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SEMI E53-0704 © SEMI 1996, 2004 9 7.3.4 Event Reporting with Non-predefined CollectionEvent Object — Additional capab ilities of SEMI E39 (OSS) give Event Reporting standard more flexibility. For example, Collection Even…

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SEMI E53-0704 © SEMI 1996, 2004 8
7.3.3 Trace Reporting with Event Control — Figure 8 shows a scenario in which a trace object is created with
enabled and AutoDelete both set to FALSE. There is also a start event (ProcessingStarted) and a stop event
(ProcessingComplete) defined. When the start event occurs, the data reports assigned to the trace are sampled and
sent, the trace timer is started and the sample counter set to zero. Each time the sample period elapses thereafter, a
report is sent and the sample counter incremented. Since a total samples parameter was not specified, the trace report
stops only when the stop event occurs. Once the stop event has occurred, the service user disables the trace report
preventing it from restarting when the next start event occurs.
EQUIPMEN
T
Service Provider
FACTORY
Sevice Use
r
Processin
g
started
Sample Period
Ela
p
sed
Sample Period
Ela
p
sed
Processin
g
com
p
lete
Will no longer
res
p
ond to
StartEvent
Creates a
trace report
Receives
trace reports
Disables
trace re
p
or
t
Will respond to
StartEven
t
Enables
trace re
p
or
t
Trace re
p
or
t
created but will
not res
p
ond
to StartEvent
TraceReportCreate
TraceRe
p
ortSend
TraceReportSend
TraceRe
p
ortSend
TraceReportSend
TraceRe
p
ortDisabl
e
TraceRe
p
ortEnabl
e
Figure 8
Trace Reporting with Event Control
SEMI E53-0704 © SEMI 1996, 2004 9
7.3.4 Event Reporting with Non-predefined CollectionEvent Object — Additional capabilities of SEMI E39 (OSS)
give Event Reporting standard more flexibility. For example, CollectionEvent objects can be created while
equipment is running if the equipment has been installed the capability. If event sources are dynamically generated
as process job, CollectionEvent objects must be created after the source is generated. If a user is not interested in
such source, this capability is not required. However, if the user needs to get event report for such source, the
capability is useful. This document doesn’t recommend nor suppress that but it’s depending on users.
Creat e
(Collect ionEvent object )
Dat Report Cr eat e (x n)
FACTORY
(Ser vice User )
Cr eat es a
Collect ionEvent obj ect
A Collect ionEvent
obj ect is cr eat ed.
Ret ur ns obj ect I D
EQUI PMENT
(Ser vice Pr ovider )
Dat aRepor t obj ect (s)
is(ar e) cr eat ed.
Ret ur ns obj ect I D
Cr eat es Dat aRepor t
obj ect (s)
Collect ionEvent Link (x n)
Dat aRepor t obj ect (s)
is(ar e) linked.
Links Dat aRepor t
obj ect (s)
Set At t ribut e
(Enabled=TRUE)
Collect ionEvent
obj ect is Enabled.
Enables
Collect ionEvent
Event Report Send
Event happens.
Linked Dat aRepor t (s)
value(s) ar e acquir ed
Cor r esponding
Pr ocedur e begins
Event Report Send
Event happens.
Linked Dat aRepor t (s)
value(s) ar e acquir ed
Cor r esponding
Pr ocedur e begins
Collect ionEvent
obj ect is Disabled.
Disables
Collect ionEvent
Collect ionEvent Unlink (x n)
Dat aRepor t obj ect (s)
is(ar e) unlinked.
Unlinks Dat aRepor t
obj ect (s)
Collect ionEvent Link (x n)
Dat aRepor t obj ect (s)
is(ar e) linked.
Links Dat aRepor t
obj ect (s)
Collect ionEvent
obj ect is Enabled.
Enables
Collect ionEvent
Event Report Send
Event happens.
Linked Dat aRepor t (s)
value(s) ar e acquir ed
Cor r esponding
Pr ocedur e begins
Set At t ribut e
(Enabled=FALSE)
Set At t ribut e
(Enabled=TRUE)
Figure 9
Non-predefined Collection Event Scenario
8 Specification
8.1 Object Definitions
8.1.1 Collection Event Object — A collection event object generates an event report each time it is triggered by a
collection event from an event source. An event report contains the data samples from zero or more data reports to
which it is linked by the collection event object.
Table 1 Collection Event Object Attribute Definitions
Attribute Name Definition Rqmt Access Form
ObjType Specification of the Object Type of “Collection Event.” Y RO Text =
“COLLEVENT”
ObjID Object Identifier, within the scope of the event source object, for the
Collection Event which is the trigger for the generation of an event
report.
Y RO Text
SEMI E53-0704 © SEMI 1996, 2004 10
Attribute Name Definition Rqmt Access Form
EventSource The object specifier which is the source of the event, see Section 7.1
and SEMI E39 (Object Services Standard).
N RO Formatted Text
DataReportList Ordered list of data report object identifiers (text) to be sampled and
sent with the event report.
Y RO List
Enabled If this flag is cleared or false, then event reports will not be generated
and sent when the associated Collection Event is detected.
Y RW Boolean
8.1.2 Data Report Object — The data report is part of the event reporting setup. It references zero or more attributes
of a data source object and may be linked to zero or more event reports or trace reports.
Table 2 Data Report Object Attribute Definitions
Attribute Name Definition Rqmt Access Form
ObjType Specification of the Object Type of “Data Report.” Y RO Text = “DATARPT”
ObjID The object identifier of a pre-defined data report or one defined
dynamically by the service user. ReportIDs are unique for
eachservice user.
Y RO Text
DataSource The object specifier of the object which has the attributes to be
reported, see Section 7.1.
N RO Formatted Text
AttrList An ordered list of attribute names from the Data Source object
which will be sampled for inclusion in the data report.
Y RW List
8.1.3 Trace Object — The trace object generates trace reports based on the settings of its attributes. Trace object
activities may be started and stopped by a collection event and may refer to one or more data reports.
Table 3 Trace Object Attribute Definitions
Attribute Name Definition Rqmt Access Form
ObjType Specification of the Object Type. Y RO Text = “TRACE”
ObjID The identifier of a Trace Object. Trace reports contain this parameter
to be used for reference purposes.
Y RO Text
Enabled If this flag is cleared or false, then trace reports will not be generated
and sent.
Y RW Boolean
DataReportList Ordered list of data report object identifiers (text) to be sampled and
sent with trace report.
Y RO List
SamplePeriod The time delay between samples in seconds. Resolution may be in
fractions of a second and should be specified by the service provider.
The resolution available may also vary depending on the Data Source.
Y RO Float
TotalSamples The number of samples to be taken before trace reporting stops
automatically.
N RO Positive Integer
GroupSize The number of samples taken before the report is sent to the service
user.
N RO Positive Integer
StartEventSource The object specifier of the object which is the source of the event
which starts the trace reporting.
N RO Formatted Text
StartEventID The event within the event source object which starts the trace
reporting.
N RO Text
StopEventSource The object specifier of the object which is the source of the event
which stops the trace reporting.
N RO Formatted Text
StopEventID The event within the event source object which stops the trace
reporting.
N RO Text
AutoDelete Specifies if trace report automatically deletes itself when its reporting
cycle is complete.
N RO Boolean