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SEMI P41-0304 E © SEMI 2004 12 ImageRe ferenceAddress Imag eInform ation ImageFormat ImageMagnification ImagePixelNumber_X ImagePixelNumber_Y ImagePixelSize (uni t) ImagePixelSize_X ImagePixelSize_Y ImageG rayLevel Imag …

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SEMI P41-0304
E
© SEMI 2004 11
CoordinateSystem
ToolOriginPointInformation
ToolOriginPoint
ToolOriginPosition_X
ToolOriginPosition_Y
ToolStageCorrectionInformation
ToolStageCorrection (unit)
ToolStageCorrection_Y
ToolStageSkew (unit)
MaskOriginPointInformation
MaskOriginPoint
MaskOriginPosition_X
MaskOriginPosition_Y
ToolOffset_X
ToolOffset_Y
ToolStageAccuracy (unit)
ToolOriginPosition (unit)
ToolStageCorrection_X
ToolStageSkewCorrection
MaskOriginPosition (unit)
ToolOffset (unit)
Figure 5
Structure of Tool Coordinate Section
ReferenceMark
MarkRotation
MaskMirror
MaskFlip
Figure 6
Structure of Mask Direction Information Section
SEMI P41-0304
E
© SEMI 2004 12
ImageReferenceAddress
ImageInformation
ImageFormat
ImageMagnification
ImagePixelNumber_X
ImagePixelNumber_Y
ImagePixelSize (unit)
ImagePixelSize_X
ImagePixelSize_Y
ImageGrayLevel
ImageIllumination
ImageRotation
ImageMirror
ImageFlip
ImageConvertInformation
ImageContrast
ImageBrightness
ImageConversionParameter
ImageReference (origin)
ImageReferencePoint
ImageReferencePosition_X
ImageReferencePosition_Y
ImageTarget (origin)
ExpressionMark
ImageTargetPosition_X
ImageTargetPosition_Y
ImageReferencePosition(unit)
ImageTargetPosition (unit)
Figure 7
Structure of Image Data Section
SEMI P41-0304
E
© SEMI 2004 13
Mask S ize
Inspecti on Are a
Chip Size
Inspection Area Chip
Reference Point
Figure 8
Inspection Area