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SEMI E42-0704 © SEMI 1995, 2004 1 SEMI E42-0704 RECIPE MANAGEMENT STANDARD: CONCEPTS, BEHAVIOR, AND MESSAGE SERVICES This standard was technically approved by the Global Information & Control Com mittee and is the d …

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SEMI E41.1-96 © SEMI 1996 2
7 Implementation Details
7.1 Several capabilities of the Exception Management Services (EMS) are accessed through the Object Services
Standard. The Exception Objects are persistent. An Object Services compliant implementation of EMS will allow
access to all the attributes specified in the SEMI E5 Object definition table for an Exception Object.
All implementations shall use Object Service’s GetAttr and SetAttr to access:
EXENABLED
EXSTATE
NOTE 1: EXSTATE is read-only.
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
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the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E42-0704 © SEMI 1995, 2004 1
SEMI E42-0704
RECIPE MANAGEMENT STANDARD: CONCEPTS, BEHAVIOR, AND
MESSAGE SERVICES
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the Japanese Information & Control Committee. Current edition approved by the Japanese
Regional Standards Committee on April 30, 2004. Initially available at www.semi.org June 2004; to be
published July 2004. Originally published September 1995; previously published February 2000.
CONTENTS
1 Introduction
1.1 Purpose
1.2 Scope
1.3 Referenced Documents
1.4 Definitions
1.4.1 Objects
1.4.2 Services
1.4.3 Form
1.4.4 Recipe Management
1.5 Conventions
1.5.1 Text String Restrictions
1.5.2 Harel State Model
1.5.3 Objects
1.5.3.1 OMT Object Information Model
1.5.3.2 Object Attribute Representation
1.5.4 Service Message Representation
1.6 Requirements
1.7 Document Structure
1.8 Applicable Documents
2 Overview of RMS
2.1 Recipe Management Models
2.2 Major Objects in RMS
2.2.1 Recipes
2.2.2 Recipe Namespace
2.2.3 Recipe Namespace Manager
2.2.4 Recipe Executor
3 Recipes
3.1 Motivations
3.2 Basic Concepts
3.2.1 Types of Recipes
3.2.2 Recipe Structure
3.2.2.1 Recipe Body
3.2.3 Recipe Identification
3.2.3.1 Recipe Name
3.2.3.2 Recipe Class
3.2.3.3 Version
3.2.3.4 Recipe Identifiers
3.2.4 Advanced Recipe Capabilities
3.2.4.1 Multi-Part Recipes
3.2.4.2 Variable Parameters
3.2.5 Attributes
3.2.5.1 Descriptors
3.3 Full and Minimal Recipe Models
3.4 Managed Recipes
3.4.1 Generic Attributes
3.4.1.1 Timestamp Attributes
3.4.1.2 Length Attributes
3.4.1.3 Descriptors
3.4.2 Managed Recipe Object Attribute
Definitions
3.4.2.1 Generic Attribute Definitions
3.4.2.2 Agent-Specific Attribute Definitions
3.4.2.3 Minimal Managed Recipe
4 Recipe Namespace
4.1 Motivations
4.2 Namespace Model
4.3 Namespace Specifications
4.4 Member Agents
4.5 Illustrations
4.6 Attribute Definition Tables
SEMI E42-0704 © SEMI 1995, 2004 2
5 Distributed Recipe Namespace
5.1 Motivations
5.2 Overview
5.3 Distributed Recipe Namespace Issues
5.3.1 Object Services
5.3.2 Logical Recipe
5.3.3 Change Requests
5.4 Distributed Recipe Namespace Segment
5.4.1 Master and Dedicated Segments
5.4.2 Change Restrictions
5.5 Distributed Recipe Namespace Recorder
5.6 Distributed Recipe Namespace Management
Information
5.7 Distributed Recipe Namespace
5.8 Distributed Recipe Namespace Manager
5.8.1 Change Management
5.9 Building a Distributed Recipe Namespace
5.10 Rebuilding a Damaged Distributed Recipe
Namespace
5.11 Object Attribute Definition Tables
5.11.1 Distributed Recipe Namespace Segment
Attribute Definition
5.11.2 Distributed Recipe Namespace Recorder
Attribute Definition
5.11.3 Distributed Recipe Namespace Attribute
Definition
5.11.4 Distributed Recipe Namespace Manager
Attribute Definition
6 Recipe Executor
6.1 Motivations
6.2 Description
6.3 The Execution Recipe
6.3.1 Comparison of Managed and Execution
Recipes
6.3.2 Downloaded Recipes
6.3.3 Execution Recipe Identifier
6.3.4 Execution Recipe Descriptor
6.3.5 Execution Recipe Attribute Definitions
6.4 Default Namespace
6.5 Recipe Storage
6.6 Change Control
6.6.1 Recipe Creation
6.6.2 Recipe Compression
6.6.3 Changes to Stored Recipes
6.6.4 Last Value
6.7 Production
6.8 Recipe Executor Attributes
7 Agents
7.1 Definitions
7.2 RMS Resources
7.3 Agent Attributes
8 Recipe Management Operations
8.1 Recipe Lifecycle
8.2 Description of Operations
8.2.1 General Requirements
8.2.2 Recipe Origination
8.2.2.1 Create Recipe
8.2.2.2 Update Recipe
8.2.3 Recipe Building
8.2.3.3 Unlink Recipe
8.2.3.4 Modify Variable Parameters
8.2.4 Recipe Authorization
8.2.4.1 Approve Recipe
8.2.5 Recipe Protection
8.2.6 Unprotect
8.2.7 Certify
8.2.8 De-Certify
8.2.9 Informational Operations
8.2.9.1 Get Recipe Descriptors
8.3 Recipe State Model
8.4 Table of Operations
9 Namespace Management Operations
9.1 Applications of Object Services
9.1.1 Object Specifiers
9.1.2 Required Object Services
9.2 Namespace Operations