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SEMI E109-0305 © SEMI 2001, 2005 52 18.5.7 Close Pod 18.5.7.1 The ClosePod service is used by the host to request the equipm ent close a pod. Table 42 ClosePod Service Parameter Definitions Parameter Name Req/Ind Rsp/Con…

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18.5.3 CancelPodOut
18.5.3.1 The CancelPodOut service is sent to internal buffer production equipment to cancel a queued PodOut.
Table 38 CancelPodOut Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID M — PodID for the PodOut service that is being cancelled.
CMStatus — M Information concerning the result of the service.
18.5.4 CancelReservationAtPort
18.5.4.1 The CancelReservationAtPort service is sent by the host to cancel a reservation at the load port. The load
port will enter the UNRESERVED State after receiving this service. A Port reserved by the physical initiation of a
pod out operation may not be cancelled by this service.
Table 39 CancelReservationAtPort Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — The Port ID to reserve.
CMStatus — M Information concerning the result of the service.
18.5.5 CancelReticleTransferJob
18.5.5.1 The CancelReticleTransferJob is sent by the host to cancel a previous ReticleTransferJob service.
Table 40 CancelReticleTransferJob Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID M — The PodID of the pod for which to cancel the load port to pod
association.
PortID M — The Port ID for which to cancel the load port to pod association.
OutputPortID M — The Port ID where the pod was to have been delivered after having
executed all reticle related actions.
RPMStatus — M Information concerning the result of the service.
18.5.6 Clamp
18.5.6.1 The Clamp service is used by the host if the equipment has separate mechanisms for clamping the carrier
that are independent of opening the carrier. It is used to instruct equipment to engage the independent clamping
mechanism. It is used by the host when “macro” instructions such as provided by Bind, PodNotification,
ProceedWithPod and ReticleTransferJob have not been provided.
Table 41 Clamp Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID C — The PodID of the pod to clamp. Either the PodID or the PortID must be
specified.
PortID C — The PortID for which to clamp a carrier. Either the PodID or the PortID
must be specified.
CMStatus — M Information concerning the result of the service.
SEMI E109-0305 © SEMI 2001, 2005 52
18.5.7 Close Pod
18.5.7.1 The ClosePod service is used by the host to request the equipment close a pod.
Table 42 ClosePod Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID C — The PortID where a pod is to be closed. Either PortID or PodID must be
specified.
PodID C — The PodID for which the door should be closed. Either PortID or PodID
must be specified.
CMStatus — M Information concerning the result of the service.
18.5.8 IndexDown
18.5.8.1 The IndexDown service is sent by the host to indicate that the equipment should index the reticle cassette
to the position where reticle may be removed from the cassette when it is safe for equipment, personnel, and reticles
to do so.
Table 43 IndexDown Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — PortID to designate the new service status.
PodID C — The ID of the pod to index down.
CMStatus — M Information concerning the result of the service.
18.5.9 IndexUp
18.5.9.1 The IndexUp service is sent by the host to indicate that the equipment should index the reticle cassette to
the position where the reticle pod may be removed from the equipment when it is safe for equipment, personnel, and
reticles to do so. This service is optional.
Table 44 IndexUp Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — PortID to designate the new service status.
PodID C — The ID of the pod to index up.
CMStatus — M Information concerning the result of the service.
18.5.10 MoveReticle
18.5.10.1 The MoveReticle service is used to move reticles from one reticle location to another. This can include
moving a reticle from a reticle pod location (external to a tool) to an internal reticle library, ReticleID read location,
process location, or a different reticle pod location or from an internal location to another internal location or to a
reticle pod location.
Table 45 MoveReticle Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PortID M — PortID to designate the new service status.
ReticleID C — The ID of the Reticle to move, either the ReticleID or the SourceLocation
must be used.
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Parameter Name Req/Ind Rsp/Conf Description
SourceLocation C — The ReticleLocationID of the location from which to move the reticle,
either the SourceLocation or the ReticleID must be used.
Destination-
Location
M — The ReticleLocationID of the location to which the reticle shall move.
RPMStatus — M Information concerning the result of the service.
18.5.11 OpenPod
18.5.11.1 The OpenPod service is used by the host to request the equipment open a pod
Table 46 OpenPod Service Parameter Definitions
Paramter Name Req/Ind Rsp/Conf Description
PortID C — The PortID where a pod is to be opened. Either PortID or PodID must be
specified.
PodID C — The PodID for which the door should be opened. Either PortID or PodID
must be specified.
CMStatus — M Information concerning the result of the service.
18.5.12 PodIn
18.5.12.1 The PodIn service is only used to request the internal buffer equipment internalize a carrier that has been
moved to the load port via a previous PodOut service. When using host based verification, the production
equipment shall move the pod in to the internal buffer for the first time after receiving the ProceedWithPod request.
If the PodIn service is received by the production equipment without previously having received a PodOut service
for the carrier, the service will be refused.
Table 47 PodIn Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID M — The CarrierID for the carrier to internalize.
CMStatus — M Information concerning the result of the service.
18.5.13 PodOut The PodOut service is sent to internal buffer production equipment, to request that the
equipment move the specified carrier to a load port, as soon as the carrier is completed. When the CarrierOut
service is started, the destination load port state becomes TRANSFER BLOCKED, and the load port’s association
state becomes ASSOCIATED.
18.5.13.1 PodOut Queuing
18.5.13.1.1 This service request can be queued by the production equipment. The production equipment is required
to support a queue of n size, where n is equal to the sum of the number of internal buffer locations and the number of
internal FIMS ports. The order of the queue is FIFO for each load port. If the load port is not specified in service
request, the equipment chooses which load port queue to place the PodOut service. The queued service does not
take effect until the current substrate handling action is complete (i.e., filling, emptying of the pod) and the load port
is in the NOT ASSOCIATED state. When a PodOut service is queued and the production equipment load port is
currently in the TRANSFER BLOCKED state, the production equipment shall keep the load port in the TRANSFER
BLOCKED state. Then, after the port is cleared, the PodOut service shall begin.
Table 48 PodOut Service Parameter Definitions
Parameter Name Req/Ind Rsp/Conf Description
PodID M — PodID for the carrier to be moved out.