes
O LQ01 1270 Code List Qualifier Code O ID 1/3
Code identifying a specific industry code list.
Refer to 003050 Data Element Dictionary for acceptable code values.
M LQ02 1271 Industry Code X AN 1/20
Code indicating a code from a specific industry code list.
Repeat as necessary to define a parameter in mutlitier fashion. May also be used after
parameter definition to provide additional information such as test method orconditions
coding.